Solar cell and photovoltaic module
A technology of solar cells and electrodes, which is applied to electrical components, circuits, semiconductor devices, etc., can solve the problems that the conversion efficiency of passivated contact cells needs to be improved, and achieve the effects of improving passivation effect, improving conversion efficiency, and high activation rate
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[0027] It can be known from the background art that at present, tunneling oxide passivation contact (TOPCon) cells have received continuous attention due to their excellent surface passivation effect, high theoretical efficiency and good compatibility with traditional production lines. The most notable feature of TOPCon technology is its high-quality stack structure of ultra-thin silicon oxide and heavily doped polysilicon (poly-Si), so phosphorus diffusion doping is an important part of it, and the excellent passivation contact on the back of TOPCon requires The field effect is achieved by phosphorus diffusion doping.
[0028] At present, the research on doping phosphorus elements mainly focuses on the distribution of phosphorus elements in Poly-Si. For Poly-Si-SiO x -The research on the concentration change and distribution of phosphorus element in Si is not perfect, and it is impossible to essentially optimize the field effect and passivated contacts, so as to further impro...
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