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40results about How to "Achieving Measurement Accuracy" patented technology

Workpiece platform system of photoetching machine

The invention discloses a workpiece platform system of a photoetching machine. The workpiece platform system comprises a rack, a base platform, two silicon-chip platforms, a measuring grating, a dual-frequency laser, three-freedom-degree heterodyne grating interferometers and a signal receiving and processing part, wherein the two silicon-chip platforms operate at an exposure station and a preprocessing station; the four corners of each silicon-chip platform are provided with one three-freedom-degree heterodyne grating interferometer respectively, and the measuring grating is arranged on the rack above the silicon-chip platform. Dual-frequency orthogonal-polarization laser emitted by the dual-frequency laser is transmitted to the three-freedom-degree heterodyne grating interferometers and the measuring grating by optical fiber, four beams of diffraction light of the measuring grating irradiate back to the three-freedom-degree heterodyne grating interferometers, and finally the four beams of measuring light signals are emitted to the signal receiving and processing part. When the silicon-chip platforms move relatively to the measuring grating, the reading in the signal receiving and processing part is utilized for acquiring six-freedom displacement of the silicon-chip platforms by calculation. The workpiece platform system disclosed by the invention has the advantages that the indexes such as measuring accuracy and dynamic performance of the silicon-chip platforms can be improved, and further the whole performance of the workpiece platform system is further improved.
Owner:TSINGHUA UNIV +1

Wearable digital pulse diagnosis instrument

The invention relates to a wearable digital pulse diagnosis instrument comprising three paths of pulse feeling assemblies and a processing device, each path of pulse feeling assembly comprises a micro pump, a micro valve, an air bag, an air pressure sensor and a pulse sensor, and the processing device is connected with the micro pump, the micro valve, the air pressure sensor and the pulse sensor of each path of pulse feeling assembly. The micro pumps, the micro valves and the air pressure sensors of all the pulse feeling assemblies are communicated with the air bags, the pulse sensors are fixed to the air bags, the air bags of all the pulse feeling assemblies are used for being worn on different parts of the wrist in the length direction, all the micro pumps inflate all the air bags, and the pulse sensors are pressed on the wrist through the air bags. The air pressure sensors feed back the pressure levels to the processing device in real time, the processing device controls and adjusts the pressure by controlling the micro pumps and the micro valves according to the feedback, and the pulse of each path is measured through each pulse sensor. According to the pulse diagnosis instrument, independent controllable pressurization and independent pulse measurement of Cun, Guan and Chi can be achieved at the same time, digital pulse diagnosis is achieved, and the instrument is small in size and wearable.
Owner:SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV

Measuring device for measuring magnetic properties of surroundings of measuring device

ActiveCN103814399ASensitive authenticationFull verificationMagnetic measurementsPaper-money testing devicesOrthogonal coordinatesMeasurement device
The invention relates to a measuring device for measuring the magnetic properties of the surroundings of the measuring device by means of a sensor line having at least one magnetoresistive sensor element extending in a line direction, which can measure the magnetic properties in the surroundings thereof, wherein the sensor element has a width and a length as well as a height, wherein the height is smaller than the width, and the height is smaller than the length, and the line direction points in the direction of the width or in the direction of the length of the sensor element, and having a support field device which generates a magnetic support field in the area over which the sensor line extends, having a premagnetization device which comprises a premagnetization magnet or several premagnetization magnets, wherein at least one premagnetization magnet is arranged in a direction which is perpendicular to the line direction, spaced from the sensor line, and extends in a direction parallel to the line direction, characterized in that magnetoresistive sensor element can measure the magnetic properties of the surroundings thereof substantially in only one direction, referred to as the measurement direction, of an orthogonal coordinate system, or substantially in only one plane, referred to as the sensor measurement plane, which is defined by two perpendicular measurement directions of an orthogonal coordinate system, in that, in the case of a premagnetization device which consists of only one premagnetization magnet, the properties of the premagnetization magnet, which influence the magnetic field generated by said magnet and the arrangement of said magnet relative to the sensor cell as well as the support field generated by the support field device are selected in such a manner that an overlap magnetic field forms due to the overlap of the magnetic field generated by the premagnetization device and of the support field, wherein the strength of the field component of said overlap magnetic field, which points in the line direction is, at least at one site on the sensor line, greater than the strength of the field component which is perpendicular to the line direction and does not point in the direction of the height of the sensor element, or in the case of a premagnetization device consisting of several premagnetization magnets, the properties of the premagnetization magnet, which influence the magnetic field generated by said magnets, and the arrangement of the premagnetization magnets relative to the sensor cell as well as the support field generated by the support field device are selected in such a manner that an overlap magnetic field forms due to the overlap of the magnetic field generated by the premagnetization device and of the support field, wherein the strength of the field component of said overlap magnetic field, which points in the line direction is, at least at one site on the sensor line, greater than the strength of the field component which is perpendicular to the line direction and does not point in the direction of the height of the sensor element.
Owner:精量电子(德国)公司

Multi-wireless link joint calculating spread spectrum measurement and control equipment zero value method

The invention discloses a multi-wireless link joint calculating spread spectrum measurement and control equipment zero value method, and aims to provide a high-precision spread spectrum measurement and control equipment zero value calibration method. According to the technical scheme, the multi-wireless link joint calculating spread spectrum measurement and control equipment zero value method comprises the steps that the distance between the ground measurement and control equipment antenna phase center and the satellite responder antenna phase center, the distance between the ground measurement and control equipment phase center and the zero calibration spectrum changing equipment antenna phase center and the distance between the satellite responder antenna phase center and the zero calibration spectrum changing equipment antenna phase center are separately measured through geodetic measurement equipment; the spread spectrum distance measurement among three wireless links of ground measurement and control equipment and a responder, the ground measurement and control equipment and zero calibration spectrum changing equipment and the responder and the zero calibration spectrum changing equipment are separately completed; and an observation equation of three distance measurement is constructed according to the spread spectrum distance measurement among three wireless links, and ahigh-precision equipment zero value of the spread spectrum distance measurement is obtained by using the observation equation of the three distance measurement to jointly calculate a ground measurement and control equipment zero value, a zero calibration spectrum changing equipment zero value and a responder zero value.
Owner:10TH RES INST OF CETC

Step gauge calibration method and system capable of eliminating abbe errors based on laser interference

The invention mainly relates to the technical field of length measurement. The invention provides a step gauge calibration system capable of eliminating abbe errors based on laser interference. The systemcomprises three laser interference light paths which can form any triangular prism shape in space, and afourth laser interference light path which is arranged in the space, is parallel to the three laser interference light paths and is used for wavelength compensation; one part of laser beams emitted by the laser passes through the spectroscope and then is reflected to the interference mirroras reference signals; one part is projected to the reflector to be reflected and then enters the interference mirror to form a measurement signal; when the measured step gauge is displaced, the displacement value of the measured step gauge without the abbe error is calculated through the measurement signal and the reference signal according to the measurement model; three laser light paths are combined to a measurement model on a measurement line of the step gauge to be measured, and no matter where the step gauge is installed on a measurement platform of a coordinate measuring machine, the measurement accuracy of the laser interference method step gauge based on the abbe principle can be achieved very conveniently.
Owner:NAT INST OF METROLOGY CHINA

Balancing angle adjusting device for horizontal tail

The invention relates to a balancing angle adjusting device for a horizontal tail. The balancing angle adjusting device for the horizontal tail comprises a first scale, first uniform scales and a first attachment structure, wherein the first uniform scales are circumferentially arranged on the first scale; the first attachment structure is suitable for being attached to a horizontal tail box section of the horizontal tail; and a second scale, a second uniform scale circumferentially arranged on the second scale, and a second attachment structure adapted to be attached to the elevator of the horizontal tail, and wherein an indexing value of the first uniform scale is not equal to an indexing value of the second uniform scale. The angle adjusting device can adjust a series of deflection angles of the elevator so as to determine the initial attitude of the horizontal tail, thereby researching the stability of the whole structure of the aircraft under the action of dynamic load. The angle adjusting device is simple in structure and easy to operate, facilitates quick reloading of a model test and can quickly and accurately obtain the deflection angle of the elevator, the accuracy of the angle adjusting device can meet the test requirement, and the expected invention purpose is achieved.
Owner:COMAC +1

Space scanning system and method of combining adjustable laser ranging probe array and intelligent terminal

The invention discloses a space scanning system and method of combining an adjustable laser ranging probe array and an intelligent terminal. The system comprises a distance collection subsystem, an angle control subsystem and a control management subsystem, wherein the distance collection subsystem comprises a probe array formed by adjustable laser ranging probes; the probe array is arranged on a support plate; each adjustable laser ranging probe swings left and right and back and forth to expand the scanning range of the probe array; the angle control subsystem is used for adjusting the directions of the adjustable laser ranging probes, so that the probe array is aligned at a calibration direction and is matched with the distance collection subsystem to complete scanning locating operation; and the control management subsystem is connected with the distance collection subsystem and the angle control subsystem separately, is used for displaying the measurement distance and the deviation angle, calculating, recording and sharing scanning coordinate data. According to the space scanning system and method, a simple logic and multi-probe measurement are utilized, so that the large-range measurement requirements can be met on the premise of ensuring the measurement accuracy.
Owner:赵怡

High-precision dynamic pressure measurement method and system with long-term stability

The invention discloses a high-precision dynamic pressure measurement method and system with long-term stability. The system comprises a wide-range differential pressure sensor and a small-range differential pressure sensor. The range of the wide-range differential pressure sensor covers the dynamic pressure measurement range. When Qc1 is close to 0Pa, the zero deviation b of the measurement dynamic pressure Qc2 of the wide-range differential pressure sensor is calculated; when Qc1 is close to the range end value of the small-range differential pressure sensor, the error correction slope k ofthe dynamic pressure Qc2 is calculated; when the dynamic pressure Qc is within the measurement range of the small-range differential pressure sensor, the measurement dynamic pressure Qc1 of the small-range differential pressure sensor is the real dynamic pressure, namely Qc = Qc1; otherwise, the real dynamic pressure is obtained by correcting the dynamic pressure Qc2. Measurement configurations ofthe small-range differential pressure sensor and the wide-range differential pressure sensor are constructed, and through cooperative work of the small-range differential pressure sensor and the wide-range differential pressure sensor, measurement precision and long-term stability within the dynamic pressure full-pressure range are achieved.
Owner:CHENGDU KAITIAN ELECTRONICS

Method for measuring uranium mine air return shaft radon emissions

Provided is a method for measuring uranium mine air return shaft radon emissions. Firstly, a multi-point method is adopted to perform radon concentration measurement on the specific sample points at the uranium mine air return shaft head, and average outlet air speed and average radon concentration in a radial specific area at the air return shaft head are calculated, and the product of the average air speed value and radon concentration mean value of each area and the area of the specific area is weighted to calculate the radon release rate of the air return shaft. For a specific air return shaft, a constant numerical relationship exists between the release rate and the shaft center air speed and the shaft center radon concentration of a cross section and the area of the cross section, and the conversion coefficient of the air return shaft is obtained based on the rule and through the calculation of measured data. In the subsequent measurement of the radon release rate of the uranium mine air return shaft, one only needs to measure the shaft center radon concentration and air speed of the cross section of the air return shaft, multiplies the radon concentration and air speed values by the conversion coefficient and the sectional area of the air return shaft outlet to obtain the radon release rate of the uranium mine air return shaft, and then multiplies the radon release rate by the radon emission time of the air return shaft to calculate the radon emission value of the uranium mine air return shaft.
Owner:NANHUA UNIV

Workpiece platform system of photoetching machine

The invention discloses a workpiece platform system of a photoetching machine. The workpiece platform system comprises a rack, a base platform, two silicon-chip platforms, a measuring grating, a dual-frequency laser, three-freedom-degree heterodyne grating interferometers and a signal receiving and processing part, wherein the two silicon-chip platforms operate at an exposure station and a preprocessing station; the four corners of each silicon-chip platform are provided with one three-freedom-degree heterodyne grating interferometer respectively, and the measuring grating is arranged on the rack above the silicon-chip platform. Dual-frequency orthogonal-polarization laser emitted by the dual-frequency laser is transmitted to the three-freedom-degree heterodyne grating interferometers and the measuring grating by optical fiber, four beams of diffraction light of the measuring grating irradiate back to the three-freedom-degree heterodyne grating interferometers, and finally the four beams of measuring light signals are emitted to the signal receiving and processing part. When the silicon-chip platforms move relatively to the measuring grating, the reading in the signal receiving and processing part is utilized for acquiring six-freedom displacement of the silicon-chip platforms by calculation. The workpiece platform system disclosed by the invention has the advantages that the indexes such as measuring accuracy and dynamic performance of the silicon-chip platforms can be improved, and further the whole performance of the workpiece platform system is further improved.
Owner:TSINGHUA UNIV +1

A gap detection method for suspension polishing

The invention discloses a suspension polishing machining gap detecting method. Adopted hydrodynamic polishing equipment comprises a polishing disk, a polishing solution container, a polishing solution container fixing plate, a distance measuring sensor, a screw mechanism and a fine adjustment mechanism. The centers of the polishing disk and the polishing solution container are aligned by adjusting the fine adjustment mechanism, and the screw mechanism is adjusted to achieve relative movement of the polishing disk and the polishing solution container in the Z-axis direction, so that machining gaps of suspension polishing are adjusted. Then the moving distance of the polishing solution container is detected through the distance measuring sensor disposed at the bottom of a polishing solution, and the machining gaps between the polishing disk and the polishing solution container are worked out. By means of the suspension polishing machining gap detecting method, the machining gaps can be accurately detected, the change values of the machining gaps due to generation of hydrodynamic pressure can be detected in real time, and the micrometer-level measurement accuracy can be achieved. An adopted electric eddy current displacement sensor has high displacement measurement accuracy, is adaptable to complex testing environments and guarantees the experimental accuracy.
Owner:ZHEJIANG UNIV OF TECH

Method, device, device and system for detecting switching time of power-down protection equipment

The present application provides a method, device, device and system for detecting switching time of a power-down protection device. The method is executed by a tester, and the tester is connected to a switch. The method includes: sending a test data packet to the switch, and the switch is used to send the test data packet To the power-down protection device, the power-down protection device is used for power-down protection of the connected protected device; receiving the test data packet returned by the switch, and the switch is used to receive the test data packet returned by the power-down protection device; according to sending the test data packet to the switch The number of data packets and the number of test data packets returned by the receiving switch are used to calculate the number of packet loss; according to the packet sending rate and the number of packet loss sent by the tester to the switch, the switching time of the power-down protection device is determined, and the switching time is used for Indicates the state switching duration corresponding to the power-down protection device when the protected device switches its working state. Therefore, when the switching time of the power-down protection device is relatively long, the switching time can also be accurately detected.
Owner:HANGZHOU DPTECH TECH

MEMS mass flow controller based on piezoelectric control valve and control method

The invention discloses an MEMS mass flow controller based on a piezoelectric control valve and a control method. The MEMS mass flow controller comprises a shell, a mass flow sensor and a piezoelectric diaphragm, wherein the mass flow sensor and the piezoelectric diaphragm are located in the shell, the shell comprises a lower base plate, an upper cover plate and an airflow channel defined by the lower base plate and the upper cover plate, the mass flow sensor is arranged on the side, close to an inlet of the airflow channel, of the lower base plate, the piezoelectric diaphragm is arranged on one side, close to the outlet of the airflow channel, of the lower substrate, the two ends of the piezoelectric diaphragm are arranged on the lower substrate, and a vibration gap is formed between the middle of the piezoelectric diaphragm and the lower substrate. According to the invention, the mass flow sensor is used for accurately measuring gas flow and feeding back the gas flow in real time, the gas flow serves as an adjusting basis of driving voltage of the piezoelectric diaphragm, and then high-precision control over micro flow can be achieved through deformation of the piezoelectric diaphragm; and the MEMS mass flow controller has the advantages of being simple in structure, small in size, low in cost, high in preparation controllability and the like.
Owner:青岛芯笙微纳电子科技有限公司

Anti-interference RTD measurement loop

The invention relates to an anti-interference RTD measurement loop. The device comprises a stator bar RTD, an RTD transfer joint, a temperature measurement terminal box, a monitoring terminal strip and a monitoring AI module. The stator bar RTD adopts a three-wire system connection method, and a stator bar RTD is connected with a monitoring AI module through an RTD transit joint, the temperature measurement terminal box and the monitoring terminal strip. The RTD transit joint, the temperature measurement terminal box and an anti-interference single-ended ground are also arranged, wherein a point C and a point B of the monitoring terminal strip are short-circuited; the point A and the point B are connected through a filter capacitor; the point C is a power supply terminal of the monitoringterminal strip and is connected with a power supply of the monitoring AI module, the point B is a terminal to which the monitoring terminal strip and an R3 bridge arm of the monitoring AI module are connected, and the point A is a third terminal to which the monitoring terminal strip and the monitoring AI module are connected. According to the invention, the problem that the RTD signal of the stator bar in the low-rotating-speed section of the unit is interfered is effectively solved.
Owner:STATE GRID CORP OF CHINA +2

Vehicle-mounted multi-view structure and vehicle

A vehicle-mounted multi-view structure and a vehicle, the vehicle-mounted multi-view structure comprises a mounting bracket (100) and a plurality of shooting assemblies (200), the mounting bracket (100) comprises a mounting part (10) and a connecting part (20), and the connecting part (20) is used for mounting the multi-view structure on the vehicle; the plurality of shooting assemblies (200) are arranged in the mounting part (10); the plurality of shooting assemblies (200) comprise at least two first shooting assemblies (201) and at least two second shooting assemblies (202), the at least two first shooting assemblies (201) have an overlapped first observation range, and the at least two first shooting assemblies (201) are used for measuring the distance between a scene object in the first observation range and the vehicle; the at least two second shooting assemblies (202) have an overlapped second observation range, and the at least two second shooting assemblies (202) are used for measuring the distance between the scene object in the second observation range and the vehicle; the observation range of the first shooting assembly (201) is different from that of the second shooting assembly (202). According to the vehicle-mounted multi-view structure and the vehicle, the relative distance between the scene object and the vehicle can be judged through the first shooting assembly and the second shooting assembly, and accurate measurement of the large-range distance is achieved.
Owner:SZ DJI TECH CO LTD

Method and system for calibrating step gauges that can eliminate Abbe errors based on laser interferometry

The invention mainly relates to the technical field of length measurement, and provides a step gauge calibration system based on laser interference that can eliminate Abbe errors, including: 3-way laser interference optical paths that can form any triangular prism in space, and set in space The fourth laser interference optical path used for wavelength compensation inside and parallel to the three laser interference optical paths. Part of the laser beam emitted by the laser is reflected to the interference mirror as a reference signal after passing through the beam splitter. The measurement signal is formed in the mirror, and when the measured step gauge is displaced, the displacement value of the measured step gauge that eliminates the Abbe error is obtained through the measurement signal and reference signal and calculated according to the measurement model, and the three laser light paths are synthesized into the measured step gauge. The measurement model on the step gauge measurement line, no matter where the step gauge is installed on the measuring platform of the coordinate measuring machine, can very conveniently realize the measurement accuracy of the laser interferometry step gauge based on Abbe's principle.
Owner:NAT INST OF METROLOGY CHINA
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