Device and method for synthesizing carbon nanotube
A technology of nanotubes and synthetic carbon, which is applied in the direction of carbon nanotubes, nanocarbon, nanotechnology, etc., and can solve problems such as manipulator failure and reaction tube pollution
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[0029] The present invention will now be described more fully with reference to the accompanying drawings, in which preferred embodiments of the invention are shown. However, this invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Moreover, these embodiments are provided in order to fully and comprehensively disclose the content of the present invention, and fully convey the scope of the present invention to those skilled in the art. In the drawings, the thickness of layers and regions are exaggerated for clarity. Throughout, the same reference numerals denote the same components.
[0030] FIG. 1 shows an exemplary apparatus 1 for synthesizing carbon nanotubes (hereinafter referred to as "CNT synthesis apparatus"). The CNT synthesis apparatus 1 includes a composite substrate 10, a carbon nanotube synthesis chamber (hereinafter referred to as "reaction chamber") 100, and a pre / post-treatment chamber. ...
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