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A maintenance and detection method of a radio-frequency power supply

A detection method, a technology of radio frequency power supply, applied in the direction of instruments, digital data certification, etc., can solve the problems of inability to meet customer customization needs, inability to guarantee the quality standard of maintenance products, and poor product compatibility, so as to improve maintenance efficiency and reliability, The effect of reducing the scope of failure and facilitating management

Pending Publication Date: 2019-06-14
江苏神州半导体科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

With the continuous development of radio frequency power supply, the quality of radio frequency power supply directly affects the power supply performance of other equipment. Therefore, when the radio frequency power supply fails, it needs to be returned to the factory for repair, and the test is finally made to ensure whether the product is qualified. However, the current maintenance test is passed Workers directly detect the performance of the RF power supply, and cannot communicate with the corresponding products that need to be matched, which eventually leads to poor product compatibility, and cannot meet the customized needs of customers and cannot guarantee the quality standards of repaired product shipments. In the maintenance process, different maintenance methods need to be selected according to different models, resulting in low efficiency

Method used

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  • A maintenance and detection method of a radio-frequency power supply
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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0038] like figure 1 As shown, the maintenance detection method of a radio frequency power supply provided by this embodiment specifically includes the following steps:

[0039] 1) Check the appearance of the product in advance;

[0040] 2) Inspection and testing steps are required for each connection port before maintenance;

[0041] 3) According to the three modular decomposition operations of power module, amplification module and control module, and carry out the detection steps of component damage in each module;

[0042] 4) Automatically generate reports and contact customers according to the test results in step 3;

[0043] 5) Carry out maintenance according to customer requirements;

[0044] 6) Operation steps for dismantling and repairing products;

[0045] 7) Search spare parts suppliers according to the parts that need to be repaired;

[0046] 8) Obtain the parts that need to be repaired and carry out combined repairs;

[0047] 9) Test the three modules of the...

Embodiment 2

[0050] like figure 2 As shown, in the maintenance detection method of a radio frequency power supply provided by this embodiment, further, step 11 is added to step 2 to obtain the product model, search the pre-stored product maintenance plan according to the product model, and then retrieve the product corresponding to the product model maintenance proposal.

[0051] Further, the product maintenance scheme is a maintenance scheme customized in advance according to all product models.

[0052] Further, the product maintenance plan includes product model, corresponding interface signal requirements, and product QR code.

[0053] Further, the two-dimensional code of the product includes the production date, manufacturer, and maintenance times of the product.

[0054] Further, in step 10, the generated maintenance report is processed with an encryption algorithm, and then sent to the customer.

[0055] Further, the encryption algorithm in step 10 adopts MD5 encryption algorith...

Embodiment 3

[0057] like image 3 As shown, in the maintenance and detection method of a radio frequency power supply provided by this embodiment, step 12 is added before step 1 to authenticate the user before the maintenance of the product. The specific steps are as follows:

[0058] A) Start unlocking: jump out of the matrix text image interface, start to unlock the graphic, select it by touching the text image and combine it according to the touch sequence to form the unlocking graphic and save it;

[0059] B) After the unlocking graphics are completed, start to unlock the binary, press the volume + key, volume - key and combine them to form a binary and save it;

[0060] C) Judging whether the unlock pattern formed in step A above and the binary pattern formed in step B are correct; by matching the input unlock pattern with the unlock text pattern saved in settings, once the match is successful;

[0061] D) Enter the main step 1; if one of them cannot be matched; the user will be prom...

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Abstract

The invention discloses a maintenance and detection method for a radio frequency power supply. The method specifically comprises the following steps: 1) detecting the appearance of a product in advance; 2) checking and testing each connector before maintenance; 3) according to the three modular decomposition operations of the power supply module, the amplification module and the control module, detecting the damage of parts in each module; 4) automatically generating a report according to the detection result of the step 3) and contacting the client; 5) maintenance is carried out according toclient requirements; 6) disassembling and maintaining the product; 7) searching a part supplier according to the part to be maintained; 8) obtaining parts needing to be maintained, and performing combined maintenance; 9) testing the three modules of the power supply module, the amplification module and the control module one by one, if the three modules meet the requirements, skipping to the step10), and if the three modules meet the requirements, skipping to the step 7), and if the three modules meet the requirements, making a maintenance report, storing the maintenance report, and handing to the machine, otherwise, skipping to the step 7).

Description

technical field [0001] The invention relates to the technical field of a maintenance detection method, in particular to a maintenance detection method of a radio frequency power supply. Background technique [0002] RF power supply is a supporting power supply for plasma. It is composed of RF power source, impedance matching device and impedance power meter. It is a new high-tech field in my country in the late 1980s. Etching and other equipment. The modern RF power supply has made great progress, from the electronic tube power supply in the 1980s to the current transistor RF power supply step by step. 40.68Mhz, etc., and the application has also expanded from the previous vacuum field to other fields, such as semiconductors, beauty, etc. With the continuous development of radio frequency power supply, the quality of radio frequency power supply directly affects the power supply performance of other equipment. Therefore, when the radio frequency power supply fails, it needs...

Claims

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Application Information

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IPC IPC(8): G06Q10/00G06F21/36
Inventor 陈杰刘锐徐美前
Owner 江苏神州半导体科技有限公司
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