An on-chip optical power beam splitter design method
A technology of optical power beam splitter and design method, which is applied in the direction of instruments, optics, optical components, etc., can solve the problems of large size, poor process tolerance, narrow working bandwidth, etc. The effect of small device size
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[0027] The preferred embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0028] The present invention is based on the finite time domain difference algorithm of the electromagnetic field, and uses a random mechanism to form random scattering points in the multi-mode coupling region. Under the action of these scattering points, the phase of the light changes and interferes with each other, and finally the desired output is output in the output waveguide. On-chip optical power beam splitter with split ratio. Therefore, this method can realize the design of an on-chip optical power beam splitter with multiple outputs and arbitrary splitting ratios.
[0029] In this embodiment, a silicon structure design of an on-chip optical power beam splitter is carried out on an insulator with a thickness a of the top silicon layer of 220 nm and a thickness of silicon dioxide of 3 μm, which includes the following steps...
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