Gas Sensor, Gas Measuring System Using the Gas Sensor, and Gas Detection Module for the Gas Sensor
a technology of gas sensor and detection module, which is applied in the direction of instruments, specific gravity measurement, measurement devices, etc., can solve the problems of not being able to guarantee high repeatability and high reliability of gas sensors, and achieve the effect of reliable manufacture of gas sensors and high quality
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first embodiment
3. First Embodiment
(1) Composition
[0135]FIG. 1 is a diagram which schematically illustrates a gas measuring system according to a first embodiment of the present invention.
[0136]As shown in Figurel, a gas measuring system 0100 according to the first embodiment comprises, a gas sensor 0101, an electric power supply 0102 capable of generating an AC voltage of various frequencies, a measuring means 0103 for measuring an electric response from the gas sensor, and a gas desorbing means 0104 for desorbing gases which are adsorbed by the gas sensor.
[0137]In the following explanation, the gas sensor will first be described, followed by the principle of detecting gases and components other than the gas sensor.
(2) Structure of the Gas Sensor
(A) Basic Structure
[0138]The gas sensor of the present invention comprises a gas detection device, a capacitive element, and a pair of electrodes. In the basic structure of the gas detection device, the pair of electrodes are electrically connected to elec...
second embodiment
4. Second Embodiment
[0228]A gas measuring system according to a second embodiment of the present invention is explained below.
(1) Composition
[0229]The basic composition of the gas measuring system according to the second embodiment of the present invention is identical to the basic composition of the gas measuring system according to the first embodiment shown in FIG. 1. Namely, the gas measuring system according to the second embodiment also comprises components that respectively function as the gas sensor, an electric power supply capable of generating an AC voltage having different types of frequency, a measuring means for measuring the electric response from the gas sensor, and a gas desorbing means for desorbing gases which is adsorbed to the gas sensor. The components except for the gas sensor are the same as the constituents of the first embodiment.
(2) Gas Sensor
[0230]The gas sensor according to the present embodiment comprises a gas detection device containing a dielectric s...
example 1-1
(1) Example 1-1
[0242]A glass substrate with 30 mm×30 mm in area and a thickness of 0.12 to 0.17 mm was prepared. The substrate was placed in a vacuum chamber in which the pressure was 1×10−5 Pa and the content of residual oxygen was at most 10 ppb, namely, at most 1011 molecules / cm3. A pattern having the shape of a rectangle (20 mm×4 mm) as a lower electrode and a pattern contacting the rectangular pattern and having the shape of a line as a drain electrode were then formed by depositing aluminum. The thickness of these patterns was almost 100 nm.
[0243]A boat made of molybdenum and filled with C60 fullerene, (Nanom Purple, which is a product of Frontier Carbon Co. Ltd,) was heated in the chamber. The temperature of the molybdenum boat was measured during the heating and was controlled to be in the range of 500 to 550 degrees C. so as to sublimate C60 fullerene. A film of C60 fullerene having a thickness of 2 micrometers was formed by the sublimation on the above-described aluminum p...
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Abstract
Description
Claims
Application Information
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