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Method and apparatus for carbon fiber fixed on a substrate

a technology of carbon nanotubes and substrates, which is applied in the manufacture of electrode systems, cold cathode manufacturing, electric discharge tubes/lamps, etc., can solve the problems of high cost, low carbon nanotube yield, and inability to discharge stablely, so as to reduce manufacturing costs and process steps.

Inactive Publication Date: 2010-07-08
CANON KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The present invention provides a method for continuously forming carbon fibers on a desired substrate using a deposition apparatus for carbon fiber. This method has fewer process steps and lower manufacturing costs compared to existing methods. The carbon fiber is formed by arc discharge between an anode and a cathode in a chamber, and is then ejected from the chamber through a transporting tube. The carbon fiber collides with the substrate, resulting in the formation of a carbon fiber film on the substrate. The invention also provides a method for manufacturing a display with multiple electron-emitting devices using this deposition method. Evaporation and condensation of carbon are effected by arc discharge, and the generated carbon fiber is dispersed into an inert gas and transported along with the inert gas to form a carbon fiber film on the substrate.

Problems solved by technology

Accordingly, the distance between the anode 2 and the cathode 3 cannot be fixed to be constant due to the growth of the cathode deposited substance 16, resulting in unstable discharge.
Furthermore, the yield of the carbon nanotubes is low due to the generated cathode deposited substance 16 being exposed to arc discharge for a long time.
However, with any of these methods, the number of process steps is great, leading to high costs.
As a result, the carbon fibers cannot be continuously manufactured, leading to an increase of process steps.
However, any of these methods has a great number of process steps, leading to high costs.

Method used

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  • Method and apparatus for carbon fiber fixed on a substrate
  • Method and apparatus for carbon fiber fixed on a substrate
  • Method and apparatus for carbon fiber fixed on a substrate

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first embodiment

[0035]A carbon nanotube generating / film-forming apparatus and a manufacturing method according to a first embodiment of the present invention will be described with reference to FIG. 1. A graphite electrode with the diameter of 10 mm was employed for the cathode 3, a carbon electrode with the diameter of 10 mm and the length 10 cm, containing Ni of 20% by weight was employed for the anode 2, and the distance between these electrodes was set to 1 mm. First, the carbon nanotube generating chamber 1, the transporting tube 5, and the carbon nanotube film-forming chamber 9, were evacuated so that the pressure thereof reached 10−2 Pa or less. Subsequently, a helium gas was supplied into the carbon nanotube generating chamber 1 through the inert gas introducing port 4, whereby the pressure in the carbon nanotube generating chamber 1 was adjusted to be around 70 kPa. At this time, the carbon nanotube film-forming chamber 9 was evacuated by the vacuum pump 15, whereby the pressure in the car...

second embodiment

[0040]A carbon nanotube generating / film-forming apparatus and a manufacturing method according to a second embodiment of the present invention will be described with reference to FIG. 1. A graphite electrode with the diameter of 10 mm was employed for the electrode 3, a carbon electrode with the diameter of 10 mm and the length 10 cm, containing a Ni—Co alloy core was employed for the anode 2, and the distance between these electrodes was set to 1 mm. First, the carbon nanotube generating chamber 1, the transporting tube 5, and the carbon nanotube film-forming chamber 9, were evacuated so that the pressure thereof reached 10−2 Pa or less. Subsequently, a helium gas was supplied into the carbon nanotube generating chamber 1 through the inert gas introducing port 4, whereby the pressure in the carbon nanotube generating chamber 1 was adjusted to around 70 kPa. At this time, the carbon nanotube film-forming chamber 9 was evacuated by the vacuum pump 15, whereby the pressure in the carb...

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Abstract

Evaporation and condensation of carbon is effected by arc discharge between an anode formed of a carbon electrode and a cathode disposed facing the carbon electrode 2 in an inert gas atmosphere, and at the same time, the generated carbon nanotubes are dispersed into an inert gas and transported along with the inert gas through a transporting tube, and a jet of the inert gas containing the carbon nanotubes is emitted from a nozzle, thereby forming carbon nanotubes on a target substrate. This provides a carbon nanotube manufacturing method wherein carbon nanotubes are generated with a simple process, and the CNT patterning process is simplified by forming a carbon nanotube film on a substrate, thereby reducing costs.

Description

BACKGROUND OF THE INVENTION[0001]1. Field of the Invention[0002]The present invention relates to a method and apparatus for continuously generating and forming carbon fiber (fibrous carbon) such as carbon nanotubes, graphite nanotubes, or the like.[0003]2. Description of the Related Art[0004]A carbon nanotube, which is a type of carbon fiber, is a material in the shape of a tube having a configuration wherein graphite structures are wound in the shape of a cylinder, and is a new material which is expected to be applied to various fields due to unique properties thereof. FIG. 2 illustrates a conventional method for generating carbon nanotubes employing the arc method disclosed in Japanese Patent Laid-Open No. 6-280116. As shown in FIG. 2, DC arc discharge in an inert gas with a carbon material, such as graphite or the like, being used as an anode 2, and a heat-resisting electroconductive material being used as a cathode 3, causes evaporation of the carbon material on the side of the ...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): C23C14/28H01J9/02B01J19/08C01B31/02C23C14/06D01F9/12
CPCB01J19/088B01J2219/0809B01J2219/0839B82Y30/00Y10S977/892C01B31/0233D01F9/12Y10S977/89B82Y40/00C01B32/162C01B32/05H01J9/24
Inventor SAITO, YASUYUKIISHIKURA, JUNRI
Owner CANON KK