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48results about How to "High repeatable measurement accuracy" patented technology

Grating heterodyne interference auto-collimation measuring device

A grating heterodyne interference auto-collimation measuring device mainly comprises a two-frequency laser, a 1 / 4 wave plate, a beam splitting system, a photoelectric conversion system, a polarization beam splitter, a reflector and a grating. The two-frequency laser emits two-frequency laser which passes the 1 / 4 wave plate and which then turns into two mutually-perpendicular linearly-polarized beams. The beams entering the beam splitting system are divided into three beams; one beam enters a reference light path photoelectric conversion system; last two enter a positive-negative gage beam polarization beam splitter. In the laser entering the polarization beam splitter, a reflected beam S is reflected to the grating by the reflector, and an incident angle is set into an auto-collimation angle of the corresponding diffraction order; through reference light information, horizontal and vertical displacements of the grating can be known. The auto-collimation right angle is set not depending on grating displacements. Therefore, the grating heterodyne interference auto-collimation measuring device is applicable to measuring horizontal large-travel displacement and vertical displacement.
Owner:TSINGHUA UNIV +1

Symmetric-type grating heterodyne interference secondary diffraction measuring device

Disclosed is a symmetric-type grating heterodyne interference secondary diffraction measuring device. The device mainly comprises a laser device, a 1 / 4 wave plate, a light splitting system, a photoelectric conversion system, a polarizing light splitter, a reflector, a grating and the like. Double-frequency lasers emitted by the laser device enter the light splitting system after passing the 1 / 4 wave plate to be divided into three branches, one branch enters the reference photoelectric conversion system, the other two branches enter the positive-negative measuring light path polarizing light splitter, reflected light s is irradiated onto the grating by an incident angle set according to corresponding diffraction grades, occurs interference with light p on a polarizing light splitting face after secondary diffraction and enters the measuring light path photoelectric conversion system. When the grating moves, two signals containing displacement information are detected by the measuring light path photoelectric conversion system, and grading level and vertical displacement can be acquired by solving through the two signals. Whether measured light can return along an original path after secondary diffraction or not only depends on the incident angle and has nothing to do with grating displacement, so that the symmetric-type grating heterodyne interference secondary diffraction measuring device can realize horizontal long stroke and vertical displacement measuring.
Owner:TSINGHUA UNIV +1

Large free forging size online measurement device and method

The invention discloses a large free forging size online measurement device and method. The device is provided with, on two sides of a forging machine, a horizontal and a vertical motion unit, a laser cast-line method length measuring unit, a temperature-measurement edge searching method diameter online temperature measurement unit, a laser correlation telemetry diameter online measurement unit, a laser correlation telemetry diameter offline measurement unit, a laser beam cast-line method diameter visual inspection and early warning unit, and an operating machine position measurement unit installed on the operating machine. Each measurement unit is installed on the horizontal or the vertical motion unit, and is capable of horizontal or vertical motion. The projection laser beam method, the infrared temperature-measurement edge searching method and the laser correlation telemetry are used in the method to obtain the forging diameter, length, size and the forging contour in a horizontal section. The device and the method achieve online and offline measurement for the forging, enhance measurement functions and improve timeliness, accuracy and efficiency of the measurement.
Owner:CHINA FIRST HEAVY IND

Gel capacitance sensor and method for measuring plantar pressure and dynamic change

ActiveCN106768508AEasy to processGood repeatable measurement accuracyForce measurementDiagnostic recording/measuringPhysicsIon
The invention provides a Gel capacitance sensor and method for measuring plantar pressure and dynamic change. The sensor comprises an insulating medium. Two ion gel arrays are pasted to the upper and lower surfaces of the insulating medium. A capacitor is formed by ion gel, the insulating medium, and ion gel. A layer of insulating medium is respectively pasted to the upper and lower surfaces of each of the ion gel arrays. Metal electrodes are pasted to the connection parts of the ion gel and the insulating mediums. An electron-ion gel mixed current loop is formed by the metal electrodes and the ion gel. A button battery, a control acquisition module and a Bluetooth module are integrated on a circuit board, the metal electrodes are connected through wires, and the button battery supplies power to the ion gel. When the surface pressure and period of the sensor are changed, a measurement signal is transmitted to the Bluetooth module, then a signal is sent to a mobile phone, and a mobile phone program carries out calculation to obtain plantar pressure distribution and change data with time. The gel material used by the capacitance sensor has the advantages of softness, transparency, small weight and thickness, easy processing, accurate measurement, low cost, and wide application.
Owner:XI AN JIAOTONG UNIV

Gel thin film array capacitor sensor and method for measuring total teeth dynamic occluding

The invention discloses a gel thin film array capacitor sensor and method for measuring total teeth dynamic occluding. A layer of ion gel as an electrode is pasted to upper and lower surfaces of an insulation medium respectively, and the upper ion gel is distributed in rows, the low ion gel is distributed in columns and the insulation medium is projected to the middle, the three are partially coincided to form a capacitor array; a layer of insulation medium is pasted to each of the upper and lower surfaces to avoid influence of an external stray capacitance, a row column scanning method is used to obtain capacitor signals at different sensing points to obtain a contacting sequence of each pair of teeth, occluding force during contacting and change along with time in all teeth occluding, the capacitor sensor has high precision and high flexibility, a high resolution means that slight force change can be measured, a new gel material is used to ensure accurate measuring of the dynamic occluding process under the condition of restoring the actual tooth occluding, and the material has good repeated measuring precision, and due to high transparency, the sensor can observe tooth change while transmitting an electric signal.
Owner:XI AN JIAOTONG UNIV

Grating measurement device

The invention discloses a grating measurement device. The device includes a light source module used for generating two light beams having different frequencies, wherein one of the two light beams acts as a measurement light beam while the other acts as a reference light beam; a grating and a grating measurement probe including a double-frequency incidence module, a vertical measurement module, avertical detection module and a reference detection module. The double-frequency incidence module receives the measurement light beam and the reference light beam. The vertical measurement module casts the measurement light beam onto the grating, collects zero-level diffraction light of diffraction light subjected to secondary diffraction of the grating and casts the zero-level diffraction light to the vertical detection module. Interference of the zero-level diffraction light beam and the reference light beam occurs in the vertical detection module and vertical interference signals are formed. Interference of the measurement light beam and the reference light beam occurs in the reference detection module and reference interference signals are formed. A signal processing module calculatesvertical displacement of the grating after receiving the vertical interference signals and the reference interference signals. According to the invention, large-range vertical displacement measurementcan be realized in any working distance.
Owner:SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD

Method and device for processing pulse wave signal and electronic blood pressure measuring device

The invention relates to a method and a device for processing pulse wave signals and an electronic blood pressure measuring device. The pulse wave signal processing method comprises receiving pulse wave signals from a pressure sensor, and obtaining a plurality of pulse wave signal samples; and minimizing the whole noise in the pulse wave signal samples to de-noise the pulse wave signals. The pulse wave signal processing method comprises more particularly the steps of performing standardization treatment to give a value not greater than 1 for the pulse wave signal samples; setting initial gamma distribution parameters; performing the standardization treatment on gamma distribution values corresponding to the pulse wave signal samples; based on standardized sample values and standardized gamma distribution values, calculating sample noise values to evaluate the whole noise; judging if a ratio of the whole noise obtained by iteration for the current time to the whole noise obtained by iteration at last time is converged; and based on the convergence, judging corrected gamma distribution parameters; repeating the steps from the step of performing standardization treatment on the gammadistribution values to the step of correcting the parameters until judging that the whole noise is converged, and obtaining the optimized gamma distribution parameters for determining a pulse wave peak envelope curve of the minimized whole noise.
Owner:SHANGHAI AIKANGFEI MEDICAL INSTR TECH

Novel gel film capacitive sensor for measuring full-mouth tooth occlusal force and method thereof

The invention relates to a novel gel film capacitive sensor for measuring the full-mouth tooth occlusal force and a method thereof. Each of the upper and lower surfaces of the insulating medium is pasted with a layer of ionic gel serving as electrolyte, two kinds of materials are soft and transparent, ionic gel is pasted on several points to form several capacitors which can change along with the occlusal force, the capacitors are connected in parallel, a layer of insulating medium is pasted on the upper surfaces of the capacitors, and a layer of insulating medium is pasted on the lower surfaces of the capacitors, influence of external parasitic capacitors is avoided, buses are connected to an acquisition card , and the total capacitance value under the action of full-mouth tooth occlusal force can be obtained, and therefore the full-mouth tooth occlusal force can be measured; the capacitive sensor resultant force measuring device can obtain the full-mouth tooth occlusal force by means of a simple parallel circuit, but a piezoresistive resultant force measuring device only can measure a single circuit, and cannot measure the cumulative sum, by employing the novel gel material, the tooth occlusion case can be simulated as real as possible to obtain the full-mouth tooth occlusal force, and the novel gel material has good repeated measurement precision, and is low in cost and easy to process, and is disposable, clean and sanitary.
Owner:XI AN JIAOTONG UNIV

Method and system for detecting dynamic lift range of gag bit of common-rail oil injector

The invention provides a method and a system for detecting a dynamic lift range of a gag bit of a common-rail oil injector and relates to the technical field of monitoring. The method comprises the following steps: S1) driving a displacement sensor and a detecting needle to detect an end face of the gag bit of a detected common-rail oil injector by controlling the motion of a driving device through an industrial personal computer; S2) controlling a sensing device to stop running by the industrial personal computer according to a trigger signal sent by the displacement sensor while sending a preset pulse width to an ECU (Electronic Control Unit) by the industrial personal computer, and controlling a high-low pressure driver to electrify the detected common-rail oil injector by the ECU according to the preset pulse width, when the end face of the gag bit is detected by the detecting needle; S3) collecting the displacement of the detected common-rail oil injector in real time by the displacement sensor according to a contact measuring mode of the detecting needle; S4) acquiring the lift range of the gag bit by the industrial personal computer according to the displacement, thereby finishing the detection. According to the method provided by the invention, the detection is performed under a dynamic state, so that the practical running working condition of the gag bit is met and the accuracy is high; the accuracy is higher due to the contact type detection of the detecting needle; the repeated detecting precision is high.
Owner:BORUN HONGDA (TIANJIN) TECH DEV CO LTD

Fixture for ensuring accuracy of tests on chip-type ultra-low resistance product

The invention discloses a fixture for ensuring accuracy of tests on chip-type ultra-low resistance product. The fixture comprises a base, the base is provided with a limit station and a bearing platform arranged side by side with the limit station, and the limit station is provided with the bearing platform of the same size with the limit station. The bearing platform is hollow, one side of the bearing platform is provided with upper and lower stop bolts, and the interior is provided with a spring. The top end of the bearing platform is provided with a connecting arm. One end of the connecting arm extends into the bearing platform and is connected with the bearing platform, and the other end of the connecting arm is provided with a probe carrying sheet. One side of the probe carrying sheet is provided with a four-wire probe. The fixture for ensuring accuracy of tests on chip-type ultra-low resistance product avoids the test inaccuracy caused by human factors such as test habits, intensity, and test point locations.
Owner:CHINA ZHENHUA GRP YUNKE ELECTRONICS

Ligament stiffness robot in-situ measuring system and method during anterior cruciate ligament reconstruction surgery

The invention discloses a ligament stiffness robot in-situ measuring system and method during an anterior cruciate ligament reconstruction surgery. The ligament stiffness robot in-situ measuring system includes a universal six-freedom-degree mechanical arm and an anterior cruciate ligament stiffness measuring device, and on the basis of transformation of space coordinates, the anterior cruciate ligament stiffness measuring device at the tail end of a robot interacts with a reconstructed anterior cruciate ligament in a leg of a patient in real time and laterally measures the stiffness of the reconstructed anterior cruciate ligament. In the past, ligament stiffness measurement is manually conducted by a doctor, and thus certain uncertainties exist. The ligament stiffness robot in-situ measuring system simplifies measurement difficulties for the doctor during the anterior cruciate ligament reconstruction surgery and assists the doctor in surgery operation, human interference factors are reduced, the surgery quality is improved, and implementation and popularization of precision medicine are facilitated.
Owner:SHANGHAI UNIV +1

Method for positioning reading position for detecting radial pressure of piston ring

A method for positioning a reading position in radial pressure detection of piston ring includes carrying out said detection repeatedly till accurate value is obtained in order to decrease error caused by deformation of strain window to raise detection accuracy. In said method, reading position is position that radial pressure value is changed from small to big and then changed to small again in following course of moving piston ring downwards, the moving height is decreased in following increase of moving frequency for raising operation efficiency.
Owner:SOUTHEAST UNIV

Pneumatic clamp mechanism of vertical type balancing machine

The invention discloses a pneumatic clamp mechanism of a vertical type balancing machine. The pneumatic clamp mechanism comprises an operation panel, an air power switch, a duplex solenoid valve, a front swing frame, a rear swing frame and a motor fixation frame, wherein the motor fixation frame is provided with a servo motor, the power shaft of the servo motor is connected with a motor belt pulley, the motor belt pulley is connected with a main shaft belt pulley arranged on a main shaft through a synchronization belt, the main shaft is internally provided with an airway, the tail end of the lower portion of the main shaft is connected with a swivel joint, the air power switch and the duplex solenoid value are connected through an air pipe, the swivel joint is connected with the air pipe, the airway communicates with the air pipe, the upper end of the main shaft is provided with an expansion clamp and a front cylinder, and a reed plate is installed between the front swing frame and the rear swing frame. The structural design is ingenious, the automation degree is high, the performance is stable and reliable, the work efficiency is high, and the application is convenient.
Owner:FOSHAN HUASHUN MOTOR INDUSTRIAL CO LTD

Rod length and cavity bottom thickness measuring machine of constant-speed universal joint

The invention provides a rod length and cavity bottom thickness measuring machine of a constant-speed universal joint, and aims at solving the technical problems that measurement of the constant-speeduniversal joint has large errors and is inconvenient to operate in the prior art. According to the measuring machine, a measuring core rod and a thickness measuring mechanism is arranged on a pedestal, a length measuring mechanism is arranged on the thickness measuring mechanism, and a display displays parameters measured by the thickness measuring mechanism and the length measuring mechanism. Compared with measurement via a vernier caliper, the measuring efficiency is higher, the length and thickness are measured automatically by the measuring machine, errors caused by manual measurement canbe avoided, and the measuring precision of a workpiece is improved greatly.
Owner:ZHEJIANG ODM TRANSMISSION TECH

Duplicate gear tooth surface angle detection equipment and using method thereof

The invention discloses duplicate gear tooth surface angle detection equipment. The equipment comprises a detection part and an installation part. The detection part comprises a guide seat and detection mechanisms respectively located at the upper portion and the lower portion of the guide seat, installation holes for installing the detection mechanisms are formed in the upper portion and the lower portion of the guide seat, the detection mechanisms comprise pin shafts, measuring heads, sliding blocks and dial indicators, the sliding blocks are located in the installation holes and can move relative to the installation holes, the measuring heads are hinged to the sliding blocks through the pin shafts, the contact ends of the measuring heads are in contact with the tooth surface of a duplicate gear, and the probes of the dial indicators abut against the outer walls of the other ends of the measuring heads. The installation part comprises an extrusion part, liquid plastic and a positioning shaft, a liquid plastic cavity used for containing the liquid plastic is formed in the positioning shaft, and the extrusion part is adjusted to extrude the liquid plastic, so that the positioning shaft deforms and tensions the duplicate gear. The equipment is high in measurement precision.
Owner:ZHONGNAN TRANSMISSION MACHINERY FACTORY CHANGSHAAVIATION IND

Universal probe assembly

The invention belongs to the technical field of inspection fixtures, and relates to a universal probe assembly which comprises a mounting base. A measuring rod guide sleeve is arranged at the upper part of an inner hole of the mounting base. A measuring rod is slidably arranged in an inner hole of the measuring rod guide sleeve in a matched manner. The measuring rod is sleeved by a spring. The upper end of the spring abuts against a radial boss on the surface of the measuring rod. The upper surface of the radial boss is limited by the step counterbore hole of the inner hole of the measuring rod guide sleeve. The end face, which extends into the inner hole of the mounting base, of the measuring rod guide sleeve is fixed with a locking nut. The lower end of the spring presses the locking nut. A connection seat is fixed at the lower part of the inner hole of the mounting base. A sensor is arranged in an inner hole of the connection seat in a matched manner. The upper end of the sensor abuts against the lower end of the measuring rod. The sensor is limited on the connection seat through a sensor locking assembly. The product provided by the invention can be applied to various types ofdevices which need to be measured by the sensor; the repeated measurement accuracy is high; the sensor is effectively protected, and can be prevented from being scrapped due to collision during use; and the use cost is reduced.
Owner:WUXI TEHENG TECH CO LTD

A symmetrical grating heterodyne interference secondary diffraction measurement device

Disclosed is a symmetric-type grating heterodyne interference secondary diffraction measuring device. The device mainly comprises a laser device, a 1 / 4 wave plate, a light splitting system, a photoelectric conversion system, a polarizing light splitter, a reflector, a grating and the like. Double-frequency lasers emitted by the laser device enter the light splitting system after passing the 1 / 4 wave plate to be divided into three branches, one branch enters the reference photoelectric conversion system, the other two branches enter the positive-negative measuring light path polarizing light splitter, reflected light s is irradiated onto the grating by an incident angle set according to corresponding diffraction grades, occurs interference with light p on a polarizing light splitting face after secondary diffraction and enters the measuring light path photoelectric conversion system. When the grating moves, two signals containing displacement information are detected by the measuring light path photoelectric conversion system, and grading level and vertical displacement can be acquired by solving through the two signals. Whether measured light can return along an original path after secondary diffraction or not only depends on the incident angle and has nothing to do with grating displacement, so that the symmetric-type grating heterodyne interference secondary diffraction measuring device can realize horizontal long stroke and vertical displacement measuring.
Owner:TSINGHUA UNIV +1

Dual frequency grating measuring device

The invention discloses a dual-frequency grating measuring device, which comprises a light source module, a grating, a first detector, a second detector and a grating measuring probe, wherein the light source module is used for generating two light beams with different frequencies; and the grating measuring probe is connected with the light source module and the detectors, the grating measuring probe receives the two light beams from the light source module and performs light splitting on the two light beams, one part of two light beams is enabled to parallelly shoot to the grating and be transmitted to the first detector after being subjected to diffraction of the grating, and the other part is transmitted to the second detector. The dual-frequency grating measuring device has the characteristics of high anti-interference ability, high measurement precision, high repeated measurement precision, ability of being free of nonlinear error influences, simple structure and convenient installation and use, and is extremely applicable to the field of picometer precision two-dimensional measurement with high stability requirements.
Owner:SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD

Method for positioning reading position for detecting radial pressure of piston ring

A method for positioning a reading position in radial pressure detection of piston ring includes carrying out said detection repeatedly till accurate value is obtained in order to decrease error caused by deformation of strain window to raise detection accuracy. In said method, reading position is position that radial pressure value is changed from small to big and then changed to small again in following course of moving piston ring downwards, the moving height is decreased in following increase of moving frequency for raising operation efficiency.
Owner:SOUTHEAST UNIV

A method for measuring the outer circumference length and the maximum and minimum diameters of a cylindrical workpiece

The invention relates to a method for measuring the outer circumference and maximum and minimum diameters of a cylindrical workpiece. The method comprises the following steps of: measuring device preparation; and data measuring and recording. According to the measuring device preparation step, a laser displacement sensor is adopted; and the laser displacement sensor rotates around a to-be-measuredcylindrical workpiece or the to-be-measured cylindrical workpiece rotates around the center axis of the to-be-measured cylindrical workpiece and the laser displacement sensor is stationary. Accordingto the data measuring and recording step, M measuring points are selected from the to-be-measured cylindrical workpiece; measurement is initiated; with every four points taken as a group, the measurement data of every four points are fitted into a circle according to a certain rule; the sum of the arc lengths of two diagonal short arcs is calculated, so that the diameter and arc length of the four-point group is obtained; and the arc lengths of all the four-point groups are added, so that a required perimeter can be obtained; and a maximum value and a minimum value are found out from the diameters of all the four-point groups, so that a required maximum diameter and a required minimum diameter can be obtained. With the method of the invention adopted, the precision and stability of perimeter measurement are improved; and requirements for the roundness of a workpiece and the centering degree of the installation of the workpiece are greatly lowered. The method has a high engineering application value.
Owner:SHANGHAI RO INTELLIGENT SYST

A Measuring Machine for Rod Length and Cavity Bottom Thickness of Constant Velocity Universal Joint

The invention provides a rod length and cavity bottom thickness measuring machine of a constant-speed universal joint, and aims at solving the technical problems that measurement of the constant-speeduniversal joint has large errors and is inconvenient to operate in the prior art. According to the measuring machine, a measuring core rod and a thickness measuring mechanism is arranged on a pedestal, a length measuring mechanism is arranged on the thickness measuring mechanism, and a display displays parameters measured by the thickness measuring mechanism and the length measuring mechanism. Compared with measurement via a vernier caliper, the measuring efficiency is higher, the length and thickness are measured automatically by the measuring machine, errors caused by manual measurement canbe avoided, and the measuring precision of a workpiece is improved greatly.
Owner:ZHEJIANG ODM TRANSMISSION TECH

Novel gel thin-film capacitive sensor and method for measuring occlusal force of full-mouth teeth

A new type of gel film capacitive sensor and method for measuring the occlusal force of full mouth teeth. The upper and lower surfaces of the insulating medium are each pasted with a layer of ion gel as an electrolyte. These two substances are soft and transparent and pasted at several points Ion gel forms several capacitors that can change with the bite force, connect these capacitors in parallel, and paste a layer of insulating medium on the upper and lower surfaces to avoid the influence of external parasitic capacitance, and connect to the acquisition card through the bus to obtain the full bite force The total capacitance value under the action can measure the occlusal force of the whole mouth teeth; the capacitive sensor resultant force measurement device can obtain the full-mouth occlusal force by using a simple parallel circuit, while the piezoresistive force measurement device can only measure one way and cannot complete The measurement of the cumulative sum adopts a new type of gel material to ensure that the occlusal force of the whole mouth can be obtained under the condition of restoring the occlusal teeth as much as possible, and the material has good repeatability measurement accuracy, low cost, easy processing, disposable use, clean and hygienic .
Owner:XI AN JIAOTONG UNIV

Automobile door lock riveting point height measuring system and method based on displacement sensor

The invention discloses an automobile door lock riveting point height measuring system and method based on a displacement sensor, and belongs to the technical field of automatic measurement. The system comprises an air cylinder, a programmable sequence control card, a displacement sensor, a data acquisition card and an industrial computer. The programmable sequence control card is used for controlling the air cylinder to push the displacement sensor to make contact with an automobile door lock. The displacement sensor is used for outputting a displacement value between the automobile door lock and the displacement sensor as an analog quantity signal. The data acquisition card is used for converting the analog quantity signal output by the displacement sensor into a voltage digital quantity signal. The industrial computer is used for processing the voltage digital quantity signal converted by the data acquisition card to judge whether the riveting point of the automobile door lock is qualified or not and displaying a judgment result. The system and the method are high in detection speed, have good repeated measurement precision, avoid personal errors caused by manual measurement, and are high in operation efficiency, strong in anti-interference capability and high in accuracy.
Owner:JIANGNAN UNIV

Full-featured airtight tester

The invention relates to a full-functional air-tightness tester. The full-functional air-tightness tester mainly comprises a main control system, a display terminal assembly, an input assembly, an output assembly, a communication assembly and an air path detection assembly, wherein the main control system is respectively and electrically connected with the display terminal assembly, the input assembly, the output assembly and the communication assembly; the air path detection assembly is sequentially connected with an oil fog separator, a precise pressure adjusting valve, a precise filtering device, a first pressure sensor, a first solenoid valve, a second pressure sensor and a flow sensor from an air source to a detected product by pipelines according to an air flowing direction. The full-functional air-tightness tester has the advantages that the tester has the function of detecting a pressure difference and a flow in a time division manner, and adopts a method of utilizing the independent pressure sensors to measure pressure values in the time division manner so as to calculate the pressure; a testing result is not influenced by other devices and has the better precision; and a direct testing method is used for measuring a flow tester, the testing result is very accurate, the repeated measurement precision is very high, the testing speed is fast and the service life is long.
Owner:王亚伦

A grating heterodyne interference self-collimation measuring device

A grating heterodyne interference auto-collimation measuring device mainly comprises a two-frequency laser, a 1 / 4 wave plate, a beam splitting system, a photoelectric conversion system, a polarization beam splitter, a reflector and a grating. The two-frequency laser emits two-frequency laser which passes the 1 / 4 wave plate and which then turns into two mutually-perpendicular linearly-polarized beams. The beams entering the beam splitting system are divided into three beams; one beam enters a reference light path photoelectric conversion system; last two enter a positive-negative gage beam polarization beam splitter. In the laser entering the polarization beam splitter, a reflected beam S is reflected to the grating by the reflector, and an incident angle is set into an auto-collimation angle of the corresponding diffraction order; through reference light information, horizontal and vertical displacements of the grating can be known. The auto-collimation right angle is set not depending on grating displacements. Therefore, the grating heterodyne interference auto-collimation measuring device is applicable to measuring horizontal large-travel displacement and vertical displacement.
Owner:TSINGHUA UNIV +1
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