Lithium niobate optical waveguide polarizer and preparation method thereof

Abstract

The present invention discloses a lithium niobate optical waveguide polarizer and a preparation method thereof. The lithium niobate optical waveguide polarizer comprises a lithium niobate substrate, and the upper surface of the lithium niobate substrate is sunk to form a titanium diffusion waveguide area and an antiproton exchange area; the titanium diffusion waveguide area and the antiproton exchange area are correspondingly arranged and communicated to each other; the titanium diffusion waveguide area is configured to put titanium diffusion waveguides; the titanium diffusion waveguides are discontinuous bar-shaped titanium films; and the antiproton exchange area is configured to put antiproton exchange waveguides. The upper surface of the lithium niobate substrate is provided with the titanium diffusion waveguide area and the antiproton exchange area which are corresponding arranged and communicate to each other so as to solve the problem of mode field matching of annealing proton exchange, reduce the scattering of the surface of the optical waveguides and reduce the transmission loss of the optical waveguides.

Description

technical field [0001] The invention relates to the technical field of optical waveguide polarizers, in particular to a lithium niobate optical waveguide polarizer based on antiproton exchange technology and a manufacturing method. Background technique [0002] Optical waveguide polarizers have become the first choice for polarizer design because of their simple structure and ease of integration. An important application of this type of polarizer is fiber optic gyro, by integrating functional devices such as polarizers, modulators, and beam splitters into a LiNbO 3 On the substrate, it constitutes the core part of the fiber optic gyroscope. At present, the waveguide polarizers that have been reported include: metal-clad waveguide polarizers, waveguide polarizers using birefringent materials as core layers or cladding layers, and waveguide polarizers constructed using asymmetric multilayer films. Among them, the transmission loss of the metal clad waveguide polarizer is lar...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a lithium niobate optical waveguide polarizer and its preparation method to solve the mode field matching problem of annealed proton exchange, reduce the surface scattering of the optical waveguide, and reduce the transmission loss of the optical waveguide

Images