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Method of Testing and Calibrating Temperature System of Micromachined Accelerometer

A technology of accelerometer and calibration method, which is applied in the test/calibration of speed/acceleration/shock measurement equipment, speed/acceleration/shock measurement, and measurement devices, etc., which can solve the problems of rising costs, and solve the problem of large temperature influence changes, The effect of simple and reliable operation and high fitting accuracy

Active Publication Date: 2016-10-05
HKUST TIANGONG INTELLIGENT EQUIP TECH (TIANJIN) CO LTD
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Problems solved by technology

Generally, for high-precision micromachined accelerometers (stability less than 1×10 -5 g), the method of temperature control can be used, but for the micro-mechanical accelerometer with medium and low precision, considering the cost and applicability, if the method of temperature control is adopted, the cost will rise sharply, so it is necessary to propose an improvement

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  • Method of Testing and Calibrating Temperature System of Micromachined Accelerometer

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Embodiment Construction

[0020] Attached below Figure 1-7 Embodiments of the present invention are described.

[0021] Taking a certain type of micro-mechanical accelerometer as an example, the specific indicators are as follows: working voltage: 15V±0.15V, DC, bidirectional power supply; working temperature: -45℃~75℃; measuring range: ±15g; bias value K 0 : -2.5×10 -1 g~2.5×10 -1 g; scale factor K 1 : 220mV / g±20mV / g.

[0022] 1. Working principle: as figure 1 As shown, the micromachined accelerometer closed-loop system is mainly composed of several parts such as the meter head assembly (including the microstructure of the sensitive mass), the detection amplifier circuit and the feedback circuit. When the acceleration input acts on the sensitive mass m to form an inertial force, the capacitor plate on the microstructure is displaced, resulting in a capacitance change ΔC, and the detection amplifier circuit converts the capacitance change ΔC into a voltage change ΔV, and the feedback circuit gene...

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Abstract

A method for testing and calibrating the temperature system of a micromachined accelerometer is provided. According to its working principle and technical characteristics, a mathematical model for temperature compensation is obtained through experiments and fitting calculations, and then the performance and performance of the micromachined accelerometer are improved in system applications. environmental adaptability. The operation of the invention is simple and reliable, and the fitting precision is high, which can indirectly and effectively solve the problem that the output of the micro-machine accelerometer is greatly changed due to the influence of temperature, and expand the engineering application range of the micro-machine accelerometer.

Description

technical field [0001] The invention belongs to the technical field of micro-inertial device testing and application, and specifically relates to a method for testing and calibrating the temperature system of a micro-mechanical accelerometer, which is mainly used in airborne navigation systems, weapon guidance, and temperature characteristic testing of various types of micro-mechanical accelerometers for civil use and calibration to improve the performance and environmental adaptability of micromachined accelerometers. Background technique [0002] At present, micro-machined accelerometers based on silicon materials at home and abroad generally have the problem that the output changes greatly due to temperature. There are two ways to solve this problem: one is the temperature control of the working environment, and the other is the temperature compensation in the application system. Generally, for high-precision micromachined accelerometers (stability less than 1×10 -5 g) ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P21/00
Inventor 刘敬涛张蔚刘小舟马让奎闫瑞刘欣
Owner HKUST TIANGONG INTELLIGENT EQUIP TECH (TIANJIN) CO LTD
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