X-ray position measuring device, position measuring method of the device, and program for measuring the position of the device

Abstract

The invention provides an X-ray position measuring device capable of realizing high-precision position measurement without increasing the cost. The X-ray position measuring device 10 includes a first moving unit that moves the X-ray emitter 10a and the X-ray camera 10b to a position where the position measurement is performed on the measurement object; Measure the positional offset between the reference position and the position of the second X-ray projection image, and store the positional offset as a correction amount corresponding to the measurement position in the first measurement storage unit of the storage unit; The 2nd moving unit that X-ray emitter 10a and X-ray camera 10b move to the position that carries out position measurement; And the position that is used for carrying out position measurement, make the emission center of X-ray emitter 10a and X-ray according to the correction amount The optical axis of the camera 10b coincides with the first position measurement unit that simultaneously measures the position of the measurement object.

Description

Technical field [0001] The present invention relates to an X-ray position measuring device, a position measuring method of the X-ray position measuring device, and a program for position measurement of the X-ray position measuring device. Background technique [0002] Use an X-ray position measuring device equipped with an X-ray emitter and an X-ray camera to measure the position of the positioning marks placed on each layer constituting the multilayer printed circuit board (laminated substrate), and to grasp the accurate relative position of each layer Position measurement. [0003] In order to accurately measure the position of the positioning mark of this kind of X-ray position measuring device, the emission center of the X-ray transmitter must be aligned with the optical axis of the X-ray camera. [0004] The old X-ray emitter and X-ray camera are integrated with the X-ray emitter and X-ray camera at the front end of a pair of U-shaped frames, and the X-ray emitter and X-ray cam...

AI Technical Summary

Problems solved by technology

Therefore, if a large multilayer printed circuit board is used, the U-shaped frame must be sufficiently large, which tends to increase the size of the entire X-ray position measuring device.

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