Semiconductor device and method of making the same
A manufacturing method and semiconductor technology, applied in the fields of semiconductor devices, semiconductor/solid-state device manufacturing, semiconductor/solid-state device components, etc., can solve problems such as contact short-circuiting of storage nodes
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[0027] Please refer to figure 1 and figure 2 , figure 1 It is a schematic top view of a semiconductor element according to an embodiment of the present invention, figure 2 for along figure 1 The cross-sectional schematic diagram of the section line A-A', where figure 1 and figure 2 Only the memory area where the semiconductor element is provided with a capacitor is shown, but the present invention is not limited thereto. Such as figure 1 and figure 2 As shown, the semiconductor device 100 of this embodiment includes a substrate 102 , a plurality of word lines WL, a plurality of bit lines BL and a plurality of storage node contacts SC. The substrate 102 may include a plurality of active regions AR arranged parallel to each other, and each may be a strip structure extending along the third direction D3. Specifically, the semiconductor device 100 may include an element isolation layer 104 disposed in the substrate 102 and surrounding the active region AR to define the...
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