Grating heterodyne interference auto-collimation measuring device

A measuring device, a technology of heterodyne interference, applied in the direction of measuring devices, optical devices, instruments, etc., to achieve the effect of high repeated measurement accuracy and convenient adjustment

Active Publication Date: 2014-03-26
TSINGHUA UNIV +1
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  • Abstract
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  • Application Information

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Problems solved by technology

The device can effectively overcome the defects that the laser interferometer measurement system is greatly affected by the environment, and has great application prospects in the field of ultra-precision motion platform measurement

Method used

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  • Grating heterodyne interference auto-collimation measuring device
  • Grating heterodyne interference auto-collimation measuring device
  • Grating heterodyne interference auto-collimation measuring device

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Embodiment

[0045] Taking m=1 as an example, implement the device and method of the present invention.

[0046] refer to figure 1 , demonstrating the entire measurement process of the grating heterodyne interferometric autocollimation measurement. The measuring device includes a laser 1, a 1 / 4 wave plate 2, a spectroscopic system 3, a reference arm photoelectric conversion system 4, a negative 1-level measuring arm polarization beam splitter 5, a negative 1-level measuring arm first 1 / 4 wave plate 6, Negative 1st stage measuring arm first reflector 7, negative 1st stage measuring arm second 1 / 4 wave plate 8, negative 1st stage measuring arm second mirror 9, positive 1st stage measuring arm polarization beam splitter 10, positive 1st stage measurement Arm first 1 / 4 wave plate 11, positive 1st stage measuring arm first reflector 12, positive 1st stage measuring arm second 1 / 4 wave plate 13, positive 1st stage measuring arm second reflector 14, grating 15, negative Level 1 measuring arm ph...

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Abstract

A grating heterodyne interference auto-collimation measuring device mainly comprises a two-frequency laser, a 1/4 wave plate, a beam splitting system, a photoelectric conversion system, a polarization beam splitter, a reflector and a grating. The two-frequency laser emits two-frequency laser which passes the 1/4 wave plate and which then turns into two mutually-perpendicular linearly-polarized beams. The beams entering the beam splitting system are divided into three beams; one beam enters a reference light path photoelectric conversion system; last two enter a positive-negative gage beam polarization beam splitter. In the laser entering the polarization beam splitter, a reflected beam S is reflected to the grating by the reflector, and an incident angle is set into an auto-collimation angle of the corresponding diffraction order; through reference light information, horizontal and vertical displacements of the grating can be known. The auto-collimation right angle is set not depending on grating displacements. Therefore, the grating heterodyne interference auto-collimation measuring device is applicable to measuring horizontal large-travel displacement and vertical displacement.

Description

technical field [0001] The invention relates to a grating measurement device, in particular to a grating heterodyne interference self-collimation measurement device. Background technique [0002] A grating is an instrument that measures the distance between the grating lines. According to the principle of forming Moiré fringes, it can be divided into geometric grating (amplitude grating) and diffraction grating (phase grating). Micron-level and sub-micron-level grating measurements use geometrical gratings. The grating pitch is 100 μm to 20 μm, which is much larger than the light wavelength of the light source. The diffraction phenomenon can be ignored. When the two gratings move relative to each other, a low-frequency beat phenomenon is generated to form Moiré fringes. The measurement principle is called the image principle. Nano-scale grating measurement uses a diffraction grating. At present, the grating pitch is 8 μm or 4 μm. The width of the grating line is very close...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/02
Inventor 朱煜胡金春陈龙敏成荣高阵雨杨开明
Owner TSINGHUA UNIV
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