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Piezoelectric single crystal driver and preparation method thereof

A piezoelectric single crystal and driver technology, applied in piezoelectric devices/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, circuits, etc., can solve high cost, low yield and unusable drivers and other problems, to achieve the effect of less layers, large output deformation, and large displacement output

Pending Publication Date: 2021-05-11
XI AN JIAOTONG UNIV
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Problems solved by technology

[0003] The purpose of the present invention is to provide a piezoelectric single crystal driver and its preparation method, which solves the problems of high cost and low yield of the existing piezoelectric single crystal driver, and makes the driver unable to be used in a high-frequency environment

Method used

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  • Piezoelectric single crystal driver and preparation method thereof
  • Piezoelectric single crystal driver and preparation method thereof
  • Piezoelectric single crystal driver and preparation method thereof

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Embodiment Construction

[0026] The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0027] Such as Figure 1 to Figure 4 As shown, a piezoelectric single crystal driver provided by the present invention includes a piezoelectric single crystal stack 1, a wire 2 and an insulating end cap 3, wherein the upper and lower ends of the piezoelectric single crystal stack 1 are provided with wires; Insulating end caps 3 are respectively provided at both ends of the piezoelectric single crystal stack 1 along its length direction.

[0028] The piezoelectric single crystal stack 1 includes a plurality of single crystals 101, and the multiple single crystals 101 are attached and stacked in series in structure and parallel in circuit.

[0029] The single chip is arranged in a stacked manner, mainly to reduce the driving voltage; from the output displacement of the driver D=d32*(U / t)*L, it can be seen that when d32 and the length are determined, the thickn...

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Abstract

The invention provides a piezoelectric single crystal driver and a preparation method thereof. The piezoelectric single crystal driver comprises a piezoelectric single crystal stack, the piezoelectric single crystal stack comprises a plurality of single crystal wafers, the plurality of single crystal wafers (101) are stacked along the thickness direction, and the plurality of single crystal wafers (101) are connected in parallel through circuits; the thickness direction of the single crystal wafer (101) is <011> direction, the length direction is <100>direction, and the width direction is selected as <0-11>direction. The transverse piezoelectric coefficient of the single crystal wafer under three-dimensional orientation is more than 2000pC / N, so that the single crystal wafer has the characteristics of few layers, large output deformation, high working frequency and the like under the condition of the same driving voltage.

Description

technical field [0001] The invention belongs to the technical field of precision driving components, and in particular relates to a piezoelectric single crystal driver and a preparation method thereof. Background technique [0002] The piezoelectric actuator is the piezoelectric performance of the material. Under the driving of a certain voltage, the corresponding displacement is output. The piezoelectric material generally used is a piezoelectric ceramic material. The longitudinal piezoelectric coefficient d of commonly used piezoelectric ceramics 33 About 750pC / N, transverse piezoelectric coefficient d 31 About 240pC / N, in comparison, the longitudinal piezoelectric coefficient d 33 is the transverse piezoelectric coefficient d 31 is more than twice that of piezoelectric ceramics, so the drivers made of piezoelectric ceramics all use the longitudinal driving mode. In this mode, the output displacement of the driver is related to the piezoelectric coefficient of the mate...

Claims

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Application Information

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IPC IPC(8): H01L41/083H01L41/09H01L41/277
CPCH10N30/50H10N30/20H10N30/057
Inventor 王三红徐卓
Owner XI AN JIAOTONG UNIV
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