A gap detection method for suspension polishing

Abstract

The invention discloses a suspension polishing machining gap detecting method. Adopted hydrodynamic polishing equipment comprises a polishing disk, a polishing solution container, a polishing solution container fixing plate, a distance measuring sensor, a screw mechanism and a fine adjustment mechanism. The centers of the polishing disk and the polishing solution container are aligned by adjusting the fine adjustment mechanism, and the screw mechanism is adjusted to achieve relative movement of the polishing disk and the polishing solution container in the Z-axis direction, so that machining gaps of suspension polishing are adjusted. Then the moving distance of the polishing solution container is detected through the distance measuring sensor disposed at the bottom of a polishing solution, and the machining gaps between the polishing disk and the polishing solution container are worked out. By means of the suspension polishing machining gap detecting method, the machining gaps can be accurately detected, the change values of the machining gaps due to generation of hydrodynamic pressure can be detected in real time, and the micrometer-level measurement accuracy can be achieved. An adopted electric eddy current displacement sensor has high displacement measurement accuracy, is adaptable to complex testing environments and guarantees the experimental accuracy.

Description

technical field [0001] The invention relates to the technical field of precision polishing, and more specifically, relates to a method for detecting gaps in suspension polishing. Background technique [0002] With the continuous development of technology, the requirements for the surface quality of workpieces are getting higher and higher. The machining size accuracy can reach 10nm, and the surface roughness can reach 1nm. Ultra-precision machining has special requirements for processing equipment, workpiece material, and measurement environment. It requires the comprehensive application of precision machinery, precision measurement, precision servo system, computer control and other advanced technologies. [0003] For the existing non-contact polishing processing methods, they only have the function of ordinary polishing processing, such as float polishing and elastic emission processing, which do not have detection methods for detecting relevant parameters, so there is no...

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Problems solved by technology

[0003] For the existing non-contact polishing processing methods, they only have the function of ordinary polishing processing, such as float polishing and elastic emission processing, which do not have detection methods for detecting relevant parameters, so there is no feedback on the working conditions during the polishing process. During the process, the processing gap between the polishing disc and the bottom of the polishing container is unknown, and it is difficult to guarantee the processing conditions, related working parameters and final surface quality of the workpiece.

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