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Step gauge calibration method and system capable of eliminating abbe errors based on laser interference

A technology of laser interference and Abbe error, applied in measurement devices, instruments, mechanical devices, etc., can solve problems such as difficult implementation and complex system structure, and achieve the effect of convenient measurement accuracy

Active Publication Date: 2020-06-05
NAT INST OF METROLOGY CHINA
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Problems solved by technology

The system adopts the displacement measurement method based on the principle of vacuum interference, which has high precision, but the system structure is relatively complicated and difficult to realize

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  • Step gauge calibration method and system capable of eliminating abbe errors based on laser interference
  • Step gauge calibration method and system capable of eliminating abbe errors based on laser interference
  • Step gauge calibration method and system capable of eliminating abbe errors based on laser interference

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Embodiment Construction

[0028] In order to enable those skilled in the art to better understand the solutions of the present invention, the following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only It is an embodiment of a part of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present invention.

[0029] Embodiments of the present application will be described below in conjunction with the accompanying drawings, but the present invention is not limited thereto.

[0030] Such as figure 1 and figure 2 As shown, it is a schematic structural diagram of a step gauge calibration system based on laser interference that can elimin...

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Abstract

The invention mainly relates to the technical field of length measurement. The invention provides a step gauge calibration system capable of eliminating abbe errors based on laser interference. The systemcomprises three laser interference light paths which can form any triangular prism shape in space, and afourth laser interference light path which is arranged in the space, is parallel to the three laser interference light paths and is used for wavelength compensation; one part of laser beams emitted by the laser passes through the spectroscope and then is reflected to the interference mirroras reference signals; one part is projected to the reflector to be reflected and then enters the interference mirror to form a measurement signal; when the measured step gauge is displaced, the displacement value of the measured step gauge without the abbe error is calculated through the measurement signal and the reference signal according to the measurement model; three laser light paths are combined to a measurement model on a measurement line of the step gauge to be measured, and no matter where the step gauge is installed on a measurement platform of a coordinate measuring machine, the measurement accuracy of the laser interference method step gauge based on the abbe principle can be achieved very conveniently.

Description

technical field [0001] The invention relates to the technical field of length measurement, in particular to a method and system for calibrating a step gauge that can eliminate Abbe errors based on laser interference. Background technique [0002] As a general-purpose measuring instrument for physical length, the step gauge has the characteristics of high precision and good consistency. Therefore, the International Bureau of Weights and Measures (BIPM) has included the step gauge as a key comparison item for international length measurements. , making it an important symbol to measure the capability of a national geometric calibration laboratory. Widely used in precision calibration and value transfer of high-precision instruments such as coordinate measuring machines, CNC machine tools, and optical measuring tools. [0003] Therefore, on the basis of the coordinate measuring machine, the National Metrology Institute of Japan (NMIJ for short) realizes large displacement meas...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B5/02
CPCG01B5/02G01B21/042
Inventor 任国营
Owner NAT INST OF METROLOGY CHINA
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