Two-dimensional transversal zeeman double-frequency laser linearity/coaxiality measuring device

Abstract

The invention discloses a two-dimensional transverse Zeeman dual-frequency laser straightness / coaxiality measuring device, which includes: a dual-frequency laser light source, a telescope arranged on the optical path axis of the laser emitting end, a beam splitter, a parallel beam splitter, and a second beam splitter. One and the second two-dimensional Wollaston prism and two-dimensional right-angle prism, the second two-dimensional Wollaston prism and the first two-dimensional Wollaston prism are also located in turn after being reflected from the two-dimensional right-angle prism On the optical path of the returning light, after the first two-dimensional Wollaston prism, a second analyzer and a second photoelectric receiver, a third analyzer and a third photoelectric receiver are arranged in sequence on the optical path of the returning light. Receiver; a first polarizer and a first photoelectric receiver are arranged on the reference optical path of the beam splitter, and a dual signal processing unit and a display unit connected with the three photoelectric receivers. The invention shortens the measurement time, improves the installation accuracy, and can more accurately evaluate the straightness / coaxiality error status of the measured object.

Description

technical field [0001] The invention relates to laser precision measurement technology, in particular to a high-precision alignment measurement technology using laser. Background technique [0002] The measurement of straightness is one of the most basic measurement items in the field of geometric metrology. Long-distance straightness measurement is used in the installation and alignment of guide rails, the installation and positioning of large instruments, the manufacturing and testing of precision instruments, large-scale measurement, and military product manufacturing. Has a wide range of applications. In many projects, it is required to measure the coaxiality of multiple sets of shafts and holes, and it is required that the measurement can be carried out intermittently. Compared with the straightness, the coaxiality measurement puts forward higher requirements. [0003] Yin Chunyong of Tsinghua University and others proposed a method of measuring straightness / coaxiality...

AI Technical Summary

Problems solved by technology

Step 8 of this method requires that the right-angle prism 109, the Wollaston prism 107 or 108 and the movable sleeve 106 are all manually rotated by 90 degrees, which means that the straightness in the horizontal direction and the straightness / coaxiality in the vertical direction cannot be measured at the same time. Two measurements are required, which is time-consuming, and the starting positions of the two measurement settings will be slightly different, so the measured horizontal and vertical straightness / coaxiality do not correspond to the same series of positions

In this way, when the straightness / coaxiality of the two directions is combined to evaluate its comprehensive straightness / coaxiality, there is an error

Second, there are errors in manual rotation, and the consistency of angular rotation cannot be guaranteed, which will introduce new measurement errors due to the unsatisfactory installation position

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