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Tunable thermo-optical filter and adjusting method and manufacturing method thereof

A filter and thermo-optic technology, applied in the field of communication, can solve problems such as low coupling efficiency and poor filter performance

Active Publication Date: 2020-08-25
BOE TECH GRP CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, for these devices, the optical signal is based on free space transmission, and the coupling efficiency is low, resulting in poor filter performance

Method used

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  • Tunable thermo-optical filter and adjusting method and manufacturing method thereof
  • Tunable thermo-optical filter and adjusting method and manufacturing method thereof
  • Tunable thermo-optical filter and adjusting method and manufacturing method thereof

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Embodiment Construction

[0036] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention more clear, the following will clearly and completely describe the technical solutions of the embodiments of the present invention in conjunction with the drawings of the embodiments of the present invention. Apparently, the described embodiments are some, not all, embodiments of the present invention. And in the case of no conflict, the embodiments in the present invention and the features in the embodiments can be combined with each other. Based on the described embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0037] Unless otherwise defined, the technical terms or scientific terms used in the present invention shall have the usual meanings understood by those skilled in the art to which the present invention be...

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Abstract

The invention provides a tunable thermo-optical filter, and an adjusting method and a manufacturing method thereof, and the tunable thermo-optical filter comprises a substrate, and a first reflector,a metasurface structure and a second reflector which are sequentially arranged in a manner of deviating from the substrate. The metasurface structure comprises a plurality of microstructures which areperiodically arranged. A heating structure surrounding the plurality of microstructures, and a thermo-optic effect structure covering the plurality of microstructures and the heating structure. The heating structure is used for heating the thermo-optic effect structure. When the thermo-optic effect structure is at a first temperature value, the central wavelength of the tunable thermo-optic filter is a first numerical value, and when the thermo-optic effect structure is at a second temperature value different from the first temperature value, the central wavelength of the tunable thermo-opticfilter is a second numerical value different from the first numerical value. The filter is used for realizing high-performance tunable filtering.

Description

technical field [0001] The invention relates to the technical field of communication, in particular to a tunable thermo-optic filter, its adjusting method and its manufacturing method. Background technique [0002] At present, integration and miniaturization have become the development trend of future device design. There have been many methods of integrated optics for designing filter structures, such as microring-based on-chip frequency filters, integrated diffraction gratings, and arrayed waveguide gratings. However, for these devices, the optical signal is based on free space transmission, and the coupling efficiency is low, resulting in poor filter performance. [0003] How to realize high-performance tunable filtering has become an extremely important issue. Contents of the invention [0004] The invention provides a tunable thermo-optic filter, its adjusting method and manufacturing method, which are used to realize high-performance tunable filtering. [0005] In...

Claims

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Application Information

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IPC IPC(8): G02F1/01
CPCG02F1/0147G02F1/0102G02F1/0121
Inventor 周健
Owner BOE TECH GRP CO LTD
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