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30results about How to "Improve evaporation yield" patented technology
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Mask plate, mask assembly and mask plate manufacturing method
ActiveCN108642441ASolve the problem of prone to color mixingImprove evaporation yieldVacuum evaporation coatingSolid-state devicesEvaporationEngineering
The invention relates to a mask plate, a mask assembly and a mask plate manufacturing method. The mask plate comprises a mask base plate and a shielding layer, the mask base plate is provided with anevaporation zone, the evaporation zone comprises an effective evaporation zone part and an ineffective evaporation zone part, the effective evaporation zone part corresponds to a display zone of a display panel, the ineffective evaporation zone part at least corresponds to a slotting zone of the display panel, the effective evaporation zone part and the ineffective evaporation zone part are each provided with a plurality of evaporation openings evenly, and the shielding layer is arranged on the surface of the mask base plate and shields the evaporation openings in the ineffective evaporation zone part. The mask plate is used for evaporation of the display panel, as for the mask base plate, the effective evaporation zone part corresponds to the display zone of a special-shaped screen, the ineffective evaporation zone part is used for supplementing notches outside the effective evaporation zone part, the edge of the overall evaporation zone is even in stress, folds of the mask base plateduring net stretching can be prevented, color mixing of the finally-molded display panel is further prevented, and the product yield is improved.
Owner:KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
Resin composition capable of being formed by direct evaporation and preparation method thereof
ActiveCN102719076ALow VOC contentSolve the problem of surface quality deteriorationEvaporationPolyresin
The invention discloses a thermoplastic resin composition capable of being formed by direct evaporation and a preparation method thereof. The composition comprises the following components in part by weight: 1 to 70 parts of thermoplastic resin, 10 to 60 parts of rubber grafted styrene resin copolymer, 0.2 to 5.0 parts of extracting agent, 0.1 to 2.0 parts of lubricant and 0.1 to 1.0 part of antioxidant. The preparation method of the composition comprises the following steps of: carrying out premixing on the extracting agent and the rubber-grafted styrene resin copolymer in a spray mode in a low speed mixer, adding the premixed materials, the thermoplastic resin, the lubricant and the antioxidant from a double-screw extrusion charging hole with a degasser and carrying out melt mixing at a temperature of 200 to 280 DEG C to obtain melt; and applying a low pressure of below 300mbar to a degassing region, ensuring the melt to stay in the degassing region for 20 to 50s, extruding and cooling to obtain the thermoplastic resin composition. According to the resin composition disclosed by the invention, the problems of fogging of the surface, forming precipitation, rugged surface and the like of a formed product are solved and the method is particularly suitable for the products which can be formed by directly evaporation.
Owner:SHANGHAI KUMHO SUNNY PLASTICS
Mask substrate, mask assembly, display panel and display device
ActiveCN109023235AHigh shape accuracyImprove yield rateVacuum evaporation coatingSolid-state devicesDisplay deviceEngineering
The invention provides a mask substrate, a mask assembly, a display panel and a display device. The mask substrate comprises a partial-etching region and a non-etching region; the non-etching region is arranged around the partial-etching region; the partial-etching region is provided with a plurality of openings formed in an array; and the minimum distance between any one of the openings and the non-etching region is not less than the distance between any two adjacent openings. According to the mask substrate provided by the invention, the distance between the openings, close to the non-etching region, of the mask substrate and the non-etching region is increased, positions liable to be wrinkled of the mask substrate and a mask strip in the stretched state can be kept away from the openings, the interference effect of deformation of the mask substrate in the stretched state on the mask strip is reduced while the uniformity of the mask substrate is ensured, and thus the yield of evaporated products manufactured through the mask assembly is improved.
Owner:BOE TECH GRP CO LTD +1
Display panel and preparation method
InactiveCN105679796AAvoid mixing colorsImprove evaporation yieldSolid-state devicesSemiconductor/solid-state device manufacturingComputer scienceColor mixing
The invention provides a display panel, which comprises a plurality of pixels, a substrate, a pixel definition layer and light-emitting layers, wherein the plurality of pixels are used for displaying images; the pixel definition layer is arranged on the substrate and comprises a plurality of openings corresponding to the plurality of pixels; the openings include first openings and second openings; the first openings are located in the surrounding region; the second openings are located in the middle region; the distance between two adjacent first openings is greater than that between two adjacent second openings; and the light-emitting layers are formed in the openings corresponding to the pixels. According to the display panel, the distance between two adjacent first openings of the pixel definition layer is greater than that between two adjacent second openings, so that the problem of color mixing of the light-emitting layers in the adjacent pixel regions with different colors can be avoided. The invention further provides a preparation method of the display panel.
Owner:TRULY HUIZHOU SMART DISPLAY
Pixel arrangement structure, organic electroluminescent device and display device
PendingCN107742638ALower requirementIncreased process windowSolid-state devicesSemiconductor devicesImage resolutionDisplay device
The invention relates to a pixel arrangement structure, an organic electroluminescent device and a display device. The pixel arrangement structure comprises several repeatedly arranged sub-pixel sets;each sub-pixel set comprises six sub-pixels, wherein the six sub-pixels have three colors and are arranged in two lines, the sub-pixels in each line have three colors, and colors of two adjacent sub-pixels are different. By making the six sub-pixels in each sub-pixel set arranged in two lines and making each line comprise the sub-pixels with three colors and the colors of the adjacent sub-pixelsdifferent, under the condition of a certain resolution, the aperture ratio of a single sub-pixel is larger, under the condition of certain brightness and light-emitting efficiency, the requirement forevaporation materials is effectively lowered, and the production cost is effectively lowered.
Owner:TRULY HUIZHOU SMART DISPLAY
Device and method for detecting vapor deposition alignment effect
InactiveCN108118291AImprove evaporation yieldReduce wasteVacuum evaporation coatingSputtering coatingPhysics
The invention relates to the field of vapor deposition and discloses a device for detecting vapor deposition alignment effect. The device comprises a clean chamber for simulating a vacuum vapor deposition environment as well as an alignment device and an alignment effect detection device which are positioned in the clean chamber; the alignment effect detection device is arranged below a mask plate; the alignment effect detection device comprises a detection camera, a detection camera fixing piece, a detection camera fixing piece moving guide shaft and a detection camera fixing piece guide shaft moving guide rail; the guide rail is fixed in the clean chamber. By adoption of the technical scheme, the vapor deposition yield can be increased, waste is reduced and the production cost is reduced.
Owner:TRULY HUIZHOU SMART DISPLAY
Mask, preparation method thereof and evaporation method
ActiveCN111172497AImprove magnetic attractionImprove color mixingVacuum evaporation coatingSputtering coatingMagnetic tension forceEngineering
The invention provides a mask, a preparation method thereof and an evaporation method. The mask comprises a main body part and a supporting part, wherein the main body part is arranged on the supporting part; and an area for evaporation of the supporting part comprises a plurality of opening areas, at least part of edges of at least part of the opening areas are provided with magnetic force adjusting parts, and the magnetic force adjusting parts are configured to adjust the magnetic force adsorption strength of the supporting part at corresponding positions. According to the mask, by arrangingthe magnetic force adjusting parts, the magnetic force adsorption strength of the supporting part at the corresponding positions can be adjusted, so that the adsorption magnetic force between a magnetic plate in evaporation equipment and the whole edges or the local edges of the opening areas on the supporting part is greatly enhanced, therefore the edges of the opening areas on the supporting part are prevented from being greatly dropped during evaporation, then the fold drop and the local deformation of the main body part under the supporting action of the supporting part are reduced or avoided, and the evaporation yield is improved.
Owner:BOE TECH GRP CO LTD
Planar evaporation source and evaporation plating device
ActiveCN107267922AReduce shadow distanceHigh-resolutionVacuum evaporation coatingSputtering coatingEvaporationEngineering
The invention relates to the technical field of display, and particularly discloses a planar evaporation source and an evaporation plating device. The planar evaporation source comprises a base, a heating module and a soaking flat layer, wherein the heating module is fixedly arranged on the base; the soaking flat layer is arranged on the heating module; an organic material thin film bearing surface used for bearing an organic material thin film is formed in the surface, back on to the heating module, of the soaking flat layer; the soaking flat layer is used for enabling the organic material thin film to be heated uniformly during the heating process of the heating module, so that organic material steam with the evaporation direction being perpendicular to the organic material thin film bearing surface is formed; heat is transferred to the soaking flat layer for soaking; a better temperature uniformity in the overall plane is achieved; that the planar evaporation source can enable the organic material thin film above to evaporate uniformly and vertically is ensured; besides, as the organic material thin film bearing surface is parallel to a glass substrate to be evaporation plated, an evaporation plating thin film with a uniform thickness is formed on the glass substrate, the shadow distance for evaporation plating is reduced, and the resolution is improved.
Owner:BOE TECH GRP CO LTD +1
Mask plate pressing device, mask plate installing device and mask plate assembling equipment
InactiveCN108608117AEliminate wrinklesImprove flatnessLaser beam welding apparatusWrinkle skinInlet channel
The invention provides a mask plate pressing device, a tensioning device and a precise mask plate tensioning machine, and belongs to the technical field of display panel manufacturing. The mask platepressing device comprises an outer frame, a cover plate, an air inlet channel and an air supply assembly; the outer frame is provided with a first open end and a second open end which communicate witheach other; the first open end can be matched with a mask plate in a sealed mode; the cover plate is made of a transparent material, covers the second open end and is connected to the second open endin a sealed mode; the air inlet channel is formed in at least one of the outer frame and the cover plate; and the air supply assembly is connected to the air inlet passage and is used for supplying air to the interior of the outer frame. The mask plate pressing device has the advantages that wrinkles of the mask plate can be eliminated, and the contact quality between the welding surfaces of themask plate and a framework can be improved.
Owner:BOE TECH GRP CO LTD +1
Drying device
ActiveCN107065433AReduce rebound airflowReduce generationOriginals for photomechanical treatmentAirflowPulp and paper industry
The invention relates to a drying device used for drying a mask. The drying device comprises a drying chamber and is characterized in that air blades are arranged at the port of the drying chamber, and air outlets used for discharging air flow generated by the air blades are arranged at positons, close to the bottom of the drying chamber, of the lateral walls of the drying chamber. The drying device has the advantages that the generation of rebounded air flow is reduced by the air outlets, so that the influence of dust raised by the rebounded air flow on the mask is reduced, and product evaporation yield is increased.
Owner:BOE TECH GRP CO LTD +1
Mask plate and mask assembly
InactiveCN110760790AReduce deformationConsistent deformationVacuum evaporation coatingSputtering coatingEngineeringMechanical engineering
The invention provides a mask plate and a mask assembly. The mask plate comprises a first evaporation area and a second evaporation area, a plurality of evaporation openings are formed in each of thefirst evaporation area and the second evaporation area, the density of the evaporation openings in the first evaporation area is greater than that of the evaporation openings in the second evaporationarea, and the thickness of the first evaporation area is greater than that of the second evaporation area. The mask assembly comprises a mask plate frame, supporting strips and at least one mask plate, wherein the supporting strips are fixedly arranged on the mask plate frame, and the at least one mask plate is arranged on the supporting strips and is fixedly connected to the mask plate frame.
Owner:YUNGU GUAN TECH CO LTD
Vacuum evaporation device and vacuum evaporation method
InactiveCN109609912AImprove adsorption capacityImprove evaporation yieldVacuum evaporation coatingSputtering coatingEngineeringVacuum evaporation
The embodiment of the invention discloses a vacuum evaporation device and a vacuum evaporation method. The vacuum evaporation device comprises a magnetic plate used for attracting a metal mask plate,the magnetic plate comprises a central magnetic plate unit and at least one peripheral magnetic plate unit located on the periphery of the central magnetic plate unit, wherein the central magnetic plate unit and the peripheral magnetic plate unit are independently and movably arranged relative to the metal mask plate. According to the technical scheme, the metal mask plate is sequentially attracted by utilizing the center magnetic plate unit and the peripheral magnetic plate unit which are independently arranged correspondingly, the flatness of the metal mask plate can be guaranteed, and therefore the evaporation yield can be improved.
Owner:KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
Metal mask plate and display panel
PendingCN113025957AImprove the uniformity of forceImprove the accuracy of stretchingVacuum evaporation coatingSolid-state devicesGraphicsEngineering
The embodiment of the invention provides a metal mask plate and a display panel. A first mask region and second mask regions located on the two sides of the first mask region are arranged, the first mask region comprises the pattern region, the first mask region and the second mask regions are distinguished through cutting lines, first stress auxiliary dispersion areas are arranged in the second mask regions, second stress auxiliary dispersion areas are arranged between the pattern region and the cutting lines, so that non-uniform force originally transmitted to the pattern region by a clamping jaw can be absorbed and dispersed to the second stress auxiliary dispersion areas, the stress uniformity and the net stretching precision of the pattern region are improved, the occurrence probability of the deviation phenomenon of the metal mask plate in the RGB pixel evaporation process is reduced, and then the evaporation yield is increased.
Owner:KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
Mask plate and mask assembly
PendingCN114107897AUniform strainLess prone to wrinklesVacuum evaporation coatingSputtering coatingEngineeringMechanical engineering
The invention discloses a mask plate and a mask assembly, the mask plate comprises an evaporation area and a peripheral area, and the evaporation area comprises at least one evaporation opening; the peripheral area comprises a solid area arranged around the evaporation area, stress release parts are arranged on the solid area, and the stress release parts surround the evaporation area and are distributed in the circumferential direction. In the mask plate, the stress release parts are formed in the peripheral area, the stress release parts reduce the volume of the stress concentration part in the entity area, and the stress release parts are distributed in the circumferential direction around the evaporation area, so that the stress of the entity area is uniformly released; the stress releasing part is formed in the peripheral area, so that the strain of the mask plate tends to be uniform during net stretching, the mask plate is not prone to wrinkling during net stretching, and therefore the evaporation yield is increased.
Owner:HEFEI VISIONOX TECH CO LTD
Evaporation source device and evaporation device
InactiveCN104846338AReduce decompositionReduce deteriorationVacuum evaporation coatingSputtering coatingCrucibleDisplay device
The invention relates to the technical field of evaporation equipment and discloses an evaporation source device and an evaporation device which are used for improving the uniformity of material heating and further increasing the yield of material evaporation and improving the properties of display devices. The evaporation source device comprises a crucible, a stirring unit and a driving device, wherein one end of the crucible is an open end; the stirring unit is located in the crucible and used for stirring material in the crucible; and the driving device is used for driving the stirring unit to rotate. The evaporation source device provided by the invention has the beneficial effects that material in the crucible can be stirred by the stirring unit so that the contact area between the material and the side wall of the crucible is always largest, thereby reducing the occurrence of problem that the material is partially heated too much and further reducing the occurrence of a phenomenon that the material is decomposed or degraded.
Owner:BOE TECH GRP CO LTD
Substrate evaporation contraposition system and method and device for measuring monitor pixel position
ActiveCN110029322AImprove evaporation yieldEliminate measurement biasVacuum evaporation coatingSputtering coatingEvaporationMeasurement precision
The invention discloses a substrate evaporation contraposition system and a method and device for measuring a monitor pixel position. The method comprises steps of carrying out edge shadow measurementand position measurement on a monitor pixel obtained by evaporation on a substrate; determining the edge climbing distance of the monitor pixel according to the measured edge shadow; and correcting the measured position data according to the edge climbing distance. By means of the device and the method, the measurement precision of the monitor pixel position can be improved, and the accuracy of determining the evaporation compensation amount of an OLED substrate is improved as well, so that the evaporation yield of the OLED substrate is improved.
Owner:BOE TECH GRP CO LTD +1
Substrate vapor deposition alignment system and method and device for monitoring pixel position measurement
ActiveCN110029322BImprove evaporation yieldEliminate measurement biasVacuum evaporation coatingSputtering coatingEvaporation (deposition)Engineering
Owner:BOE TECH GRP CO LTD +1
Mask frame, mask module and evaporation equipment
ActiveCN113355635AFlatness adjustmentImprove flatnessVacuum evaporation coatingSputtering coatingEngineeringMechanical engineering
The embodiment of the invention provides a mask frame, a mask module and evaporation equipment. The mask frame comprises a first frame body, the first frame body is provided with a first plane, a second plane and a plurality of first connecting holes, the first plane and the second plane are arranged in parallel, the first connecting holes are arranged in the circumferential direction of the first frame body at intervals, and the first connecting holes penetrate through the first plane and the second plane; a second frame body which is arranged on one side of the first frame body, and a plane, deviating from the first frame body, of the second frame body forms a fixing plane used for fixing a mask; and a plurality of connecting columns, wherein each connecting column penetrates through each first connecting hole and is detachably connected with the second frame body. According to the technical scheme, the flatness of the mask frame can be effectively improved.
Owner:BOE TECH GRP CO LTD +1
Mask blank, mask assembly, display panel and display device
ActiveCN109023235BHigh shape accuracyImprove yield rateSolid-state devicesVacuum evaporation coatingDisplay deviceEngineering
The invention provides a mask substrate, a mask assembly, a display panel and a display device. The mask substrate includes a half-etched area and a non-etched area, the non-etched area is arranged around the half-etched area, and the half-etched area has a plurality of openings arranged in an array, and any opening to the non-etched area The minimum distance is not less than the distance between any two adjacent openings. In the mask substrate proposed by the present invention, the distance from the opening close to the non-etching region to the non-etching region is lengthened, so that the position where the mask substrate and mask strips are prone to wrinkles in a stretched state is far away from the opening, ensuring While improving the uniformity of the mask substrate, it will also reduce the interference effect of the deformation of the mask substrate under stretching on the mask strip, thereby improving the yield rate of the evaporation product produced by the mask component.
Owner:BOE TECH GRP CO LTD +1
Mask plate and mask plate preparation method
ActiveCN108179379BAvoid damageImprove evaporation yieldVacuum evaporation coatingSputtering coatingComposite materialSi substrate
Owner:KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
Evaporation support plate, evaporation device and evaporation method
ActiveCN113337803AHigh precisionImprove evaporation yieldVacuum evaporation coatingSputtering coatingTemperature controlEngineering
The embodiment of the invention provides an evaporation support plate, an evaporation device and an evaporation method. The problem that a mask plate is deformed under the high-temperature condition and consequently the evaporation effect is affected is solved. The evaporation support plate comprises a temperature control area and a temperature sensing area, wherein the temperature sensing area is arranged at the periphery of the temperature control area and surrounds the temperature control area; and the temperature control area comprises a plurality of temperature control units, and the temperature of each temperature control unit can be independently controlled.
Owner:BOE TECH GRP CO LTD +1
Mask frame
ActiveCN113278917APrevent saggingWill not affect evaporation yieldSolid-state devicesVacuum evaporation coatingMechanical engineeringPlane parallel
The embodiment of the invention relates to the technical field of display, and discloses a mask frame. The mask frame comprises a frame body and at least one composite supporting strip, wherein the frame body comprises an evaporation area and frame arms located on the periphery of the evaporation area; the two ends of the composite supporting strip are fixed to the two mutually parallel frame arms separately, and each composite supporting strip comprises a magnetic supporting strip body and a non-magnetic supporting strip body located at the side, away from the corresponding frame arm, of the magnetic supporting strip body; and the orthographic projection of each non-magnetic supporting strip on a plane parallel to the evaporation area completely covers the orthographic projection of the corresponding magnetic supporting strip on the plane parallel to the evaporation area. By means of the mask frame in the embodiment, the evaporation yield can be increased to a great extent.
Owner:HEFEI VISIONOX TECH CO LTD
Resin composition capable of direct evaporation molding and preparation method thereof
ActiveCN102719076BLow VOC contentSolve the problem of surface quality deteriorationPolymer scienceAntioxidant
Owner:SHANGHAI KUMHO SUNNY PLASTICS
Evaporation device and its evaporation method, display device manufacturing equipment
ActiveCN107012433BImprove evaporation yieldEliminate wrinklesVacuum evaporation coatingSputtering coatingEvaporation (deposition)Display device
Owner:BOE TECH GRP CO LTD
A planar evaporation source and evaporation device
ActiveCN107267922BImprove yieldImprove product qualityVacuum evaporation coatingSputtering coatingEvaporationEngineering
The invention relates to the technical field of display, and particularly discloses a planar evaporation source and an evaporation plating device. The planar evaporation source comprises a base, a heating module and a soaking flat layer, wherein the heating module is fixedly arranged on the base; the soaking flat layer is arranged on the heating module; an organic material thin film bearing surface used for bearing an organic material thin film is formed in the surface, back on to the heating module, of the soaking flat layer; the soaking flat layer is used for enabling the organic material thin film to be heated uniformly during the heating process of the heating module, so that organic material steam with the evaporation direction being perpendicular to the organic material thin film bearing surface is formed; heat is transferred to the soaking flat layer for soaking; a better temperature uniformity in the overall plane is achieved; that the planar evaporation source can enable the organic material thin film above to evaporate uniformly and vertically is ensured; besides, as the organic material thin film bearing surface is parallel to a glass substrate to be evaporation plated, an evaporation plating thin film with a uniform thickness is formed on the glass substrate, the shadow distance for evaporation plating is reduced, and the resolution is improved.
Owner:BOE TECH GRP CO LTD +1
Conveying device and method for mask plate
ActiveCN110164808BEnough flatnessEfficient picking and handlingVacuum evaporation coatingSemiconductor/solid-state device manufacturingEngineeringMechanical engineering
The invention relates to the technical field of mask plate production, and discloses a mask plate conveying device and a conveying method. The handling device includes a contact plate, a magnetic part and a supporting column, the contact plate and the magnetic part are arranged oppositely, the contact plate includes a bonding surface for bonding the mask plate, and the supporting column connects the contact plate and the magnetic part so that the bonding surface is located within the magnetic field formed by the magnetic part. Through the above method, the present invention can ensure sufficient flatness of the mask plate.
Owner:YUNGU GUAN TECH CO LTD
drying device
ActiveCN107065433BReduce generationImprove evaporation yieldOriginals for photomechanical treatmentThermodynamicsMechanical engineering
The invention relates to a drying device used for drying a mask. The drying device comprises a drying chamber and is characterized in that air blades are arranged at the port of the drying chamber, and air outlets used for discharging air flow generated by the air blades are arranged at positons, close to the bottom of the drying chamber, of the lateral walls of the drying chamber. The drying device has the advantages that the generation of rebounded air flow is reduced by the air outlets, so that the influence of dust raised by the rebounded air flow on the mask is reduced, and product evaporation yield is increased.
Owner:BOE TECH GRP CO LTD +1
Mask, mask assembly and mask manufacturing method
ActiveCN108642441BSolve the problem of prone to color mixingImprove evaporation yieldVacuum evaporation coatingSolid-state devicesEngineeringColor mixing
The invention relates to a mask plate, a mask assembly and a method for making the mask plate. The mask plate includes a mask substrate and a shielding layer. An evaporation area is arranged on the mask substrate. The evaporation area includes an effective evaporation area and an effective evaporation area. The invalid evaporation area, the effective evaporation area corresponds to the display area of the display panel, the invalid evaporation area corresponds to at least the slotted area of the display panel, and multiple evaporation openings are distributed in the effective evaporation area and the invalid evaporation area The shielding layer is arranged on the surface of the mask substrate and shields the evaporation opening in the invalid evaporation area. The above-mentioned mask plate is used for the evaporation display panel. For the mask substrate, not only the effective evaporation area corresponds to the display area of the special-shaped screen, but also the gap outside the effective evaporation is filled by the invalid evaporation area. The edge of the evaporation area is evenly stressed, which can prevent the mask substrate from wrinkling when stretching the net, thereby preventing color mixing of the final formed display panel and improving product yield.
Owner:KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
Mask device
ActiveCN110117768BReduce wrinklesReduce saggingSolid-state devicesVacuum evaporation coatingEngineeringMechanical engineering
The present application relates to the field of display technology, in particular, to a mask device, which includes a frame structure, at least one mask plate and at least one shrink sheet, the mask plate is connected to the frame structure; the shrink sheet is connected to The mask plate is connected to the frame structure, and / or the shrink sheet is adjacent to the mask plate; wherein, the shrink sheet can apply a pulling force to the mask plate during the shrinking process, thereby reducing The amount of wrinkles and sags of the mask plate to improve the evaporation yield.
Owner:BOE TECH GRP CO LTD +1
Mask carrying device and method
ActiveCN110164808AEnough flatnessEfficient picking and handlingVacuum evaporation coatingSemiconductor/solid-state device manufacturingEngineeringMagnetic field
The invention relates to the technical field of mask production and discloses a mask carrying device and method. The device includes a contact plate, a magnetic portion and a support column, wherein the contact plate is arranged opposite to the magnetic portion, the contact plate includes a bonding surface for bonding a mask, and the support column is connected with the contact plate and the magnetic portion such that the bonding surface is located within a magnetic field formed by the magnetic portion. The device is advantaged in that enough flatness of the mask can be guaranteed.
Owner:YUNGU GUAN TECH CO LTD
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