Measuring probe used in particular for measuring the length of thin layer

A technology for measuring probes and thin layers, which is applied in the field of measuring probes, can solve the problems of improving the measurement accuracy of measuring probes, and achieve the effects of improving accuracy, simple installation, and reducing friction

Inactive Publication Date: 2007-06-06
IMMOBILIENGESELLSCHAFT HELMUT FISCHER GMBH & CO KG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the requirements for the measurement accuracy of such measuring probes are always increasing

Method used

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  • Measuring probe used in particular for measuring the length of thin layer
  • Measuring probe used in particular for measuring the length of thin layer
  • Measuring probe used in particular for measuring the length of thin layer

Examples

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Embodiment Construction

[0031] FIG. 1 shows a measuring probe 11 for measuring the thickness of thin layers, which is used in a device not shown in detail. The measuring probe 11 is used for the non-destructive measurement of thin layer thicknesses. According to the exemplary embodiment, this measuring probe 11 is provided detachably to the device for measuring the thickness of the thin layer and is able to transmit the recorded measured values ​​via the connection line 12 . Alternatively, the measuring probe 11 can be part of a device for measuring the thickness of a thin layer in the form of a stationary device or a manual device.

[0032] The measuring probe 11 comprises a housing 14 which is designed in particular to be cylindrical. On the longitudinal axis 16 of the housing 14 at least one sensor element 17 is preferably arranged. The sensor element 17 is supported by a holding member 18 received by an end portion 19 of the housing 14 . At least on one sensor element 17 , along the longitudin...

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PUM

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Abstract

The invention relates to a Measuring probe, especially for a device for the measurement of the thickness of thin layers, with a housing (14) comprising at least one sensor element (17), which is accepted along a longitudinal axis (16) of the housing (14) at least slightly movable to the housing (14) and with a contact spherical cap (21) assigned to the at least one sensor element (17) for setting the measuring probe (11) onto a surface of a measuring object, whereby in that the at least one sensor element (17) is accepted by a holding element (18) - along the longitudinal axis (16) of the housing (14) - which is spring-loaded resiliently and which is fastened on the housing (14).

Description

technical field [0001] The invention relates to a measuring probe, in particular to a measuring probe of a device for measuring the thickness of thin layers according to claim 1 . Background technique [0002] From DE 103 48 652 A1 a measuring probe comprising a housing for accommodating at least one sensor element is known. In order to place the measuring probe on the surface of the measuring object, a contact globe is provided which is connected to the sensor element. The sensor element is connected, for example, to a printed circuit board comprising flexible strips such as connecting wires leading to housing connections. A housing housing the sensor element is movably guided within the bushing. When the measuring probe is placed on the measuring object, the housing can extend into the sleeve, so that through the sleeve, the measuring probe will be placed on the measuring object and can ensure that the contact ball is placed on the measuring object s surface. For housi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B7/00G01B7/06G01B1/00
CPCG01B7/105G01B7/06
Inventor H·费希尔
Owner IMMOBILIENGESELLSCHAFT HELMUT FISCHER GMBH & CO KG
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