A Wavefront Detector Based on Joint Detection and Phase Fitting

Abstract

The invention provides a wavefront detector based on combined detection and phase fitting. The wavefront detector is composed of a Hartman wavefront sensor, a phase difference wavefront sensor, a wavefront recovery controller and a wavefront fitting device. The wavefront recovery controller combines the Hartman wavefront sensor and the phase difference wavefront sensor through the wavefront fitting device. Firstly the wavefront recovery controller controls the wavefront fitting device to perform iterative fitting of the measured wavefront of large dynamic range through the detection result of the Hartman wavefront sensor so as to obtain fitting residual error of small amount, then the wavefront recovery controller uses the phase difference wavefront sensor to accurately detect the fitting residual error and controls the wavefront fitting device to perform accurate fitting of the measured wavefront, and finally the wavefront recovery controller performs negation on the compensation surface of the wavefront fitting device so as to obtain the measured wavefront. The advantages of the wavefront detector are that wavefront detection of large dynamic range can be realized and the requirement of high accuracy detection can also be met so that the practicality is great.

Description

technical field [0001] The invention relates to the technical field of optical wavefront detection, in particular to a wavefront detector based on joint detection and phase fitting. Background technique [0002] With the improvement of the resolution of the optical imaging system, the traditional geometric aberration, optical transfer function and point spread function can no longer meet the requirements of the aberration description of the high-resolution optical imaging system. means of evaluation. At the same time, high-precision wavefront detection has important application value for ultra-precision adjustment of optical systems, beam quality diagnosis, and large-aperture optical processing. [0003] With the development of wavefront detection technology, various wavefront detectors emerge as the times require. It can be divided into two categories from the detection principle: one is based on the principle of geometric optics to measure wavefront geometric aberration ...

AI Technical Summary

Problems solved by technology

[0006] The technical problem to be solved by the present invention is to overcome the fact that the existing wavefront detection equipment cannot meet the dual needs of the user for large dynamic range detection and high precision detection of the measured wavefront error, and to provide a joint detection and phase fitting based Wavefront detector to achieve high-precision wavefront detection within a large dynamic range

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