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Micro-integrated narrow-band filter array and preparing method thereof

A narrow-band filter and miniaturized technology, applied in optical filters, optomechanical equipment, optics, etc., can solve problems such as difficult single-channel filter measurement, small optical filters, complex process steps, etc., to reduce design The difficulty of plating, the improvement of uniformity, and the effect of improving the transfer function

Active Publication Date: 2006-11-15
上海欧菲尔光电技术有限公司 +2
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Problems solved by technology

Due to the complex process steps of this integration method, the yield of the filter will drop by half for each additional channel, and the filters of each channel are very small, so it is difficult to measure a single-channel filter during the preparation process. to filter
In addition, there is still crosstalk between channels in this integration method

Method used

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  • Micro-integrated narrow-band filter array and preparing method thereof
  • Micro-integrated narrow-band filter array and preparing method thereof
  • Micro-integrated narrow-band filter array and preparing method thereof

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Embodiment Construction

[0042] Taking the seven-channel micro-integrated filter array of visible light as an example, the specific implementation of the present invention will be described in detail in conjunction with the accompanying drawings. Table 1 shows the design requirements of the central wavelength, bandwidth and transmittance of the seven-channel filter. The sub-peak cut-off range is from 400nm to 1100nm, and the transmittance in the cut-off area is less than 1%. Since it is very difficult to plate a narrow-band filter with seven channels on a substrate, the film system design uses a public truncation peak film system for the sub-peaks from 600nm to 1100nm, so that the range of the truncation peak film system of each channel It is greatly reduced to 400-600nm, and the difficulty of designing and plating the main peak film system is greatly reduced. The film system of the present invention can be designed with a regular film system or an irregular film system. Generally, the irregular film ...

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Abstract

The present invention discloses a micro type integrated narrow-band filter array and its preparation method. Said filter array includes the following several portions: a substrate, on one side surface of said substrate several channel micro type narrow-band light-filtering film layers are firmly combined, on its another side surface a common section subpeak film layer is coated. It is characterized by that between every two channel micro type narrow-band light-filtering film layers a space layer is set, in the space layer interior a light-proof metal layer capable of preventing light crosstalk is set. Besides, said invention also provides the concrete steps of its preparation method.

Description

technical field [0001] The invention relates to an optical film and an optical filter, in particular to a multi-channel micro-integrated narrow-band filter array for focal plane devices. Background technique [0002] With the development of the focal plane detector, it provides the basis for the miniaturization and modularization of the instrument. In order to get more information, multi-channel detection is needed. There are many ways to obtain multi-channel detection, such as grating splitting, filter splitting, prism splitting, etc. The combination of multi-channel filter array and detector array can greatly simplify the optical system and reduce the volume and weight of the instrument. Therefore, the research of micro-integrated narrow-band filter array is of great significance to the development of space remote sensing technology. In recent years, optical thin film technology has developed by leaps and bounds. From the maturity of coating methods such as electron guns...

Claims

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Application Information

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IPC IPC(8): G02B5/20G03F7/00
Inventor 周东平沈家麟
Owner 上海欧菲尔光电技术有限公司
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