Method for dynamically measuring interference signal analysis

Abstract

A method of resolving interference signals of dynamic measurement is provided, and is suitable for measuring dynamic characteristics of unit to be measured. The method includes the following steps: capturing the dynamic interference signals when the unit to be measured vibrates; and carrying out deconvolution operation on the dynamic interference signals so as to acquire the reduced dynamic interference signals.

Description

technical field [0001] The present invention relates to a method for analyzing interference signals, and in particular to a method for analyzing dynamic measurement interference signals. Background technique [0002] The traditional optical interference surface topography micrometer is mainly used to measure the size of the three-axis undulation of the microstructure surface. Measurement, measurement of laser marking depth, measurement of the size and coplanarity of gold ball bumps in the flip-chip process, measurement of the size and height of the spacer on the new color filter in the liquid crystal flat panel display, Measurement of fiber end faces and surface topography of micro-optical components, etc. In recent years, some people have added the function of dynamic measurement, and expanded the application field of this type of measuring instrument to cover the observation and measurement of dynamic behavior of functional components and thin films in the micro-mechanica...

AI Technical Summary

Problems solved by technology

Please refer to Figure 4B , Figure 4A and image 3 , since the vibration period T is not much longer than the pulse time δT of the stroboscopic pulse beam 312, the interference contrast of the dynamic interference signal will be reduced and the image will be blurred (reduced noise ratio)

This will make it difficult to calculate the precise position of the maximum interference intensity contrast of the dynamic interference signal, and thus cannot accurately reconstruct the three-dimensional profile of the object to be measured 50

[0017] Although reducing the pulse time δT of the stroboscopic pulse beam 312 can improve the interference contrast of the dynamic interference signal, however, because the stroboscopic pulse beam 312 is not a mathematically ideal Delta function, the pulse time δT still has a physical limit

As a result, the known method of dynamically measuring the surface profile of the object under test cannot be effectively applied to the situation where the object under test vibrates at a high frequency

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