Method for extending focal depth based on amplitude modulation, polarization and phase modulation and device thereof

An expansion method and polarization technology, applied in the field of focusing methods and devices for expanding the depth of focus, can solve the problems of sacrificing lateral resolution, etc., and achieve the effects of saving system costs, uniform light intensity distribution, and reducing the number of light sources

Inactive Publication Date: 2012-05-23
ZHEJIANG UNIV
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Problems solved by technology

The above methods have conducted extensive and in-depth research on the optical axial expansion of the focal depth, but most of the above methods extend the focal depth at the expense of lateral resolution

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  • Method for extending focal depth based on amplitude modulation, polarization and phase modulation and device thereof
  • Method for extending focal depth based on amplitude modulation, polarization and phase modulation and device thereof
  • Method for extending focal depth based on amplitude modulation, polarization and phase modulation and device thereof

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Embodiment Construction

[0042] The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments, but the present invention is not limited thereto.

[0043] Such as figure 1 The shown device for realizing focal depth extension includes: a light source for generating a working beam 10, an annular diaphragm 1, a beam splitter 2, a 0 / π phase plate 3, a beam combiner 4, and a first reflector 5 , the second reflector 6, the apochromatic focusing lens 7, the extended depth of focus spot obtained after focusing appears near the working plane 8 of the apochromatic focusing lens 7.

[0044] The working beam 10 is Bessel-Gauss radially polarized light, the energy of the center of the spot is small, and the energy of the periphery is large, which is converted by a polarization converter.

[0045] The polarization direction of each point of radially polarized light is along the radial direction, and all polarization directions constitute a divergent beam. Whe...

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Abstract

The invention discloses a method for extending focal depth, including that: Bessel-Gauss radial polarized light passes through an annular diaphragm, so as to modulate amplitude and split the light into two light beams; one light beam is subject to 0-Phi phase coding and then are incident into the same optical beam combining device with the other light beam after optical reflex, so as to form a combined coaxial light beam, and then lens focusing is carried out, thus obtaining the extended focal depth spot. The invention also discloses a device for extending focal depth, comprising a light source generating Bessel-Gauss radial polarized light, an annular diaphragm, a beam splitter, a 0 / Phi phase plate, an optical reflex device, an optical beam combining device and an apochromatism focusing lens. In the method and device, Bessel-Gauss laser is taken as a work light beam, the focal depth of extended focal spot is more than 8lambda, the focal spot can be less than diffraction limit of system, and light distribution after extending is more uniform, thus being more beneficial to practical application.

Description

technical field [0001] The invention relates to the fields of photolithography, optical storage and tomographic imaging, in particular to a focusing method and device for extending the focal depth. Background technique [0002] Research on extended focal depth in optical disk storage, microscope imaging, optical calibration, and tomographic imaging has been carried out one after another. Among them, Wavefront Coding (WFC) is a new method for extending the focal depth of optical systems that was developed in the 1990s. technology, proposed by Dowski and Cathey in 1995. In recent years, research on obtaining extended depth of focus through polarization effects has also attracted attention. Recently, researches on the use of radial vector beams, quasi-bifocal birefringent lenses, and cemented double lenses to achieve extended depth of focus have been reported. The above methods have carried out extensive and in-depth research on the optical axial extension of the focal depth, ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B27/00G02B27/28G02B5/00G02B5/30
Inventor 匡翠方库玉龙郝翔刘旭王婷婷
Owner ZHEJIANG UNIV
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