Two-channel sonic surface wave gas sensors having humidity compensate function

A gas sensor, humidity compensation technology, used in the analysis of fluids using sonic/ultrasonic/infrasonic waves, material analysis using sonic/ultrasonic/infrasonic waves, instruments, etc. The same problem, to achieve good environmental stability, reduce the gap, increase the effect of humidity compensation function
CN101135670BInactive Publication Date: 2011-02-09UNIV OF ELECTRONICS SCI & TECH OF CHINA
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
UNIV OF ELECTRONICS SCI & TECH OF CHINA
Publication Date
2011-02-09
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention comprises a piezoelectric baseboard and two pairs of interdigital electrodes; said interdigital electrodes are located on the piezoelectric baseboard to construct both parallel acoustic surface wave measuring channel and reference channel. It features the following: coating a sensitive film on the measuring channel; coating a temperature compensation film on the reference channel.
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Description

technical field

[0001] The invention relates to the technical field of gas sensors, in particular to a dual-channel surface acoustic wave gas sensor with a humidity compensation function. Background technique

[0002] The surface acoustic wave gas sensor is made by attaching a chemically sensitive film on the acoustic channel of the surface acoustic wave device. It has high sensitivity and small detection limit, and is especially suitable for the detection of low-concentration trace atmosphere. However, the surface acoustic wave device itself is very sensitive to changes in external factors, such as temperature, humidity, pressure, etc. In order to eliminate the influence of these factors on gas measurement, a dual-channel structure is usually used to compensate. Conventional dual-channel structures such as figure 1 As shown, it prepares two identical interdigitated electrodes along the same direction on the same piezoelectric substrate, thereby forming two SAW channels. A...

Claims

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