3results about How to "Improve evaporation yield" patented technology

The embodiment of the invention provides a strong microcavity anode structure of a silicon-based organic light emitting diode and a preparation method. The preparation method comprises the following steps of: plating a first transparent insulating oxide layer on a CMOS (Complementary Metal-Oxide-Semiconductor Transistor) substrate; processing the first transparent insulating oxide layer to obtain sub-pixel grooves respectively corresponding to the RGB sub-pixels; an anode metal layer is deposited in the sub-pixel groove to serve as a metal anode; depositing a second transparent insulating oxide layer on the metal anode; etching the second transparent insulating oxide layer to the same horizontal height as the metal anode; depositing a layer of transparent metal oxide conductive film on the etched second transparent insulating oxide layer, and forming an anode metal pattern of RGB (Red, Green, Blue) sub-pixels; depositing a PDL layer on the CMOS substrate on which the anode metal pattern of the RGB sub-pixels is formed; and etching the PDL layer to form a pixel opening, an undercut structure and a pixel light-emitting protection structure corresponding to each sub-pixel in the RGB sub-pixels.

The invention discloses a metal mask plate decontamination system and method, the metal mask plate decontamination system comprises a decontamination device and a conveying device, the decontamination device comprises a heating module and an ultrasonic cleaning module, the decontamination device is at least provided with a first temperature area and a second temperature area, and the first temperature area and the second temperature area are sequentially arranged on a conveying path of the conveying device; the conveying device is used for conveying the metal mask plate to the first temperature area to be heated to the drying temperature and conveying the metal mask plate to the second temperature area to be controlled to the decontamination temperature, and the drying temperature is higher than the decontamination temperature; the heating module is arranged in the decontamination device and used for heating the first temperature area to the drying temperature and heating the second temperature area to the decontamination temperature; and the ultrasonic cleaning module is arranged in the decontamination device, is positioned in the second temperature area, and is used for emitting ultrasonic waves to vibrate and remove particles attached to the metal mask plate and sucking away the vibrated and removed particles through negative pressure. According to the invention, the yield of the FMM at the client can be improved.

The application provides a mask manufacturing method and a mask manufactured by the method. The mask manufacturing method comprises the following steps: screen printing a stainless steel sheet as a mask; synchronously cutting the stainless steel sheet by using upper and lower laser heads to form a required mask via hole pattern; welding the cut stainless steel sheet to a mask plate frame, removing the excess part and cleaning to obtain a final mask plate. The mask manufacturing method provided by the application can improve the manufacturing yield and efficiency of the mask plate by using the double laser head cutting method without burr and other defects. The mask provided by the application is manufactured by the above method, and the generation of the mask plate via hole edge defects is avoided, so that the quality of the mask plate and the quality of OLED evaporation can be improved.