Physical quantity sensor, composite sensor, inertial measurement unit, electronic device and vehicle

A physical quantity sensor and physical quantity technology, applied in steering sensing equipment, gyroscope/steering sensing equipment, measuring devices, etc., can solve problems such as state retention

Pending Publication Date: 2019-12-20
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, in the physical quantity sensor described in Patent Document 1, when the IC chip is fixed on the physical quantity sensor element with an adhesive material, the adhesive material may flow out from the upper part of the physical quantity sensor element to the lower substrate, resulting in The physical quantity sensor element stays in contact with the adhesive material fixed on the substrate

Method used

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  • Physical quantity sensor, composite sensor, inertial measurement unit, electronic device and vehicle
  • Physical quantity sensor, composite sensor, inertial measurement unit, electronic device and vehicle
  • Physical quantity sensor, composite sensor, inertial measurement unit, electronic device and vehicle

Examples

Experimental program
Comparison scheme
Effect test

no. 1 approach ＞

[0052] First, refer to figure 1 The acceleration sensor 100 as a physical quantity sensor including the acceleration sensor element 1 as an example of the physical quantity sensor element will now be described.

[0053] figure 1 It is a side view schematically showing a schematic structure of the physical quantity sensor according to the first embodiment of the present invention.

[0054] Such as figure 1 As shown, the acceleration sensor 100 as a physical quantity sensor includes the acceleration sensor element 1 as an example of a physical quantity sensor element, and can be used as a uniaxial acceleration sensor capable of independently detecting acceleration in one direction. Such an acceleration sensor 100 includes a package body 120, an acceleration sensor element 1 accommodated in the package body 120, and a circuit element 2 bonded to the acceleration sensor element 1. It is installed inside the package 120 (accommodating space S1 ), that is, on the upper surface 11...

no. 2 approach ＞

[0102] Next, refer to Figure 6 and Figure 7 The acceleration sensor element 1a included in the physical quantity sensor according to the second embodiment of the present invention will be described.

[0103] Figure 6 It is a cross-sectional view of the physical quantity sensor element included in the physical quantity sensor according to the second embodiment of the present invention. Figure 7 for Figure 6 Enlarged view of part C in .

[0104] The acceleration sensor element 1a according to this embodiment is the same as the acceleration sensor element 1 of the above-mentioned first embodiment except for the structure of the concave portion 70a provided on the upper surface 50f.

[0105] It should be noted that in the following description, the acceleration sensor element 1 a of the second embodiment will be mainly described with regard to differences from the above-mentioned first embodiment, and descriptions of the same matters will be omitted. In addition, in Fi...

no. 3 approach ＞

[0109] Next, refer to Figure 8 and Figure 9 The acceleration sensor element 1b included in the physical quantity sensor according to the third embodiment of the present invention will be described.

[0110] Figure 8 It is a cross-sectional view of the physical quantity sensor element included in the physical quantity sensor according to the third embodiment of the present invention. Figure 9 for Figure 8 Enlarged view of part D in .

[0111] The acceleration sensor element 1b according to this embodiment is the same as the acceleration sensor element 1 of the above-mentioned first embodiment except for the structure of the concave portion 70b provided on the upper surface 50f.

[0112] It should be noted that in the following description, the acceleration sensor element 1b of the third embodiment will be described mainly on points different from the above-mentioned first embodiment, and the description of the same matters will be omitted. In addition, in Figure 8 a...

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PUM

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Abstract

The invention provides a physical quantity sensor which is excellent in physical quantity detection precision, a composite sensor, an inertial measurement unit, an electronic device and a vehicle. Anacceleration sensor functioning as a physical quantity sensor includes an acceleration sensor element including a substrate, a lid joined to the substrate to form a housing space in the inside, and anacceleration sensor element piece housed in the housing space and capable of detecting a physical quantity, and a circuit element bonded to, by an adhesive material, an upper surface on the oppositeside of the acceleration sensor element piece side of the lid. A recess is provided along the outer edge of the lid in an outer edge region of the upper surface of the lid.

Description

technical field [0001] The present invention relates to a physical quantity sensor, a composite sensor, an inertial measurement unit, a mobile body positioning device, a portable electronic device, an electronic device, a mobile body, a driving assistance system, and a display device. Background technique [0002] Conventionally, as described in Patent Document 1, among physical quantity sensors for detecting physical quantities such as acceleration and angular velocity, there is known a physical quantity sensor including a physical quantity sensor element having a fixed electrode and a movable electrode. The movable electrodes are arranged side by side with a gap with respect to the fixed electrodes, and can be displaced in a certain direction. [0003] In such a physical quantity sensor element, along with the displacement of the movable electrode, the gap between the fixed electrode and the movable electrode provided on the movable electrode changes, and the gap between t...

Claims

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Application Information

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IPC IPC(8): G01C19/5733G01C19/5769G01C21/16
CPCG01C19/5733G01C19/5769G01C21/166G01P15/125G01P15/18G01P2015/0814B81B2201/0235B81B2201/033B81C2203/032B81C3/001G01C19/5783G01C19/56G01C19/5719G01C19/5607G01C19/5642G01C19/5649
Inventor鸟本达朗
OwnerSEIKO EPSON CORP