Film sensor calibration device and method
A thin-film sensor and calibration device technology, which is applied in the field of sensor calibration, can solve problems such as the inability to accurately obtain the dynamic characteristics of the thin-film sensor, the inability to accurately determine the load value of the thin-film sensor, etc., and achieve the effect of convenient control, accurate acquisition, and control of the heating range
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[0050] Example one
[0051] The present invention provides a calibration device for a thin film sensor 9, including a shock tube 1, an air supply device 5, a first pressure sensor 6, a second standard pressure sensor 7, and an oscilloscope 8. The shock wave generated by the shock tube 1 is used as an excitation source Using the contrast method to obtain the dynamic characteristic parameters of the thin film sensor 9, by using the first pressure sensor 6 as the trigger signal source of the oscilloscope 8 to accurately capture the electrical signal of the thin film sensor 9 and the rising edge signal of the second standard pressure sensor 7, so that The dynamic characteristic of the thin film sensor 9 can be accurately obtained, and the dynamic characteristic calibration of the thin film sensor 9 including a single measuring point and multiple measuring point arrays can be realized.
[0052] See Figure 1 to 3 The shock tube 1 includes a connected high-pressure tube body 2 and a low...
Example Embodiment
[0054] Example two
[0055] The present invention provides a method for calibrating a thin film sensor 9. Based on the above-mentioned calibration device for a thin film sensor 9, the method specifically includes the following steps:
[0056] Step1: Turn on the air supply device 5 to inflate the high-pressure pipe body 2 until the diaphragm 4 ruptures to generate shock waves;
[0057] Specifically, before this step, the diaphragm 4 should be installed and clamped between the high-pressure tube body 2 and the low-pressure tube body 3 of the shock tube 1, and the thin film sensor to be calibrated 9, the second standard pressure sensor 7, and the temperature sensor 14 should be flattened. Install the first pressure sensor 6 on the inner wall of the low-pressure pipe body 3 1m away from the front of the test end; paste the semiconductor refrigeration chip 10 on the outer end face opposite to the test end face with silicone grease, and use the fan The silicone grease is pasted on the sem...
Example Embodiment
[0065] Example three
[0066] The present invention provides a method for calibrating a thin film sensor 9. The above-mentioned thin film sensor calibration device includes the following steps:
[0067] Step1: Turn on the air supply device 5 to inflate the high-pressure pipe body 2 until the diaphragm 4 ruptures to generate shock waves;
[0068] Specifically, before this step, the diaphragm 4 should be installed and clamped between the high-pressure tube body 2 and the low-pressure tube body 3 of the shock tube 1, and the thin film sensor to be calibrated 9, the second standard pressure sensor 7, and the temperature sensor 14 should be flattened. Install the first pressure sensor 6 on the inner wall of the low-pressure pipe body 3 1m away from the front of the test end; paste the semiconductor refrigeration chip 10 on the outer end face opposite to the test end face with silicone grease, and use the fan The silicone grease is pasted on the semiconductor refrigeration chip 10; the le...
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