Diagnostic mechanism in differential pressure type mass flow controller
What is AI technical title?
AI technical title is built by Patsnap AI team. It summarizes the technical point description of the patent document.
A technology of mass flow and flow control devices, which is applied in flow control, direct mass flow meters, indirect mass flow meters, etc., and can solve problems such as slowing down of initial pressure
Active Publication Date: 2013-04-10
HORIBA STEC CO LTD
View PDF1 Cites 0 Cited by
Summary
Abstract
Description
Claims
Application Information
AI Technical Summary
This helps you quickly interpret patents by identifying the three key elements:
Problems solved by technology
Method used
Benefits of technology
Problems solved by technology
However, once the throttling nozzle is clogged, the drop rate of the initial pressure becomes slower from the start of the self-diagnosis time (time point t=0) as indicated by the imaginary line
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more
Image
Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
Click on the blue label to locate the original text in one second.
Reading with bidirectional positioning of images and text.
Smart Image
Examples
Experimental program
Comparison scheme
Effect test
no. 1 Embodiment
[0098]
[0099] The differential pressure mass flow controller A of the flow control device of this embodiment is called the above-mentioned G-LIFE diagnostic type, and has:
[0101] The control device A2 is connected to the mass flow controller body A1 in a communicable manner, and has functions such as a diagnosis mechanism for performing diagnosis in the mass flow controller body A1;
[0102] A gas supplysystem that supplies gas to a chamber in a film forming apparatus such as a semiconductor, for example, is used. Each part will be specifically described below.
[0103] Such as figure 1 As shown in the schematic diagram, mass flow controller body A1 has:
[0104] Gas flow path 1, used for gas flow;
[0105] The flow control valve 2Va is arranged on the flow path of the gas flow path 1;
[0107] The inlet side sensor 4 is set to communicate with the flow path 1 on ...
no. 2 Embodiment
[0157]
[0158] Refer to the following Figure 6 ~ Figure 10 Another embodiment of the present invention will be described.
[0159] Also, in the second embodiment, the components having the same names and the same symbols as those in the first embodiment are considered to have the same configuration as those in the first embodiment and can exert the same effect unless otherwise specified. And its description is omitted appropriately.
[0160] The differential pressure mass flow controller A of this embodiment is generally called ROR (Rate of rise) diagnostic type, and has:
[0162] The control device A2 is connected to the mass flow controller body A1 in a communicable manner, and has functions such as a diagnostic mechanism for performing diagnosis in the mass flow controller body A1;
[0163] Similar to the first embodiment, it is similarly used in a gas supplysystem for supplying gas to a chamber in a semiconductor process, ...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More
PUM
Login to View More
Abstract
This invention provides a diagnostic mechanism of a differential pressure type mass flow controller comprising a diagnostic parameter calculating section that obtains a mass flow rate integrated value by means of an integrating calculation from the lowering pressure value of an inlet side sensor among the inlet side sensor and an outlet side sensor arranged in communication respectively at the inlet side and the outlet side of a differential pressure generating resistive element that generates a differential pressure between the inlet and the outlet by changing a flow rate control valve arranged on the channel where a fluid flows from a flow rate control state to a closed state, and further obtains a diagnostic volume value from the obtained mass flow rate integrated value, and a comparing section that compares the diagnostic volume value obtained at the diagnostic parameter calculating section with a specified volume value.
Description
technical field [0001] The present invention relates to a flow rate control device and the like for controlling the flow rate of fluids such as gas and liquid in semiconductor manufacturing steps and the like. Background technique [0002] In the prior art, there is known a nozzle diagnosis mechanism, which can diagnose whether the flow path throttling nozzle and the pipelines below the nozzle are abnormal through the flow control device represented by the pressure flow controller. [0003] The composition of this nozzle diagnosis mechanism includes a control unit, which makes the gas pressure value in the internal flow path change correspondingly with the time during the self-diagnosis time when the flow adjustment valve is closed and the flow adjustment valve is opened. The opening and closing action of the valve is linked and read in, so as to realize the diagnosis of the internal flow path throttling nozzle. [0004] In addition, when there is no abnormality in the gas ...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More
Application Information
Patent Timeline
Application Date:The date an application was filed.
Publication Date:The date a patent or application was officially published.
First Publication Date:The earliest publication date of a patent with the same application number.
Issue Date:Publication date of the patent grant document.
PCT Entry Date:The Entry date of PCT National Phase.
Estimated Expiry Date:The statutory expiry date of a patent right according to the Patent Law, and it is the longest term of protection that the patent right can achieve without the termination of the patent right due to other reasons(Term extension factor has been taken into account ).
Invalid Date:Actual expiry date is based on effective date or publication date of legal transaction data of invalid patent.
Login to View More 
Login to View More