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Ceramic-based high-precision interdigital electrode and application thereof in electrochemical sensor

A technology of interdigitated electrode and base height, which is applied to ceramic base high-precision interdigitated electrode and its application in electrochemical sensors, can solve the problems of large difference in performance index and high defect rate of product manufacturing process

Pending Publication Date: 2021-05-04
广州钰芯传感科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] At home and abroad, aluminum nitride or aluminum oxide is usually used as the matrix for the design and development of interdigital electrodes, which are selected and designed according to different uses of interdigital electrodes. In terms of electrode reliability and precision, different companies adopt different processing techniques, the performance indicators are quite different, and the defect rate of product manufacturing process is high, which has also become the main problem faced by the interdigitated electrode industry at present.

Method used

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  • Ceramic-based high-precision interdigital electrode and application thereof in electrochemical sensor
  • Ceramic-based high-precision interdigital electrode and application thereof in electrochemical sensor
  • Ceramic-based high-precision interdigital electrode and application thereof in electrochemical sensor

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Embodiment 1

[0052] The ceramic-based high-precision interdigitated electrode of the present invention adopts a coplanar two-electrode system, specifically a working electrode and a counter electrode, which can be found in the attached figure 1 , the electrode base is made of alumina ceramic material, the thickness is 0.38mm, the overall electrode size is 10.0mm x10.0mm, the conductive inner layer of the electrode is Ti layer, Cu layer and Ni layer from bottom to top, and the thickness of Ti layer is 0.1μm , the thickness of the Cu layer is 5-10 μm, the thickness of the Ni layer is 2-5 μm; the electrode reaction layer is a pure gold layer, and the thickness of the reaction layer is 1.0 μm.

[0053] The electrode adopts the form of high-precision integrated coplanarity. The first pin and the second pin are fixed on the electrode base and are parallel and equidistant from each other. The lower end extends to the lower end of the electrode base to form two pin terminals, the upper end of the ...

Embodiment 2

[0055] attached figure 2 It adopts the form of high-precision integrated coplanarity. The electrode base is made of alumina ceramic material with a thickness of 0.38mm. The overall electrode size is 10.0mm x 10.0mm. The electrode base is fixed with the first pins and The second pins are respectively the working electrode and the counter electrode, the lower end of the working electrode and the lower end of the counter electrode extend to the lower end of the electrode base to form two pin terminals, the upper end of the working electrode and the upper end of the counter electrode are provided with The interdigitated strips are parallel and equidistant to each other, the interdigitated strips of the working electrode and the interdigitated strips of the counter electrode are arranged alternately in the shape of a tooth comb, and one adjacent working electrode interdigitated strip and one counter electrode interdigitated strip Count as a pair, a total of 10 pairs, the interdigi...

Embodiment 3

[0057] attached image 3 It adopts the form of high-precision integrated coplanarity. The electrode base is made of alumina ceramic material with a thickness of 0.38mm. The overall electrode size is 10.0mm x 10.0mm. The electrode base is fixed with the first pins and The second pins are respectively the working electrode and the counter electrode. The lower end of the working electrode and the lower end of the counter electrode extend to the lower end of the electrode base to form two pin terminals, and the upper end of the working electrode and the upper end of the counter electrode are provided with The interdigitated strips are parallel and equidistant to each other, the interdigitated strips of the working electrode and the interdigitated strips of the counter electrode are arranged alternately in the shape of a tooth comb, and one adjacent working electrode interdigitated strip and one counter electrode interdigitated strip Count as a pair, a total of 15 pairs, the interd...

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Abstract

The invention provides a ceramic-based high-precision interdigital electrode. The electrode sequentially comprises a substrate, a conductive inner layer and a reaction layer from bottom to top, the conductive inner layer is arranged on the surface of the substrate, and the reaction layer is arranged on the outer surface of the conductive inner layer; and the thickness of the electrode substrate is 0.38 mm, the thickness of the electrode conductive inner layer is 7.1-15.1 microns , and the thickness of the electrode reaction layer is 1.0 micron. The ceramic-based high-precision interdigital electrode has the characteristic of high temperature resistance and can be widely applied to the field of electrochemical sensors.

Description

technical field [0001] The invention belongs to the field of electrochemical sensors, and relates to a ceramic-based high-precision interdigital electrode and its application in electrochemical sensors. Background technique [0002] Interdigitated electrodes refer to electrodes with periodic patterns in the shape or comb shape, which are ultra-fine circuits obtained by electrochemical processing. As the core component of electrical signal transmission, it is widely used in biomedical testing, environmental online monitoring, food safety testing, safety monitoring and other important fields. [0003] In recent years, with the rapid development of Industry 4.0 and the Internet of Things, emerging industries and other industries have more and more demand for sensors, and interdigital electrodes, as one of the core components of sensors, have attracted more and more attention from the society. How to improve interdigital electrodes The reliability of electrodes is directly rela...

Claims

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Application Information

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IPC IPC(8): G01N27/30G01N27/327G01N27/26
CPCG01N27/26G01N27/307G01N27/327
Inventor 奚亚男胡淑锦
Owner 广州钰芯传感科技有限公司
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