Miniature spectrometer with adjustable resolution ratio
A micro-spectrometer and resolution technology, which is applied in the field of micro-spectrometers, can solve the problems of the test spectral range and resolution limitation of a single micro-spectrometer, the limited rotation angle of MEMS, and the small size, and achieves compact structure, continuous translation, and low manufacturing cost. Effect
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[0022] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
[0023] The invention utilizes the filtering characteristics of the double-cavity etalon, and uses a motor to drive the rotation of the cylinder turntable to drive wedge pairs with different wedge angles into the incident light path, and continuously scans the incident spectrum in segments, thereby improving the resolution of the spectrometer.
[0024] see figure 1 , this embodiment includes an incident optical path part, a reflected optical path part and a micro-drive unit, and the incident optical path part is provided with an input unit in turn, and the input unit is an optical fiber head 1 and a collimating unit, and the collimating unit is a collimating lens 2 and a transmission grating 8, the reflected light path part is provided with a light converging unit in turn, and the light converging unit is a cylindrical lens 10, a light bar 11 an...
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