Vacuum ultraviolet hemisphere reflectivity testing device

Abstract

A vacuum ultraviolet hemisphere reflectivity testing device belongs to the field of vacuum ultraviolet spectrum transmission testing and comprises a deuterium lamp light source, a toroid mirror, a Seya-Namioka monochrometer, an alignment reflector, a photochopper, a fluorescent integrating sphere coated with a fluorescent conversion film on the inner wall, a sample, a diffuse transmission light filter, a detector, an accurate rotary table, a wavelength driving mechanism, a data collection system, a computer and a vacuum tank. All optical elements of the testing device are of reflection structures, a light division system adopts the Seya-Namioka monochrometer, a IV type phase difference elimination concave face grating with large numerical is adopted at a light division element of the monochrometer, and efficient transmission of vacuum ultraviolet spectrum energy is guaranteed. A receiving system of the detector adopts the scheme of the fluorescent integrating sphere, thereby avoiding excess energy loss after vacuum ultraviolet beams are reflected mangy times on the inner wall of the integrating sphere. By means of two working models (sample / reference), absolute measurement of the vacuum ultraviolet hemisphere reflectivity is achieved.

Description

Technical field [0001] The invention belongs to the field of vacuum ultraviolet spectrum transmission testing, and relates to a vacuum ultraviolet hemispherical reflectivity test device. Background technique [0002] Vacuum ultraviolet spectroscopy measurement technology has become a hot spot in international research in recent years, and the hemispherical reflectance test of diffuse reflection optical elements is of great significance to improve the research of vacuum ultraviolet spectroscopy technology. In the visible and infrared bands, the hemispherical reflectance measurement has been mature, and the measurement method combining monochromator and integrating sphere is mainly used. However, in the vacuum ultraviolet band, the spectral transmission efficiency is low, and the commonly used inner wall materials of the integrating sphere cannot be used. At present, there is still no solution for measuring the hemispherical reflectance of diffuse reflection samples in the vacuum ...

AI Technical Summary

Problems solved by technology

[0003] In order to solve the technical problem that the vacuum ultraviolet hemispherical reflectance cannot be accurately measured, the present invention provides a vacuum ultraviolet hemispherical reflectance test device, the monochromator adopts the Seya-Namioka structure, and the signal receiving system adopts the structure combining the fluorescent integrating sphere and the detector

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