A kind of production device and production method of electronic grade hydrofluoric acid

A technology of electronic grade hydrofluoric acid and production equipment, applied in separation methods, chemical instruments and methods, perfluorocarbon/hydrofluorocarbon capture, etc., can solve waste environmental pollution, improve preparation cost, and output Low efficiency and other problems, to achieve the effect of reducing the purification process, high economic benefits and environmental protection, and improving utilization

Active Publication Date: 2022-08-02
BEIJING UNIV OF CHEM TECH
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Problems solved by technology

Such as gas absorption technology can be used for large-scale production, but sub-boiling distillation technology can only be used to prepare a small amount of products, and the production method in the prior art may introduce new impurities, or the output rate is low, or the production cost is high, It is difficult to meet industrial needs, and the waste produced in the production process pollutes the environment, and waste disposal increases the cost of preparation

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  • A kind of production device and production method of electronic grade hydrofluoric acid
  • A kind of production device and production method of electronic grade hydrofluoric acid

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Embodiment 1

[0032] as attached figure 1 As shown, a production device for electronic grade hydrofluoric acid provided by the present invention includes a purification system, a re-absorption system and a first tail gas absorption system;

[0033] The purification system includes a raw material tank 11, an evaporator 12 whose inlet is connected to the bottom end of the raw material tank 11, a purification tower 13 whose bottom end is connected to the outlet of the evaporator 12, and an absorption tower 14 connected to the top of the purification tower 13 at the bottom end, which is connected to the absorption tower 14. The bottom end of the absorption tower still storage tank 15, the bottom end of the absorption tower still storage tank 15 is connected with the first conveying pump 16, the ultrapure filtering device 17 and the filling device 18 in sequence, and the bottom end of the purification tower 13 is connected with a residual liquid storage tank 19.

[0034] The operation process of...

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Abstract

The invention discloses a production device and production method of electronic grade hydrofluoric acid. The raw material industrial anhydrous hydrogen fluoride is first vaporized through an evaporator and then transported to a purification tower, and high-purity hydrogen fluoride gas is obtained through rectification; The tower is absorbed with a certain concentration of hydrofluoric acid in the liquid phase to obtain crude electronic grade hydrofluoric acid; finally, the finished electronic grade hydrofluoric acid is obtained by ultra-pure filtration. The invention overcomes the technical problems of small output and low purity in the prior art, and the production process meets the requirements of environmental protection, and is suitable for industrialized large-scale production.

Description

technical field [0001] The invention relates to the technical field of fine chemicals, in particular to a production device and production method of electronic grade hydrofluoric acid. Background technique [0002] Electronic grade hydrofluoric acid is a kind of inorganic acid, which is weakly acidic, colorless and transparent liquid at room temperature, volatile, and has a strong pungent odor. It is highly corrosive, making it one of the key basic chemical materials in the microelectronics industry. Its purity and cleanliness have a very important impact on the yield, electrical properties and reliability of integrated circuits. According to the statistics of the International Semiconductor Industry Association (SEMI), before 2020, 62 new fabs will be built in the world, of which 26 will be in China, accounting for 42%. The global semiconductor production capacity is gradually shifting to China. The rapid development of downstream semiconductors, liquid crystal panels, and...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01B7/19
CPCC01B7/195C01B7/196C01B7/197B01D53/1456B01D2257/2047Y02C20/30B01D53/1406B01D53/1418B01D2252/10B01D53/1493B01D53/1431
Inventor 李群生
Owner BEIJING UNIV OF CHEM TECH
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