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Oscillation method and device of fluorine molecular laser

a fluorine molecular laser and oscillator technology, applied in lasers, optical resonator shapes and constructions, active medium materials, etc., can solve problems such as reducing the resolution of exposure, and achieve the effects of narrow spectral line width, easy stabilization, and reduced resonator length

Inactive Publication Date: 2006-08-29
KOMATSU LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The present invention provides an oscillation method and a device of fluorine molecular laser with narrow spectral line width. The method involves making the space of a vertical mode expressed in wavelength larger than the full width at half maximum of the gain curve of the laser gas. The device includes main electrodes for performing main discharge in a same direction as the optical axis of the laser light, an insulator into which the laser gas is injected, and resonators placed with the insulator between them. The resonator length satisfies a mathematical expression. The device can achieve single vertical mode oscillation and has a very narrow spectral line width. The use of the device as a light source in an aligner for exposure with high resolution is also possible.

Problems solved by technology

However, the prior art disclosed in the aforementioned Japanese Patent Laid-open No. 2000-216471 has the problem described below.
As a result, there arises the problem of reducing resolution of exposure.

Method used

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  • Oscillation method and device of fluorine molecular laser
  • Oscillation method and device of fluorine molecular laser
  • Oscillation method and device of fluorine molecular laser

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first embodiment

[0060]As explained above, the discharge tube 12 constituted by an insulator is held between the main electrodes 14 and 15, and the main discharge 50 is caused in the optical direction, whereby the laser gas mixed with fluorine is excited, and the laser light 21 is oscillated. Such an excitation method is called an axial excitation method.

[0061]According to the axial excitation method, the main discharge 50 at this time is considered to be Surface Discharge occurring mainly by being transmitted along the inner wall of the discharge tube 12. Accordingly, impedance between the main electrodes 14 and 15 is determined by a density of the laser gas existing between the main electrodes 14 and 15. Therefore, dielectric voltage between the main electrodes 14 and 15 becomes low, and as compared with the lateral excitation method, discharge is started in a state in which the pressure of the laser gas is low, and is stabilized. As a result, as compared with a conventional lateral excitation ty...

third embodiment

[0075]As shown in FIG. 7, the resonator length L in the third embodiment is expressed as the distance between the outside surface 16A on which the antireflection coating is applied and the outside surface 18A on which the total reflection coating is applied, and is about 2 cm. Accordingly, from the mathematical expression 1.4, the vertical mode space M (λ) is about 0.62 pm. On the other hand, if the laser gas is supplied so that the gas pressure P inside the optical path hole 74 is, for example, 0.1 MPa (one atmosphere), the gain half-value width Δλ(P, T) is about 0.5 pm from the mathematical expression 2.1. As a result, the vertical mode space M (λ) is wider than the gain half-value width Δλ(P, T), and therefore single vertical mode oscillation becomes possible. The emitted laser light 21 is incident on the aligner 25 and used for exposure.

[0076]As explained above, according to the third embodiment, the disc 73 serves as the discharge tube 12 in the first and the second embodiments...

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Abstract

An oscillation method and a device of fluorine molecular laser with narrow spectral line width are provided. For this purpose, the device includes main electrodes (14, 15) for performing main discharge (50) in substantially a same direction as an optical axis of laser light (11) to be oscillated to excite a laser gas containing fluorine, an insulator (12) which is held between the main electrodes and into which the laser gas containing fluorine is injected, and resonators (16, 18) which are placed with the insulator between them, and a space (M(λ)) of a vertical mode expressed in wavelength is made larger than full width at half maximum (Δλ) of a gain curve (R) of the laser gas.

Description

TECHNICAL FIELD[0001]The present invention relates to an oscillation method and a device of fluorine molecular laser.BACKGROUND ART[0002]Fluorine molecular laser devices are conventionally known, and, for example, Japanese Patent Laid-open No. 2000-216471 discloses one. FIG. 12 shows a fluorine molecular laser device 101 disclosed in the same Laid-opened Patent, and FIG. 13 shows a constitution of the fluorine molecular laser device 101 seen from a side, which is not disclosed in the same Laid-opened Patent. In FIG. 12 and FIG. 13, the fluorine molecular laser device 101 includes a laser chamber 102 in which a laser gas containing fluorine is sealed, and a pair of main electrodes 104 and 105 for exciting the laser gas by main discharge 150. A one-through fan 114 for leading a flow of the laser gas shown by the arrow 157 to an area between the main electrodes 104 and 105 and a heat exchanger 103 for cooling the laser gas are placed at predetermined positions in the laser chamber 102....

Claims

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Application Information

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Patent Type & Authority Patents(United States)
IPC IPC(8): H01S3/22H01S3/08H01S3/223G03F7/20H01L21/027H01S3/03H01S3/038H01S3/05H01S3/097H01S3/225
CPCH01S3/225H01S3/03H01S3/038H01S3/2258H01S3/09705
Inventor TAKEHISA, KIWAMUGOTO, TATSUMI
Owner KOMATSU LTD