Method and device for measuring angular oscillation through laser interference

A technology of laser interference and measuring device, which is applied in the direction of measuring device, measuring ultrasonic/sonic/infrasonic wave, instruments, etc.

Active Publication Date: 2007-02-21
中航长城计量测试(天津)有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The disadvantage of this invention is that it is only applicable to the occasion of measuring the linear vibration of the object

Method used

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  • Method and device for measuring angular oscillation through laser interference
  • Method and device for measuring angular oscillation through laser interference

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Effect test

Embodiment 1

[0017] The angular vibration laser interferometry device includes a laser power supply 1, a laser 2, a lens 3, an aperture 4, a lens 5, a parallel beam splitting unit 6, an acousto-optic modulator power supply 10, an acousto-optic modulator 11, and plane mirrors 12, 13, 14 , 15, grating 16, receiving lens 17, reflective plane mirror 18, photoelectric conversion device 19, electrical frequency mixing down-conversion processing unit 20 and data acquisition and processing unit 21, laser power supply is connected with laser, the light that laser sends passes through lens 3, light After the aperture 4 reaches the lens 5, one path of light after passing through the parallel beam splitting unit 6 passes through the acousto-optic modulator 10, and then enters the grating 16 through the plane mirror group 12, 13, and the other path of light enters the grating 16 through the mirrors 14, 15, The coincident light beam of the two diffracted lights passing through the receiving lens 17 reach...

Embodiment 2

[0022] The angular vibration laser interferometry device includes a laser power supply 1, a laser 2, a lens 3, an aperture 4, a lens 5, a parallel beam splitting unit 22, an acousto-optic modulator power supply 10, an acousto-optic modulator 11, and plane mirrors 12, 13, 14 , 15, grating 16, receiving lens 17, reflective plane mirror 18, photoelectric conversion device 19, electrical frequency mixing down-conversion processing unit 20 and data acquisition and processing unit 21, laser power supply is connected with laser, the light that laser sends passes through lens 3, light After the diaphragm 4 reaches the lens 5, one path of light after passing through the parallel beam splitting unit 22 passes through the acousto-optic modulator 10, and then enters the grating 16 through the plane reflector group 12, 13, and the other path of light enters the grating 16 through the reflectors 14, 15, The coincident light beam of the two diffracted lights passing through the receiving lens...

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Abstract

A laser interference measurement method of angular vibration includes forming two parallel measurement lights by collimating and parallel-dividing laser beam with lens and shutter as well as dividing unit, forming diffraction lights of said two measurement lights on grating, superposing and interfering on two diffraction lights and converting them to be voltage signal by lens and mirror as well as optical-electric converter, sending voltage signal to frequency mixing treatment unit then to data collection and processing unit for finalizing measurement of angular vibration.

Description

technical field [0001] The invention relates to an angular vibration laser interferometry method and device for accurately measuring and analyzing the angular vibration of a rotary table. Background technique [0002] According to the relationship between the light incident direction (or plane) and the motion direction, currently disclosed solutions for the field of angular vibration measurement are roughly divided into two types: axial measurement and longitudinal measurement. Axial measurements use angle encoders, while longitudinal measurements are surface measurements where the cooperative target is any surface, corner cube or grating. [0003] Angular vibration measurements using angle encoders have a limited upper frequency limit. The diffraction and interference of the finely ruled grating are used to generate signals. The grating is radially marked on the circumference, and the phase change of the interference fringes generated by its movement represents the angular...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01H9/00
Inventor 李新良张大治薛景锋徐晓梅连大鸿
Owner 中航长城计量测试(天津)有限公司
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