A high-frequency response and large working distance self-collimation device and method

Abstract

The invention relates to a high-frequency-response long-working-distance auto-collimation device and method, and belongs to the fields of precise measurement technology and optical engineering. The device is composed of a light source, a collimating mirror, a reflector and a feedback imaging system. According to the method, the reflector is adjusted so that a reflection light beam returns to the center of an image plane of the feedback imaging system, and an angle deflection measuring device of the reflector is used to obtain angle change of the surface of a tested object. According to the invention, the reflector is added to a traditional auto-collimation angle measuring system, the problem that reflection light of the tested object is deviated the measuring system and further measurement cannot be carried out can be solved, and the auto-collimation work range is increased under the same work distance, or the working distance is increased under the same work range; concrete designs of the collimating mirror, the feedback imaging system, the reflector and the like enable the auto-collimating device to be small, portable and high in measuring precision; the measuring precision is high under low sampling frequency; and the measurement speed is very high.

Description

technical field [0001] The invention belongs to the field of precision measurement technology and the field of optical engineering, and in particular relates to a high-frequency response and large working distance self-collimation device and method. Background technique [0002] In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology at a large working distance. It supports the development of technology and equipment in the above fields. [0003] In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can measure surface angle and circular indexing; the maximum working distance From a few meters to hundreds ...

AI Technical Summary

Problems solved by technology

[0008] First, the range of the angle between the normal of the mirror surface of the measured object 5 and the optical axis of the laser autocollimator should not be too large, otherwise the reflected beam will deviate from the entrance pupil of the laser autocollimator optical system, resulting in failure to achieve self-collimation Straight and micro angle measurement;

[0009] Second, the distance between the mirror surface of the measured object 5 and the entrance pupil of the laser autocollimator should not be too far away, otherwise as long as the reflected optical axis deviates from the optical axis of the autocollimator by a small angle, the reflected beam will deviate from the optical system of the laser autocollimator The entrance pupil, which leads to the inability to achieve self-collimation and micro-angle measurement

[0010] The above two problems limit the use of traditional autocollimation instruments to small angles and small working distances.

Images