Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Two-channel sonic surface wave gas sensors having humidity compensate function

A gas sensor, humidity compensation technology, used in the analysis of fluids using sonic/ultrasonic/infrasonic waves, material analysis using sonic/ultrasonic/infrasonic waves, instruments, etc. The same problem, to achieve good environmental stability, reduce the gap, increase the effect of humidity compensation function

Inactive Publication Date: 2011-02-09
UNIV OF ELECTRONICS SCI & TECH OF CHINA
View PDF0 Cites 2 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But it is obvious that since the sensitive film is coated on the measurement channel but not on the reference channel, the humidity sensitivity characteristics of the two channels are different, and the conventional dual-channel structure does not have the function of humidity compensation

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Two-channel sonic surface wave gas sensors having humidity compensate function
  • Two-channel sonic surface wave gas sensors having humidity compensate function
  • Two-channel sonic surface wave gas sensors having humidity compensate function

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0020] The present invention will be further described below in conjunction with the accompanying drawings.

[0021] Such as figure 2 As shown, the surface acoustic wave gas sensor includes: a piezoelectric substrate 1 , interdigital electrodes 2 , a sensitive film 3 , and a humidity compensation film 4 . There are two groups of electrodes 2, which respectively constitute two transmission channels of the surface acoustic wave, and the electrodes 2 are prepared on the surface of the piezoelectric substrate 1 by photolithography technology. A sensitive thin film is coated on one of the surface acoustic wave channels to form a measurement channel, while a humidity compensation film is coated on the other channel to form a reference channel.

[0022] The preparation method of the dual-channel surface acoustic wave gas sensor with humidity compensation function provided by the present invention is as follows (example):

[0023] The piezoelectric substrate 1 chooses ST-quartz; a ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
thicknessaaaaaaaaaa
Login to View More

Abstract

The invention comprises a piezoelectric baseboard and two pairs of interdigital electrodes; said interdigital electrodes are located on the piezoelectric baseboard to construct both parallel acoustic surface wave measuring channel and reference channel. It features the following: coating a sensitive film on the measuring channel; coating a temperature compensation film on the reference channel.

Description

technical field [0001] The invention relates to the technical field of gas sensors, in particular to a dual-channel surface acoustic wave gas sensor with a humidity compensation function. Background technique [0002] The surface acoustic wave gas sensor is made by attaching a chemically sensitive film on the acoustic channel of the surface acoustic wave device. It has high sensitivity and small detection limit, and is especially suitable for the detection of low-concentration trace atmosphere. However, the surface acoustic wave device itself is very sensitive to changes in external factors, such as temperature, humidity, pressure, etc. In order to eliminate the influence of these factors on gas measurement, a dual-channel structure is usually used to compensate. Conventional dual-channel structures such as figure 1 As shown, it prepares two identical interdigitated electrodes along the same direction on the same piezoelectric substrate, thereby forming two SAW channels. A...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G01N29/02G01N29/32
Inventor 杜晓松蒋亚东胡佳谢光忠刘忠祥
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com