The invention, which belongs to the technical field of the
vacuum extraction equipment, provides a piece of
vacuum extraction equipment. According to the technical scheme, the structural design of the vacuum
system is improved based on the working practice. A filter valve is added and is used for reducing the influence on the high-pressure
vacuum pumping unit by internal residues of the gas; and a
low vacuum gauge and a high vacuum gauge are arranged to carry out precise measurement for the inside of the
system, so that the equipment controlling becomes precise. Meanwhile, with a multi-valve series connection way, air intake stability can be guaranteed; and on the basis of a proper sealing way, the sealing performance of the high vacuum
system is improved, thereby reducing the air
leakage rate of the system and enhancing the safety of the equipment. The
vacuum extraction equipment comprises a vacuum cavity, a process system, a vacuum breaking system, a
low vacuum system, and a high vacuum system; and all systems are connected with the vacuum cavity. The working processes of
low vacuum extraction, high vacuum extraction, process air intake, and vacuum breaking are realized. The vacuum extraction equipment can be applied to the vacuum extraction equipment technical field widely.