System for processing equipment processing capacity data and method thereof

Abstract

The invention discloses a system for processing equipment processing capacity data and a method of the system, and belongs to the technical field of semiconductors. The method comprises the steps that the equipment processing capacity data are collected through a data collecting device; a data storage device stores the equipment processing capacity data collected by the data collecting device; a processing capacity analyzing device reads the collected equipment processing capacity data from the data storage device, and carries out indicative statistical analysis on the current processing capacity of equipment accordingly to obtain a processing capacity indicator. Through the technical scheme, integrated unified management on the data is achieved, administrative staff can collect the equipment processing capacity data conveniently, and the statistical analysis on the calculated essential data of the processing capacity of the equipment is further achieved.

Description

technical field [0001] The invention belongs to the technical field of semiconductors, and in particular relates to a processing system and method for equipment processing capability data. Background technique [0002] In the manufacturing process of semiconductor wafers, it is necessary to evaluate and analyze the processing capabilities of manufacturing equipment to ensure the normal operation of the manufacturing process. Thus, it can be seen that the calculation of the capability of equipment to achieve effective management is very important in the process of manufacturing and managing semiconductor wafers. [0003] At present, in order to realize the calculation of equipment processing capacity, the technical solution usually adopted is that each system processes data independently, and the data is transmitted through manual import or file transmission. [0004] However, due to the lack of system hardware and software environment and the lack of system integration inte...

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Problems solved by technology

[0004] However, due to the lack of system hardware and software environment and the lack of system integration interface, the calculation of equipment processing capacity lacks system support

In addition, because the data of equipment processing capacity is not processed only scatteredly, and the integrated and unified management of these data has not been realized, managers cannot collect data on equipment processing capacity, and further fail to realize statistical analysis of basic data for calculation of equipment processing capacity

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