Micro-integrated narrow-band filter array and preparing method thereof

A narrow-band filter and miniaturized technology, applied in optical filters, optomechanical equipment, optics, etc., can solve problems such as difficult single-channel filter measurement, small optical filters, complex process steps, etc., to reduce design The difficulty of plating, the improvement of uniformity, and the effect of improving the transfer function
CN1862296AActive Publication Date: 2006-11-15上海欧菲尔光电技术有限公司 +2
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
上海欧菲尔光电技术有限公司
Publication Date
2006-11-15

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Abstract

The present invention discloses a micro type integrated narrow-band filter array and its preparation method. Said filter array includes the following several portions: a substrate, on one side surface of said substrate several channel micro type narrow-band light-filtering film layers are firmly combined, on its another side surface a common section subpeak film layer is coated. It is characterized by that between every two channel micro type narrow-band light-filtering film layers a space layer is set, in the space layer interior a light-proof metal layer capable of preventing light crosstalk is set. Besides, said invention also provides the concrete steps of its preparation method.
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Description

technical field

[0001] The invention relates to an optical film and an optical filter, in particular to a multi-channel micro-integrated narrow-band filter array for focal plane devices. Background technique

[0002] With the development of the focal plane detector, it provides the basis for the miniaturization and modularization of the instrument. In order to get more information, multi-channel detection is needed. There are many ways to obtain multi-channel detection, such as grating splitting, filter splitting, prism splitting, etc. The combination of multi-channel filter array and detector array can greatly simplify the optical system and reduce the volume and weight of the instrument. Therefore, the research of micro-integrated narrow-band filter array is of great significance to the development of space remote sensing technology. In recent years, optical thin film technology has developed by leaps and bounds. From the maturity of coating methods such as electron guns...

Claims

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