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An ultra-clean vacuum sealing method for an optical lens

An optical lens and vacuum sealing technology, applied in the field of pollutant control, can solve the problems of vacuum pollution and high cost, and achieve the effect of simple and easy replacement, overcoming the problem of high cost and solving the problem of vacuum pollution.

Active Publication Date: 2016-02-03
SOUTHEAST UNIV
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Problems solved by technology

[0003] Purpose of the invention: In order to overcome the deficiencies in the prior art, the present invention provides an ultra-clean vacuum sealing method for optical lenses, which solves the problem of vacuum pollution caused by traditional rubber ring seals, and at the same time overcomes the high cost of metal flange seals, and at the same time Lens replacement is simple and easy to operate

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  • An ultra-clean vacuum sealing method for an optical lens
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  • An ultra-clean vacuum sealing method for an optical lens

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Embodiment Construction

[0023] The present invention will be further described below in conjunction with the accompanying drawings.

[0024] as attached figure 1 or attached figure 2 As shown, an ultra-clean vacuum sealing method for an optical lens, the installation device 2 and the optical lens 1 are sealed and fixed by a soft metal sealing ring 3 to control the pollution of organic pollutants caused by the rubber sealing ring. The soft metal sealing ring 3 is made of aluminum, tin, lead, indium, gold, silver or their alloy materials. The cross section of the soft metal sealing ring 3 is circular or rectangular or circular or crescent-shaped, the shape of the soft metal sealing ring 3 and the sealing groove 4 is circular or square, and the soft metal sealing ring 3 The circumference corresponds to the circumference of the sealing groove 4. The cross-section of the soft metal sealing ring 3 can be circular or square or circular or crescent-shaped, and a sealing ring with a circular cross-section...

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Abstract

The invention discloses an ultra-clean vacuum sealing method for an optical lens. An installation device and the optical lens are sealed and fixed through a flexible metal sealing ring. The ultra-clean vacuum sealing method for the optical lens can solve the vacuum pollution problem caused by sealing through a traditional sealing ring and the problem of high cost of sealing through a metal flange, and replacement of the lens is simple and easy.

Description

technical field [0001] The invention relates to a technology for controlling pollutants caused by optical lens sealing in a system requiring vacuum cleanliness, in particular to an ultra-clean vacuum sealing method for optical lenses. Background technique [0002] In high-power laser pump light sources and applied optical systems, extreme ultraviolet light source optical systems, and ultra-clean analytical instruments, a large number of optical lenses are used, and some lenses also need to undertake the role of isolation between spaces with different pressure differences. Generally, the methods used are: Two types: one is the vacuum sealing scheme using rubber rings; the other is sealing the lens on the CF stainless steel flange through the glass-to-metal sealing scheme, through the knife edge on the stainless steel flange and the oxygen-free copper sealing ring Press and seal to realize space vacuum isolation. The first solution is simple and easy to operate, but because t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B7/02
Inventor 张晓兵肖梅康学军夏柱红祁争健陈振乾
Owner SOUTHEAST UNIV
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