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Transparent Conducting Oxide As Top-Electrode In Perovskite Solar Cell By Non-Sputtering Process

a solar cell and transparent conducting technology, applied in the field of transparent conducting oxide (tco), can solve the problems of deformation and delicate materials

Inactive Publication Date: 2018-05-03
INT BUSINESS MASCH CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The present invention is about a method for making a transparent conducting oxide (TCO) top contact using a low temperature, non-sputtering process. This method involves using a source gas of TCO and atomic oxygen generated from radio frequency plasma to form the TCO on a substrate. A photovoltaic device is also provided, including a perovskite-based top cell with a TCO top electrode. The technical effect of this invention is that it offers a reliable, efficient method to make high-quality TCO top contacts for photovoltaic devices.

Problems solved by technology

However, these materials are delicate and degrade under harsh processing conditions (such as sputtering).

Method used

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  • Transparent Conducting Oxide As Top-Electrode In Perovskite Solar Cell By Non-Sputtering Process
  • Transparent Conducting Oxide As Top-Electrode In Perovskite Solar Cell By Non-Sputtering Process
  • Transparent Conducting Oxide As Top-Electrode In Perovskite Solar Cell By Non-Sputtering Process

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Embodiment Construction

[0014]As provided above, some high-efficiency absorber materials for photovoltaic devices, e.g., metal-organic halide perovskites, are delicate and degrade under harsh processing conditions—such as the high-temperature or atomic bombardment conditions employed during the sputtering based processes commonly employed to form transparent conducting oxide (TCO) top contact / electrodes in typical photovoltaic devices. Namely, any process to which these absorber materials are exposed that involves temperatures at, or exceeding, ˜100° C. will damage the perovskite. Additionally, conditions of atomic bombardment by charged species will also damage the perovskite. Advantageously, provided herein are techniques for forming TCO contact / electrodes that do not involve sputtering and do not employ temperatures exceeding ambient room temperature (e.g., from about 20° C. to about 26° C., and ranges therebetween) or directly expose the perovskite to atomic bombardment. The terms “contact” and “electr...

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Abstract

Techniques for forming a transparent conducting oxide (TCO) top contact using a low temperature process are provided. In one aspect of the invention, a method of forming a TCO on a substrate is provided. The method includes the steps of: generating a source gas of the TCO using e-beam evaporation; generating atomic oxygen using RF plasma; and contacting the substrate with the TCO source gas and the atomic oxygen under conditions sufficient to form the TCO on the substrate. A photovoltaic device is also provided which includes a bottom cell; and a perovskite-based top cell on the kesterite-based bottom cell. The perovskite-based top cell includes a top electrode formed from a TCO.

Description

CROSS-REFERENCE TO RELATED APPLICATION(S)[0001]This application is a divisional of U.S. application Ser. No. 14 / 846,119 filed on Sep. 4, 2015, the disclosure of which is incorporated by reference herein.FIELD OF THE INVENTION[0002]The present invention relates to transparent conducting oxide (TCO) for use as top electrode or contact in solar cells, and more particularly, to techniques for forming a TCO top contact in a perovskite solar cell using a low temperature, non-sputtering process.BACKGROUND OF THE INVENTION[0003]Metal-organic halide perovskites are promising absorber materials for photovoltaics. However, these materials are delicate and degrade under harsh processing conditions (such as sputtering).[0004]Tandem (multi-junction) photovoltaic devices require a transparent electrode at the top of the device through which light may reach the various layers in the device. This transparent electrode is often a transparent conducting oxide (TCO). The primary method for preparing mo...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): H01L51/44H01L31/0725H01L51/00
CPCY02E10/549H01L31/0725H01L51/442H01L51/0021H01L51/4213H01L31/0326H10K71/60H10K30/10H10K30/82H10K30/57H10K85/50
Inventor EK, BRUCE A.GERSHON, TALIA S.GUHA, SUPRATIKGUNAWAN, OKITODOROV, TEODOR K.
Owner INT BUSINESS MASCH CORP
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