Semiconductor production device management system

A production equipment and management system technology, applied in semiconductor/solid-state device manufacturing, electrical digital data processing, special data processing applications, etc., can solve problems such as complex analysis and calculation methods, numerous characteristic management items, and difficult horizontal query, etc., to achieve The effect of intuitive operation, fast and effective operation, and flexible reprocessing capabilities

Inactive Publication Date: 2004-04-28
北京首钢微电子有限公司
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Problems solved by technology

However, in terms of management, only simple statistics and general analysis functions can be realized, but multi-level analysis, calculation and summary functions cannot be realized, and there are problems such as difficulties in horizontal query and comparison, and poor flexibility and versatility of development tools.
Due to the production equipment in different industries, there are many characteristic management items, and the analysis and calculation methods are complicated. Therefore, it is often impossible to implement comprehensive and effective management only by using the usual equipment management system.

Method used

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  • Semiconductor production device management system
  • Semiconductor production device management system
  • Semiconductor production device management system

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Embodiment Construction

[0016] Read the following detailed description and accompanying drawings of the present invention, will further understand the embodiment and characteristics of the present invention. An embodiment of the present invention applied to a semiconductor production equipment management analysis query system will be described below. Its basic composition is divided into data transmission channels, including data connection and semiconductor production equipment characteristic management system update and analysis and query system modules, including module structure design, function operation design, macro command design, etc. See Figure 1.

[0017] 1. The system of the embodiment first needs a data transmission channel to realize basic data transmission and update functions. The present invention has used the ODBC function to carry out the design of data transmission channel:

[0018] ODBC (Open Database Connectivity) is an open database connection, which can provide direct access ...

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Abstract

This invention relates to a system for realizing characteristic management to semiconductor production equipments, apart from collecting equipments, fault, spare parts and purchasing information, it also has the function of setting up data trasmission channels, designing to process data analytical modules and getting assigned equipment management parameters quickly and timely enabling to use general software tools to design rapid, multiplayer analytical, computing, collecting and inquiry functions with complete equipments related data, so users can get required various statistical results and output final required document format lists of users under perfect related data of equipments.

Description

Technical field: [0001] The invention relates to the management of production equipment, and is applicable to the situation where characteristic management is required under the condition of complete equipment related data. Background technique: [0002] The usual equipment management system generally has the function of collecting data such as equipment, faults, spare parts, and procurement information. However, in terms of management, only simple statistics and general analysis functions can be realized, but multi-level analysis, calculation and summary functions cannot be realized, and there are problems such as difficulties in horizontal query and comparison, and poor flexibility and versatility of development tools. Due to the variety of production equipment in different industries, there are many characteristic management items, and the analysis and calculation methods are complicated. Therefore, it is often impossible to implement comprehensive and effective managemen...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/00
Inventor 高华
Owner 北京首钢微电子有限公司
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