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Testing and calibration method of micromechanical accelerator temperature system

A technology of accelerometer and calibration method, which is applied in the test/calibration of speed/acceleration/shock measurement equipment, speed/acceleration/shock measurement, and measurement devices, etc., which can solve the problems of rising costs, and solve the problem of large temperature influence changes, High fitting accuracy, simple and reliable operation

Active Publication Date: 2014-12-24
HKUST TIANGONG INTELLIGENT EQUIP TECH (TIANJIN) CO LTD
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Problems solved by technology

Generally, for high-precision micromachined accelerometers (stability less than 1×10 -5 g), the method of temperature control can be used, but for the micro-mechanical accelerometer with medium and low precision, considering the cost and applicability, if the method of temperature control is adopted, the cost will rise sharply, so it is necessary to propose an improvement

Method used

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  • Testing and calibration method of micromechanical accelerator temperature system
  • Testing and calibration method of micromechanical accelerator temperature system
  • Testing and calibration method of micromechanical accelerator temperature system

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Embodiment Construction

[0020] Attached below Figure 1-7 Embodiments of the present invention are described.

[0021] Taking a certain type of micro-mechanical accelerometer as an example, the specific indicators are as follows: working voltage: 15V±0.15V, DC, bidirectional power supply; working temperature: -45℃~75℃; measuring range: ±15g; bias value K 0 : -2.5×10 -1 g~2.5×10 -1 g; scale factor K 1 : 220mV / g±20mV / g.

[0022] 1. Working principle: as figure 1 As shown, the micromachined accelerometer closed-loop system is mainly composed of several parts such as the meter head assembly (including the microstructure of the sensitive mass), the detection amplifier circuit and the feedback circuit. When the acceleration input acts on the sensitive mass m to form an inertial force, the capacitor plate on the microstructure is displaced, resulting in a capacitance change ΔC, and the detection amplifier circuit converts the capacitance change ΔC into a voltage change ΔV, and the feedback circuit gene...

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Abstract

The invention provides a testing and calibration method of a micromechanical accelerator temperature system. According to an operating principle of the system and technical features of the system, a mathematical model for temperature compensation is obtained by testing and fitting calculation, and a micromechanical accelerator is higher in performance and environmental suitability during application. The testing and calibration method has the advantages that operations are simple and reliable, fitting precision is high, the problem that the output of the micromechanical accelerator has severe changes caused by temperature influence can be indirectly and effectively solved, and an engineering application range of the micromechanical accelerator is widened.

Description

technical field [0001] The invention belongs to the technical field of micro-inertial device testing and application, and specifically relates to a method for testing and calibrating the temperature system of a micro-mechanical accelerometer, which is mainly used in airborne navigation systems, weapon guidance, and temperature characteristic testing of various types of micro-mechanical accelerometers for civil use and calibration to improve the performance and environmental adaptability of micromachined accelerometers. Background technique [0002] At present, micro-machined accelerometers based on silicon materials at home and abroad generally have the problem that the output changes greatly due to temperature. There are two ways to solve this problem: one is the temperature control of the working environment, and the other is the temperature compensation in the application system. Generally, for high-precision micromachined accelerometers (stability less than 1×10 -5 g) ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P21/00
Inventor 刘敬涛张蔚刘小舟马让奎闫瑞刘欣
Owner HKUST TIANGONG INTELLIGENT EQUIP TECH (TIANJIN) CO LTD
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