Thin film transistor manufacturing method, thin film transistor and display device using the same
A technology of thin film transistors and manufacturing methods, applied in the direction of transistors, semiconductor/solid-state device manufacturing, electric solid-state devices, etc., can solve problems such as L length deviation, and achieve the effect of excellent image quality
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[0025] The thin film transistor manufacturing method, the thin film transistor and the display using the thin film transistor according to the present invention will be described below with reference to the accompanying drawings.
[0026] First, a display device will be described taking an organic EL display operable to cause the organic EL elements to emit light using TFTs as driving elements as an example.
[0027] figure 1 is an explanatory diagram showing a configuration example of an organic EL display including TFTs.
[0028] The organic EL display shown in the figure has a TFT 10 formed on an insulating substrate 1 as a driving element. In addition, the insulating planarization film 31 is uniformly formed on the TFT 10 . Furthermore, a plurality of organic EL elements 32 are formed. Each organic EL element 32 includes a reflective electrode 32A, an organic light emitting layer 32B, and a transparent electrode 32C. Furthermore, an inter-electrode insulating film 33 i...
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