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A thin film sensor calibration device and method

A thin film sensor and calibration device technology, applied in the field of sensor calibration, can solve the problems of inability to accurately obtain the dynamic characteristics of the thin film sensor, inability to accurately determine the load value of the thin film sensor, etc., and achieve the effects of convenient control, accurate acquisition and control of the heating range.

Active Publication Date: 2021-12-28
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In the prior art, the load value loaded on the surface of the thin film sensor cannot be accurately determined, that is, the dynamic characteristics of the thin film sensor cannot be accurately obtained

Method used

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  • A thin film sensor calibration device and method
  • A thin film sensor calibration device and method
  • A thin film sensor calibration device and method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0051] The present invention provides a calibration device for a thin film sensor 9, comprising a shock tube 1, an air supply device 5, a first pressure sensor 6, a second standard pressure sensor 7, and an oscilloscope 8, using the shock wave generated by the shock tube 1 as an excitation source , using the comparison method to obtain the dynamic characteristic parameters of the thin film sensor 9, by using the first pressure sensor 6 as the trigger signal source of the oscilloscope 8 to accurately capture the electrical signal of the thin film sensor 9 and the rising edge signal of the second standard pressure sensor 7, so that The dynamic characteristics of the thin film sensor 9 can be accurately obtained, and the calibration of the dynamic characteristics of the thin film sensor 9 including a single measuring point and a multi-measuring point array can be realized.

[0052] see Figures 1 to 3, the shock tube 1 includes a connected high-pressure pipe body 2 and a low-pres...

Embodiment 2

[0055] The present invention provides a thin film sensor 9 calibration method, based on the above thin film sensor 9 calibration device, specifically comprising the following steps:

[0056] Step1: Turn on the air supply device 5 to inflate the high-pressure pipe body 2 until the diaphragm 4 ruptures to generate a shock wave;

[0057] Specifically, before this step, the diaphragm 4 should be installed between the shock tube 1, the high-pressure pipe body 2 and the low-pressure pipe body 3, and the thin film sensor 9 to be calibrated, the second standard pressure sensor 7, and the temperature sensor 14 should be flattened. Install it on the test end face, install the first pressure sensor 6 on the inner wall of the low-pressure pipe body 3 at a distance of 1m in front of the test end face; paste the semiconductor refrigeration chip 10 on the outer end face opposite to the test end face with silicone grease, and install the fan with Silicone grease is pasted on the semiconductor...

Embodiment 3

[0066] The present invention provides a method for calibrating a thin film sensor 9, and the above-mentioned thin film sensor calibrating device comprises the following steps:

[0067] Step1: Open the air supply device 5 to inflate the high-pressure pipe body 2 until the diaphragm 4 ruptures to generate a shock wave;

[0068] Specifically, before this step, the diaphragm 4 should be installed between the shock tube 1, the high-pressure pipe body 2 and the low-pressure pipe body 3, and the thin film sensor 9 to be calibrated, the second standard pressure sensor 7, and the temperature sensor 14 should be flattened. Install it on the test end face, install the first pressure sensor 6 on the inner wall of the low-pressure pipe body 3 at a distance of 1m in front of the test end face; paste the semiconductor refrigeration chip 10 on the outer end face opposite to the test end face with silicone grease, and install the fan with Silicone grease is pasted on the semiconductor refriger...

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Abstract

The invention discloses a thin-film sensor calibration device and method, comprising: a shock tube, the shock tube includes a high-pressure pipe body and a low-pressure pipe body, and a diaphragm is arranged between the high-pressure pipe body and the low-pressure pipe body; gas supply equipment, It is used to inflate the high-pressure pipe body; the first pressure sensor is set on the inner wall of the low-pressure pipe body; the second standard pressure sensor is set on the test end face, which is the inner end face of the low-pressure pipe body away from the high-pressure pipe body; the oscilloscope, Both the first pressure sensor and the second standard pressure sensor are electrically connected to the oscilloscope; wherein, the diaphragm is ruptured to generate a shock wave by inflating the high-pressure pipe body, the thin film sensor is arranged on the test end face, and the first pressure sensor is the trigger signal source of the oscilloscope. The oscilloscope collects the electrical signals of the second standard pressure sensor and the thin film sensor. The calibration device combined with the calibration method can accurately obtain the dynamic characteristics of the thin film sensor.

Description

technical field [0001] The invention belongs to the technical field of sensor calibration, in particular to a thin film sensor calibration device and method. Background technique [0002] With the rapid development of sensor technology and the application of various new materials, a large number of new sensors have begun to emerge and gradually replace some old sensors with their excellent performance, including thin film sensors, which can sense pressure changes and output electrical currents. Signal. Thin film sensors have the advantages of light weight, soft and not brittle, impact resistance, not easily polluted by water and chemicals, and easy to be made into sheets or tubes of arbitrary shapes and sizes. The calibration of the sensor is to establish the relationship between the input and output of the sensor through experiments, and also to determine the error relationship under different conditions of use. [0003] At present, there is no uniform and effective metho...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L27/00
CPCG01L27/005
Inventor 从继庆荆建平陈昌敏代泽增
Owner SHANGHAI JIAO TONG UNIV
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