Iridium complex and its synthesis method

A technology for iridium complexes and synthesis methods, which is applied in chemical instruments and methods, compounds containing elements of Group 8/9/10/18 of the periodic table, organic chemistry, etc. Sex, enhanced shading, the effect of increasing the volume of space
CN100425615CInactive Publication Date: 2008-10-15NORTHWESTERN POLYTECHNICAL UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
NORTHWESTERN POLYTECHNICAL UNIV
Publication Date
2008-10-15
Estimated Expiration
Not applicable · inactive patent

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Abstract

The disclosed synthesis method for Ir complex comprises: loading inert solvent with half volume of the three-necked flask, adding 1mmol IrCl3, and heating to full dissolution; dripping carefully 6-10mmol hexafluoroacetylacetone into the mixed liquid to react for 40-60h at 50-70Deg; filtering the white solid deposit to evaporate and dry; dissolving the obtained solid into 30ml inert solvent at 20Deg; filtering, putting the filtrate into icebox of 5Deg for 24h; finally, filtering, and vacuum drying. This invention solves the low-volatility problem of acetylacetone complex in prior art.
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Description

technical field

[0001] The present invention relates to a kind of synthetic method of iridium complex. Background technique

[0002] The metal organic chemical vapor deposition method is widely used in the preparation of various thin films. In the metal organic chemical vapor deposition process, the properties of the precursor play a very important role in the deposition. The iridium precursor commonly used in metal iridium films at present is the acetylacetone complex of iridium, and its structural formula is:

[0003]

[0004] The acetylacetonate complex of iridium has low volatility, and requires a higher volatilization temperature in actual use, which imposes higher requirements on the entire deposition equipment and limits its application range. SUMMARY OF THE INVENTION

[0005] In order to overcome the deficiency of low volatility in the prior art, the present invention provides a method for synthesizing iridium complexes.

[0006] The technical scheme adopted ...

Claims

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