Quartz tube straightening device and straightening method

A technology of quartz tube and tube alignment, which is applied in glass reshaping, glass manufacturing equipment, glass molding, etc. It can solve problems such as low efficiency, unstable quality, and long alignment time, and achieve simple operation and avoid excessive speed. Fast, guaranteed effect of moving speed

Active Publication Date: 2021-11-09
HANGZHOU DAHE THERMO MAGNETICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The present invention aims to overcome the problems of long straightening time, low efficiency and unstable quality in the prior art, and provides a quartz tube straightening device and straightening method with simple operation, high straightening efficiency and stable straightening effect

Method used

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  • Quartz tube straightening device and straightening method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0036] Such as figure 1 Shown, a kind of quartz tube straightening device comprises:

[0037] Workbench 5, height adjustment feet are provided at the bottom of workbench 5, and two horizontal guide columns 41 are arranged on the workbench 5 along the length direction;

[0038] The clamping mechanism 1 is arranged on one end of the workbench 5, and is used to clamp one end of the quartz tube and make it rotate along the axis. The clamping mechanism 1 includes a three-jaw chuck 11, a spindle box 12 and a first motor 13. The first motor 13 Drive the main shaft in the spindle box 12 to rotate, thereby driving the three-jaw chuck 11 to rotate, and the jaws of the chuck are made of graphite;

[0039] Lifting mechanism 2, the lifting mechanism 2 is slidingly arranged on the guide column 41, and is arranged on the end of the quartz tube away from the clamping mechanism 1, used to lift the quartz tube and ensure that the quartz tube extends in the axial direction, the lifting mechanis...

Embodiment 2

[0042] A quartz tube straightening device, its structure is roughly the same as that of Embodiment 1, the difference is that it also includes a servo screw drive mechanism for driving and controlling the moving speed of the straightening plate 31, and the two inner walls of the first straightening hole 311 There are two annular pressure sensors along the circumference respectively.

[0043] Compared with Embodiment 1, the straightening plate 31 is automatically controlled.

Embodiment 3

[0045] A method for straightening a quartz tube, comprising the steps of:

[0046] a1. Replace the first straightening piece 31 and the second straightening piece 22 with suitable ones according to the size of the quartz tube 6 (the aperture is slightly larger than the outer diameter of the quartz tube), clamp one end of the quartz tube on the three-jaw chuck 11, and put the straightening plate 31 Move to any end, and the other end of the quartz tube passes through the first alignment hole 311 and the second alignment hole 221 in turn, and then places it on the reference roller 24;

[0047] a2. Drive the first motor 42 according to the length of the quartz tube to adjust the position of the lifting mechanism 2 to ensure that the longest possible quartz tube can be straightened;

[0048] a3. Rotate the adjustment hand wheel 27 to adjust the height of the follower roller 25 to ensure that the quartz tube is not clamped by the upper and lower rollers, can pass through the space b...

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Abstract

The invention discloses a quartz tube straightening device and method, and the device comprises a clamping mechanism, a lifting mechanism and a straightening mechanism; the clamping mechanism is used for clamping one end of a quartz tube and enabling the quartz tube to rotate along an axis; the lifting mechanism is arranged at one end, far away from the clamping mechanism, of the quartz tube, and is used for lifting the quartz tube and ensuring that the quartz tube extends along the axial direction; and the straightening mechanism is arranged between the clamping mechanism and the lifting mechanism in a sliding mode, and a first straightening hole allowing the quartz tube to pass through is formed in the straightening mechanism. The quartz tube is ensured to extend along a straight line; the quartz tube is effectively straightened; the straightening speed is controlled by monitoring the pressure at the two ends in the straightening hole, so that the product is prevented from being damaged, and the straightening efficiency is ensured; the device is adaptive to quartz tubes with different tube diameters and lengths; and operation is easy, and the straightening effect is stable.

Description

technical field [0001] The invention relates to the technical field of quartz processing, in particular to a quartz tube straightening device and a straightening method. Background technique [0002] With the rapid development of the IC industry, the semiconductor equipment manufacturing industry is becoming more and more mature. As an important component of semiconductor equipment, quartz glass products are in increasing demand. Because quartz glass has a series of characteristics such as high hardness, high purity, low thermal expansion coefficient and electrical insulation, its processing technology is very strict. Among them, quartz tubes and rods usually need to be straightened by fine firing. In the existing technology, the two ends of the quartz product are usually clamped on the chuck for rotation, and the position of abnormal curvature is observed by the human eye to be fine fired and softened. Provide correcting force for straightening. Since most of the straighte...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C03B23/08C03B20/00
CPCC03B23/08C03B20/00Y02P40/57
Inventor 何求耿健吴然红杨军
Owner HANGZHOU DAHE THERMO MAGNETICS CO LTD
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