The invention discloses a
metal mask plate decontamination
system and method, the
metal mask plate decontamination
system comprises a decontamination device and a conveying device, the decontamination device comprises a heating module and an ultrasonic cleaning module, the decontamination device is at least provided with a first temperature area and a second temperature area, and the first temperature area and the second temperature area are sequentially arranged on a conveying path of the conveying device; the conveying device is used for conveying the
metal mask plate to the first temperature area to be heated to the
drying temperature and conveying the metal mask plate to the second temperature area to be controlled to the decontamination temperature, and the
drying temperature is higher than the decontamination temperature; the heating module is arranged in the decontamination device and used for heating the first temperature area to the
drying temperature and heating the second temperature area to the decontamination temperature; and the ultrasonic cleaning module is arranged in the decontamination device, is positioned in the second temperature area, and is used for emitting ultrasonic
waves to vibrate and remove particles attached to the metal mask plate and sucking away the vibrated and removed particles through negative pressure. According to the invention, the yield of the FMM at the
client can be improved.