Single crystal furnace capable of automatically dismounting single crystal rods and dismounting method thereof

Abstract

The invention discloses a single crystal furnace capable of automatically dismounting single crystal rods and a dismounting method thereof. The single crystal furnace comprises a single crystal furnace base, wherein a single crystal furnace main body is arranged on the single crystal furnace base, the single crystal furnace main body is used for producing single crystal rods, a rack is arranged on the left side of the single crystal furnace base, a single crystal rod dismounting mechanism is arranged on the end face of the front side of the rack; the single crystal rod dismounting mechanism is used for providing transverse movement needed for dismounting a single crystal rod and rotating movement needed for storing the single crystal rod; a single crystal rod clamping mechanism is arranged on the single crystal rod dismounting mechanism; a single crystal rod storage mechanism located on the lower side of the single crystal rod clamping mechanism is arranged on the rack, and is used for storing single crystal rods. According to the single crystal furnace capable of automatically dismounting single crystal rods, the single crystal rods can be automatically disassembled, personnel are effectively prevented from being scalded in the disassembling and transferring process, the single crystal rods do not need to be clamped for the second time when the single crystal rods are transferred, the working procedures are reduced, and the damage probability in the disassembling and transferring process of the single crystal rods is reduced.

Description

technical field [0001] The invention relates to the technical field of single crystal furnaces, in particular to a single crystal furnace for automatic disassembly of single crystal rods and a disassembly method thereof. Background technique [0002] The single crystal furnace is a kind of equipment that melts polycrystalline materials such as polycrystalline silicon with a graphite heater in an inert gas (mainly nitrogen and helium) environment, and grows a single crystal without dislocation by the Czochralski method. After the crystal ingot is produced, the single crystal ingot needs to be taken out. At present, most of the disassembly and removal of the single crystal ingot is performed by manual operation and semi-automatic machinery. Due to the high internal temperature of the single crystal furnace, the operator is easily burned during work, and the single crystal ingot Single crystal ingots are easily damaged during disassembly and removal work, and the present invent...

AI Technical Summary

Problems solved by technology

[0003] Technical problem: At present, most of the work of dismantling and taking out single crystal rods is performed by manual operation and semi-automatic machinery. Due to the high temperature inside the single crystal furnace, the operator is easily burned during work.

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