Non-Wear Shutter Apparatus for a Vapor Deposition Apparatus
Inactive Publication Date: 2012-06-28
FIRST SOLAR INC (US)
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- Abstract
- Description
- Claims
- Application Information
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Benefits of technology
[0008]In accordance with an embodiment of the invention, an apparatus is provided for vapor deposition of a sublimated source material, such as CdTe, as a thin film on a photovoltaic (PV) module substrate. Although the invention is not limited to any particular film thickness, a “thin” film layer is generally recognized in the art as less than 10 microns (μm). The apparatus includes a deposition head wherein a source material is sublimated. A distribution manifold is provided with a plurality of passages defined therethrough for passage of the sublimated source material to an underlying substrate. A shutter plate is disposed above the distribution manifold
Problems solved by technology
For example, CdTe is relatively expensive and, thus, efficient utilization (i.e., minimal waste) of the material is a primary cost factor.
Non-uniformity or defects in the film layer can significantly decrease the output of the module, thereby adding to the cost per unit of power.
The process must be periodically interrupted in order to replenish the CdTe source, which is detrimental to a large scale production process.
In addition, the deposition process cannot readily be stopped and restarted in a controlled manner, resulting in significant non-utilization (i.e., waste) of the CdTe material during the indexing of the substrates into and out of the chamber, and during any steps needed to position the substrate within the chamber.
Method used
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[0021]Reference now will be made in detail to embodiments of the invention, one or more examples of which are illustrated in the drawings. Each example is provided by way of explanation of the invention, not limitation of the invention. In fact, it will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the scope or spirit of the invention. For instance, features illustrated or described as part of one embodiment, can be used with another embodiment to yield a still further embodiment. Thus, it is intended that the present invention encompass such modifications and variations as come within the scope of the appended claims and their equivalents.
[0022]FIG. 1 illustrates an embodiment of a system 10 that may incorporate a vapor deposition apparatus 100 (FIGS. 2 and 3) in accordance with embodiments of the invention configured for deposition of a thin film layer on a photovoltaic (PV) module subs...
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Abstract
An apparatus and associated method for vapor deposition of a sublimated source material as a thin film on a photovoltaic (PV) module substrate includes a deposition head wherein a source material is sublimated. A distribution manifold is provided with a plurality of passages defined therethrough for passage of the sublimated source material to the substrate. A shutter plate is disposed above the distribution manifold and includes a plurality of passages therethrough that align with the passages in the distribution manifold in a first position of the shutter plate. The shutter plate is movable to a second position wherein the shutter plate blocks the passages in the distribution manifold to flow of sublimated material therethrough. A lifting mechanism is configured between the shutter plate and the distribution manifold to lift and move the shutter plate between the first and second positions without sliding the shutter plate on the distribution manifold.
Description
FIELD OF THE INVENTION[0001]The subject matter disclosed herein relates generally to the field of thin film deposition processes wherein a thin film layer, such as a semiconductor material layer, is deposited on a substrate. More particularly, the subject matter is related to a shutter apparatus that selectively passes sublimated source material in a vapor deposition apparatus.BACKGROUND OF THE INVENTION[0002]Thin film photovoltaic (PV) modules (also referred to as “solar panels”) are gaining wide acceptance and interest in the industry, particularly modules based on cadmium telluride (CdTe) paired with cadmium sulfide (CdS) as the photo-reactive components. Solar energy systems using CdTe photovoltaic (PV) modules are generally recognized as the most cost efficient of the commercially available systems in terms of cost per watt of power generated. However, the advantages of CdTe not withstanding, sustainable commercial exploitation and acceptance of solar power as a supplemental or...
Claims
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Login to View More IPC IPC(8): H01L21/20C23C16/455C23C16/448
CPCC23C14/0629C23C14/56C23C14/24
InventorRATHWEG, CHRISTOPHERLITTLE, EDWIN JACKSON
OwnerFIRST SOLAR INC (US)