Magnetic shielding material, magnetic shielding component, and magnetic shielding room

Abstract

Disclosed are: a magnetic shielding material having excellent magnetic shielding property at a low magnetic field; and a magnetic shielding component and a magnetic shielding room each using the magnetic shielding material. Specifically disclosed is a magnetic shielding material comprising the following components (by mass): Ni: 70.0-85.0%, Cu: 0.6% or less, Mo: 10.0% or less and Mn: 2.0% or less, with the remainder being substantially Fe. The magnetic shielding material has a relative magnetic permeability of 40,000 or more under a magnetic field of 0.05 A / m and a squareness ratio (Br / B 0.8 ) of 0.85 or less, wherein the squareness ratio (Br / B 0.8 ) is a ratio of a remanent magnetic flux density (Br) to a maximum magnetic flux density (B 0.8 ) in a DC hysteresis curve produced under the maximum magnetic field of 0.8 A / m.

Description

technical field [0001] The present invention relates to building materials for magnetic shielding rooms of semiconductor manufacturing devices and precision medical equipment, magnetic shielding materials used for magnetic shielding in low magnetic field areas, magnetic shielding components and magnetic shielding rooms. Background technique [0002] Traditionally, in magnetic shielding materials, Ni-Fe alloys with high magnetic permeability represented by JIS PC permalloy, and soft magnetic materials in which Mo and Cu are added to further increase the magnetic permeability have been used. . [0003] In addition, for the purpose of higher magnetic permeability, a soft magnetic livelihood material with high magnetic permeability has also been proposed, which not only adjusts the main components of the material, but also adjusts the amount of impurities such as B and N within a specified range. The atmosphere and cooling rate during the final heat treatment are controlled wit...

AI Technical Summary

Problems solved by technology

[0006] Therefore, it can be seen that if this kind of soft magnetic material is used for the purpose of magnetic shielding in an extremely low magnetic field environment such as earth magnetism, its shielding effect will be low.

Therefore, it can be seen that there is still a big problem in the practical use of soft magnetic materials in applications that require magnetic shielding properties in low magnetic field regions, such as semiconductor devices and shielded room building materials for precision medical equipment.

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