Device and method for measuring light sheet thickness

Abstract

The invention relates to a measuring device for measuring thickness of a large-sized sheet and a measuring method thereof. The measuring device comprises an angle base, a thickness measuring platform and a measurer, wherein the thickness measuring platform is provided with a positioning device; the positioning device comprises a fixing base arranged on the thickness measuring platform and a locking base arranged below the fixing base and fixedly connected with the fixing base; the fixing base is provided with a positioning hole running through the fixing base, a support mechanism is arranged in the fixing hole, the support mechanism comprises three spherical support faces extending out of an upper opening of the fixing hole, and the top points of the three spherical support faces form a support plane; and the locking base is also provided with a center hollow pipeline capable of vacuumizing the fixing hole, and the center hollow pipeline is communicated with a vacuum pump. The device adopts a positioning mode of three-point positioning support, thereby easily ensuring the positioning accuracy of the sheet and having good repeated measurement accuracy.

Description

technical field [0001] The invention relates to a measuring device for online thickness measurement of a large-size thin plate and a measuring method of the measuring device. Background technique [0002] At present, for the measuring device for thin plate thickness measurement, its positioning component is generally a finely machined positioning reference plane, and the thin plate to be measured is placed on the positioning reference plane and clamped. Although the positioning datum plane is finely machined, it is inevitable that there will be uneven thickness due to surface tension problems, such as some local warping or depression. When the thin plate is placed on the positioning datum plane, some positions of the thin plate will be relatively The machine is tilted, which leads to the deviation of the thickness measurement accuracy of the thin plate; in addition, when the thin plate is placed on the positioning reference plane every time, the thin plate will rotate a cert...

AI Technical Summary

Problems solved by technology

Although the positioning datum plane is finely machined, it is inevitable that there will be uneven thickness due to surface tension problems, such as some local warping or depression. When the thin plate is placed on the positioning datum plane, some positions of the thin plate will be relatively The machine is tilted, which leads to the deviation of the thickness measurement accuracy of the thin plate; in addition, when the thin plate is placed on the positioning reference plane every time, the thin plate will rotate a certain angle relative to the positioning reference plane, and different positions of the thin plate will be tilted relative to the machine. This results in a low repeatability of the thin plate

[0003] In order to make up for the above deficiencies, engineers sometimes use micrometers to measure thickness. However, due to the very limited operating area of ​​the micrometer itself, it is difficult to measure the central area of ​​large-size thin plates, which cannot fundamentally solve the problem of large-size thin plates. The problem of low positioning accuracy and repeat positioning accuracy

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