A shock wave excitation device for non-contact underwater excitation of mems microstructures

A non-contact, excitation device technology, applied in the direction of microstructure devices, microstructure technology, etc., can solve the problems of difficult dynamic characteristic parameters of MEMS microstructures, inability to apply MEMS microstructure excitation, etc., and achieve the effect of easy dynamic characteristic parameters

Inactive Publication Date: 2017-11-10
BOHAI UNIV
View PDF6 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the working principle of this device is to use the shock wave generated by the needle electrode and the plate electrode to discharge in the air to excite the microstructure, so it cannot be used to excite the MEMS microstructure in water. In addition, the device uses an elastic base The excitation method excites the MEMS microstructure, so when the dynamic characteristics of the MEMS microstructure are tested by the non-contact optical vibration measurement method, the vibration response signal obtained will inevitably include the vibration response of the elastic base structure , which will make it very difficult to obtain the dynamic characteristic parameters of the MEMS microstructure

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • A shock wave excitation device for non-contact underwater excitation of mems microstructures
  • A shock wave excitation device for non-contact underwater excitation of mems microstructures
  • A shock wave excitation device for non-contact underwater excitation of mems microstructures

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0024] Such as Figure 1-Figure 6 As shown, a kind of shock wave exciting device that the present invention relates to carries out non-contact underwater excitation to MEMS microstructure, comprises substrate 1, is positioned at both sides symmetrically on substrate 1 and is equipped with two electric sliding tables 4, and on two The water tank unit 13 and the support 2 are respectively fixed between the electric slide table 4, and the electric slide table 4 is driven by a stepping motor to move the screw nut mechanism so as to drive the slider to slide reciprocally along the guide columns arranged on both sides of the lead screw .

[0025] A manual biaxial translation platform 11 is respectively fixed on the slider of each electric sliding platform 4, and the manual biaxial translation platform 11 includes an X-axis direction translation platform and a Z-axis direction translation platform perpendicular to the guide columns of the electric sliding platform 4 respectively. . ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention discloses a shock wave excitation device for non-contact underwater excitation of MEMS microstructures. It includes a base plate, two electric slides are symmetrically arranged on the base plate, and a water tank unit and a water tank unit are arranged between the two electric slides. On the support, the needle electrode units are symmetrically installed on the electric slide table through the manual biaxial translation stage, and the needle electrode units are respectively suspended into the tank of the water tank unit; the microstructure unit is installed on the support, and the microstructure unit is suspended to the water tank In the box of the unit; the needle electrodes of the two needle electrode units are respectively electrically connected to the two poles of the high-voltage capacitor, and a first air switch is arranged between the high-voltage capacitor and one needle electrode; the two poles of the high-voltage capacitor are respectively electrically connected to the high-voltage power supply The positive and negative poles are controlled by the second air switch. The device can not only excite the MEMS microstructure in water, but also prevent the vibration response of the base structure from interfering with the test results, realize the non-contact excitation of the MEMS microstructure, and have a good excitation effect.

Description

technical field [0001] The invention belongs to the technical field of micromechanical electronic systems, and in particular relates to a shock wave excitation device for non-contact underwater excitation of MEMS microstructures. Background technique [0002] Due to the advantages of low cost, small size and light weight, MEMS microdevices have broad application prospects in many fields such as automobile, aerospace, information communication, biochemistry, medical treatment, automatic control and national defense. For many MEMS devices, the micro-displacement and micro-deformation of their internal microstructures are the basis for the realization of device functions. Therefore, accurate testing of dynamic characteristic parameters such as the amplitude, natural frequency, and damping ratio of these microstructures has become the key to developing MEMS products. important content. In addition, the dynamic characteristic test of MEMS microstructure needs to take into accoun...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Patents(China)
IPC IPC(8): B81C99/00
CPCB81C99/0035
Inventor 佘东生杨一柳于震李琨萨初荣贵
Owner BOHAI UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products